Capacitive position measurement for high-precision space inertial sensor

Abstract

Low noise position measurement is fundamental for space inertial sensors, and at present the capacitive position sensor is widely employed for space inertial sensors. The design for the possible suppression of the front-end electric noises for a capacitive sensor is presented. A prototype capacitive sensor with 2×10^-6pF/Hz^1/2 at frequency above 0.04 Hz is achieved and further improvements are discussed.

Keywords

inertial sensor / accelerometer / capacitive position sensor

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2014 Higher Education Press and Springer-Verlag Berlin Heidelberg