Review on piezoelectric actuators: materials, classifications, applications, and recent trends

Abstract

Piezoelectric actuators are a class of actuators that precisely transfer input electric energy into displacement, force, or movement outputs efficiently via inverse piezoelectric effect-based electromechanical coupling. Various types of piezoelectric actuators have sprung up and gained widespread use in various applications in terms of compelling attributes, such as high precision, flexibility of stoke, immunity to electromagnetic interference, and structural scalability. This paper systematically reviews the piezoelectric materials, operating principles, representative schemes, characteristics, and potential applications of each mainstream type of piezoelectric actuator. Herein, we intend to provide a more scientific and nuanced perspective to classify piezoelectric actuators into direct and indirect categories with several subcategories. In addition, this review outlines the pros and cons and the future development trends for all kinds of piezoelectric actuators by exploring the relations and mechanisms behind them. The rich content and detailed comparison can help build an in-depth and holistic understanding of piezoelectric actuators and pave the way for future research and the selection of practical applications.

Graphical abstract

Keywords

piezoelectric actuator / piezoelectric effect / amplified piezoelectric actuator / ultrasonic actuator / stepping actuator / piezoelectric polymer

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Nomenclature

Abbreviations
DOF	Degree of freedom
HAM	Hybrid-type amplification mechanism
IDA	Inertia/impact drive actuator
LAM	Lever-type amplification mechanism
PI	Physik Instrumente
PID	Proportional integral derivative
PMUT	Piezoelectric micromachined ultrasound transducer
PSA	Piezoelectric stack actuator
PVDF	Polyvinylidene fluoride
PZT	Piezoelectric lead zirconate titanate
RAINBOW	Reduced and internally biased oxide wafer
S–R	Scott–Russell
SSDA	Stick–slip drive actuator
SWM	Standing wave motor
TAM	Triangular-type amplification mechanism
TWM	Traveling wave motor
THUNDER	Thin layer unimorph driver
Variables
A	Amplitude of the standing wave
d15, d31, d33	Piezoelectric coupling coefficients
Di	Electrical displacement
h	Height of the single layer of piezoelectric material
k	Wavenumber whose value is equal to 2π/λ
k33	Electromechanical coupling factor
l	Length of the single layer of piezoelectric material
L	Output displacement
t	Time
Tc	Curie temperature
U	Voltage applied to the external electrodes
x	Coordinate of a certain position on the elastic body
ω	Angular frequency
λ	Wavelength of the standing wave

Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grant No. 62004166), Natural Science Foundation of Ningbo, China (Grant No. 202003N4062), Natural Science Foundation of Zhejiang Province, China (Grant No. LY23F040002), National Postdoctoral Program for Innovative Talents, China (Grant No. BX20200279), Natural Science Basic Research Program of Shaanxi Province, China (Grant No. 2020JQ-199), and Fundamental Research Funds for the Central Universities, China (Grant No. 31020190QD027).

Conflict of Interest

The authors declare that they have no conflict of interest.

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