Researchers analyzed the main factors that affect the surface topography of ultra-precision machining, such as brittle materials [
2], cutting parameters [
3], tool geometries [
4], and size effect [
5]. Relative vibration plays an important role in the surface topography of ultra-precision machining [
6,
7] and is the main reason of the ripple error [
8]. Cheung and Lee [
9] conducted the analysis of power spectral density of surface profile and found that surface profile was mainly affected by the relative vibration of the cutter and the workpiece along the cutting trajectory. An et al. [
10] established the dynamic equation of the vertical spindle supported by aerostatic bearings to study the rotation characteristics of the spindle. The influence of the impact force caused by interrupted cutting, cutting parameters, and the moment of inertia of the spindle on the deviation angle of the spindle and the frequency and amplitude of the ripple error of the cutting surface are analyzed qualitatively. Yang et al. [
11] and Miao et al. [
12] used Fourier and wavelet transform to analyze the contour values of machined surface along the cutting direction performed by spatial frequency domain. They also analyzed the relationship between vibration frequency and spindle natural frequency through finite element and modal test. Huang et al. [
13] established the dynamic model of spindle of ultra-precision turning machine and determined the periodic vibration phenomenon of frequency aliasing of spindle under the action of dynamic unbalance. He and Zong [
14] discussed the effect of the vibration between the diamond tool and workpiece along the radial direction and provided a summary of the theoretical models. He et al. [
15] also innovatively established an accurate 3D surface topography model for the diamond-turning process considering kinematic factors, dynamic factors, and material defects. In terms of dynamic factors, he concluded that multifrequency vibrations determine the complication of surface topography and irregularities of surface bulge segments. Chen et al. [
16] presented the multimode frequency vibration of the machine tool and its influences on the surface generation in flycutting. Zhang et al. [
17] theoretically and experimentally studied the dynamic characteristics of spindle imbalance induced forced vibration and its effect on surface generation in diamond turning and concluded that it would yield a significant effect upon surface topography. Tian et al. [
18] theoretically and experimentally analyzed surface generation in ultra-precision single-point diamond turning considering the basic machining parameters and the relative vibration along the cutting and feeding directions. Gao et al. [
19] and Chen et al. [
20] investigated the sources of frequency domain error of ultra-precision spindle and its impact on surface quality based on air-induced vibration of aero-static bearing. He and Zong [
21] revealed the mechanism of the influence of multifrequency vibration on the optical performance of diamond-turned workpiece and adopted the well-established two-step process technology including optimization of the cutting parameters and the strict balance of the spindle to reduce the effect of vibration, which is experimentally proven to be sufficiently effective.