Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages

Abstract

Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious influence on the accuracy of its motion and measurement. Systematic evaluation of such influence is essential for the design and improvement of stages. A systematic approach to modeling the dynamic accuracy of a nano-precision positioning stage is developed in this work by integrating a multi-rigid-body dynamic model of the mechanical system and measurement system models. The influence of structural and dynamic parameters, including aerostatic bearing configurations, motion plane errors, foundation vibrations, and positions of the acting points of driving forces, on dynamic accuracy is investigated by adopting the H-type configured stage as an example. The approach is programmed and integrated into a software framework that supports the dynamic design of nano-precision positioning stages. The software framework is then applied to the design of a nano-precision positioning stage used in a packaging lithography machine.

Keywords

nano-precision positioning stage / analysis and design / structural and dynamic parameters / dynamic accuracy / systematic modeling

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Acknowledgements

This work was partially supported by the National Science and Technology Major Project of China (Grant Nos. 2009ZX02204-006 and 2017ZX02101007-002) and the National Natural Science Foundation of China (Grant Nos. 51435006 and 51675195).

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