Development and application of high-end aerospace MEMS

Abstract

This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.

Key words： MEMS; design and manufacture technology; aeronautic and aerospace

Acknowledgment

The author sincerely thanks all the researchers and postgraduates who participated in the corresponding projects in the Micro-Nano System Laboratory of NWPU. The author is also grateful for the support given by the National Natural Science Foundation, the Ministry of Science and Technology, the Army General Armaments Department, and the State Administration for Science and Technology for National Defense.

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