Model reduction techniques for dynamics analysis of ultra-precision linear stage

Abstract

Spring-damping elements are used to simplify the internal interaction in the proposed finite element (FE) model of an ultra-precision linear stage. The dynamics behavior is studied. The comparison between mode shapes from the eigenvalue analysis shows that the components, except the translator, can represent system dynamics characteristics. A reduction approach is used to simplify the system in a dynamic studied. There is little difference between the vibration mode and the response analysis. The experimental modal analysis proves the validity of the reduction approach, which can be generalized to the development and dynamics characteristic study of a complex system model to obviously save computational resource.

Keywords

dynamics analysis / air-bearing / linear stage / reduction

References

[1] Dupont P, Stokes A. Model reduction techniques for shock loaded equipment emulators. 69th Shock and Vibration Symposium, St. Paul, MN, 1998

[2] Lefevre J, Gabbert U. Finite element modeling of vibro-acoustic systems for active noise reduction. Technische Mechanik, 2005, 25: 241-247

[3] Hwang K H, Lee K W, Park G J. Robust optimization of an automobile rearview mirror for vibration reduction. Struct Multidisc Optim, 2001, 21: 300-308

[4] Krysl P, Lall S, Marsden J E. Dimensional model reduction in non-linear finite element dynamics of solids and structures. International Journal for Numerical Methods in Engineering, 2001, 51: 479-504

[5] Holmes M, Hocken R, Trumper D. The long–range scanning stage: a novel platform for scanned-probe microscopy. Journal of the International Societies for Precision Engineering and Nanotechnology, 2000, 24: 191-209

[6] Dejima S, Gao W, Shimizu H, Kiyono S, Tomita Y. Precision positioning of a five degree-of-freedom planar motion stage. Mechatronics, 2005, 15: 969-987

[7] Okamoto Y, Takahashi N. Minimization of driving force ripple of linear motor for rope-less elevator using topology optimization technique. Journal of Material Processing Technology, 2007, 181: 131-135

[8] Xuedong Chen, Zhixin Li. Air-bearing position optimization based on dynamic characterstics of ultra-precision linear stage. Frontiers of Mechanical Engineering in China, 2008, 3(4): 400-407

RIGHTS & PERMISSIONS

Higher Education Press and Springer-Verlag Berlin Heidelberg