Capacitive position measurement for high-precision space inertial sensor

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Front. Phys. ›› 2009, Vol. 4 ›› Issue (2) : 205-208. DOI: 10.1007/s11467-009-0019-5
RESEARCH ARTICLE

Capacitive position measurement for high-precision space inertial sensor

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front. Phys., 2009, 4(2): 205‒208 https://doi.org/10.1007/s11467-009-0019-5

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