Frontiers of Mechanical Engineering >

2009 , Vol. 4 >Issue 1: 64 - 70

DOI: https://doi.org/10.1007/s11465-009-0009-x

RESEARCH ARTICLE

Model reduction techniques for dynamics analysis of ultra-precision linear stage

  • Xuedong CHEN ,
  • Zhixin LI
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  • State Key Laboratory of Numerical Manufacture & Equipment, Huazhong University of Science & Technology, Wuhan 430074, China

Received date: 25 Feb 2008

Accepted date: 10 Apr 2008

Published date: 05 Mar 2009

Copyright

2014 Higher Education Press and Springer-Verlag Berlin Heidelberg
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Abstract

Spring-damping elements are used to simplify the internal interaction in the proposed finite element (FE) model of an ultra-precision linear stage. The dynamics behavior is studied. The comparison between mode shapes from the eigenvalue analysis shows that the components, except the translator, can represent system dynamics characteristics. A reduction approach is used to simplify the system in a dynamic studied. There is little difference between the vibration mode and the response analysis. The experimental modal analysis proves the validity of the reduction approach, which can be generalized to the development and dynamics characteristic study of a complex system model to obviously save computational resource.

Key words： dynamics analysis; air-bearing; linear stage; reduction

Cite this article

Xuedong CHEN , Zhixin LI . Model reduction techniques for dynamics analysis of ultra-precision linear stage[J]. Frontiers of Mechanical Engineering, 2009 , 4(1) : 64 -70 . DOI: 10.1007/s11465-009-0009-x

Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grant No. 50605025) and the National Basic Research Program of China (NO. 2003CB716206).

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