RESEARCH ARTICLE

Robust control of XYZ flexure-based micromanipulator with large motion

  • Xueyan TANG ,
  • I-Ming CHEN
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  • School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore

Received date: 14 Jul 2008

Accepted date: 04 Sep 2008

Published date: 05 Mar 2009

Copyright

2014 Higher Education Press and Springer-Verlag Berlin Heidelberg

Abstract

This article describes the development of an XYZ flexure-based micromanipulator, with the features of decoupled kinematic structure, large motion range, high positioning precision, and fast response. The large motion range of flexure mechanisms is quantified by a given definition. Based on the given definition, large motion is achieved in the mechanical design of the XYZ-flexure parallel mechanism (FPM). To ensure high positioning precision and fast dynamic response, a hybrid control algorithm with both position control and vibration control are designed, using the H-theory. The controller strongly solves the three common problems of flexure mechanisms simultaneously, including unmodeled uncertainties, the external disturbances and vibration caused by inherent low damping.

Cite this article

Xueyan TANG , I-Ming CHEN . Robust control of XYZ flexure-based micromanipulator with large motion[J]. Frontiers of Mechanical Engineering, 2009 , 4(1) : 25 -34 . DOI: 10.1007/s11465-009-0004-2

Acknowledgements

This project was financially sponsored by the Ministry of Education, Singapore, under ARP RG 06/02, and Manufacturing Science and Technology (MST) program of Singapore-MIT Alliance.
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