In the past decades, several methods have been reported to improve the tracking performance of the positioning stages [
7,
11,
13–
19]. These methods introduced to overcome the positioning limitation by the lightly-damped mechanical resonance take a very important position in the above methods, and can be roughly grouped into two categories: (i) Mechanical improvements that include development of new structures, like flexure-based mechanisms aimed at achieving high resonant frequencies [
13,
20,
21], and (ii) control strategies that include various feedforward and feedback strategies, such as notch filters [
22,
23], positive position feedback control [
9,
24], polynomial-based control [
25], positive acceleration, velocity, and position feedback control [
26], integral resonant control (IRC) [
27–
29], delay time control [
15], force feedback control [
30], and linear quadratic Gaussian controller [
31], that impart significant damping to the resonant mode. These damping schemes are then augmented with suitably gained tracking controllers to overcome errors introduced by hysteresis and creep nonlinearities arising from the nonlinear dynamics of the piezoelectric actuators employed [
9,
15,
26]. In most reported implementations, the damping control and tracking control designs are sequentially performed, whereby the tracking control loop invariably changes the location of the damped system poles, consequently narrowing the achievable positioning bandwidth [
32]. To overcome this and to ensure a maximally flat-band closed-loop response, a simultaneous controller design mimicking the Butterworth pole-placement pattern was proposed in Ref. [
33]. Although significant improvements have been achieved by the techniques mentioned above, the achievable closed-loop bandwidth is still limited by the original open-loop resonance frequency of the respective positioning axis.