Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages

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Front. Mech. Eng. ›› 2019, Vol. 14 ›› Issue (3) : 255-272. DOI: 10.1007/s11465-019-0538-x
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Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages

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