Capacitive position measurement for high-precision space inertial sensor

Abstract

Low noise position measurement is fundamental for space inertial sensors, and at present the capacitive position sensor is widely employed for space inertial sensors. The design for the possible suppression of the front-end electric noises for a capacitive sensor is presented. A prototype capacitive sensor with 2×10^-6pF/Hz^1/2 at frequency above 0.04 Hz is achieved and further improvements are discussed.

Keywords

inertial sensor / accelerometer / capacitive position sensor

References

[1] Y. Z. Bai, H. B. Tu, Z. B. Zhou, S. C. Wu, and J. Luo, J. Jpn. Soc. Microgravity Appl., 2008, 25: 423

[2] P. Touboul, B. Foulon, and E. Willemenot, Acta Astronautica, 1999, 45(10): 605

[3] M. Rodrigues, B. Foulon, F. Liorzou, and P. Touboul, Class. Quantum Grav., 2003, 20: S291

[4] J. Flury, S. Bettadpur, and B. D. Tapley, Adv. Sp. Res., 2008, 42: 1414

[5] LISA System and Technology Study Report, ESA–SCI 11, July 2000

[6] S. Vitale, P. Bender, A. Brillet, S. Buchman, A. Cavalleri, M. Cerdonio, M. Cruise, C. Cutler, K. Danzmann, R. Dolesi, W. Folkner, A. Gianolio, Y. Jafry, Gunther. Hasinger, G. Heinzel, C. Hogan, M. Hueller, J. Hough, S. Phinney, T. Prince, D. Richstone, D. Robertson, M. Rodrigues, A. Rudiger, M. Sandford, R. Schilling, D. Shoemaker, B. Schutz, R. Stebbins, C. Stubbs, T. Sumner, K. Thorne, M. Tinto, P. Touboul, H. Ward, W. Weber, and W. Winkler, Nucl. Phys. B (Proc. Suppl.), 2002, 110: 209

[7] B. L. Schumaker, Class. Quantum Grav., 2003, 20: S239

[8] V. Josselin, P. Touboul, and R. Kielbasa, Sensors and Actuators A, 1999, 78: 92

[9] O. Petersons, IEEE Trans. Instrum. Meas., 1964, 13(4): 216

[10] K. Watanabe and G. C. Temes, IEEE Trans. Instrum. Meas., 1984, 33(4): 247

[11] T. Kataoka and M. Kanno, Instrumentation and Measurement Technology Conference, May 10-12, 1994, 2: 1008

[12] M. Bramanti, IEEE Trans. Ind. Electron., 1990, 37(6): 584

[13] S. Natarajan and B. K. Herman, Twenty-Second Southeastern Symposium on System Theory, March 11-13, 1990: 46

[14] S. M. Huang, R. G. Green, A. Plaskowski, and M. S. Beck, IEEE Trans. Instrum. Meas., 1988, 37(3): 368

[15] X. L. Zhang and P. K. Chan, IEEE Trans. Instrum. Meas., 2008, 57(7): 1492

[16] S. Adl and M. Peckerar, IEEE Sensors Applications Symposium, San Diego, February 6-8, 2007

[17] M. Bingesser, Design Automation and Test in Europe, March 10-14, 2008: 868

[18] Z. F. Wang, Z. H. Li, X. W. Ni, and B. X. Mo, 8^th International Conference on Solid-State and Integrated Circuit Technology, October 23-26, 2006: 673

[19] W. H. P. Leslie, The Institution of Electrical Engineers, 1961, 3646: 539

[20] J. Josselin, R. Chhun, P. Touboul, and G. Metris, 59th International Astronautical Congress, Glasgow, September 29–October 3, 2008

[21] K. X. Sun, G. Allen, S. Buchman, D. Debra, and R. Byer, Class. Quantum Grav., 2005, 22: S287

RIGHTS & PERMISSIONS

Higher Education Press and Springer-Verlag Berlin Heidelberg