Laser interference fabrication of large-area functional periodic structure surface

Lei WANG , Zi-Han WANG , Yan-Hao YU , Hong-Bo SUN

Front. Mech. Eng. ›› 2018, Vol. 13 ›› Issue (4) : 493 -503.

PDF (866KB)
Front. Mech. Eng. ›› 2018, Vol. 13 ›› Issue (4) : 493 -503. DOI: 10.1007/s11465-018-0507-9
REVIEW ARTICLE
REVIEW ARTICLE

Laser interference fabrication of large-area functional periodic structure surface

Author information +
History +
PDF (866KB)

Abstract

Functional periodic structures have attracted significant interest due to their natural capabilities in regulating surface energy, surface effective refractive index, and diffraction. Several technologies are used for the fabrication of these functional structures. The laser interference technique in particular has received attention because of its simplicity, low cost, and high-efficiency fabrication of large-area, micro/nanometer-scale, and periodically patterned structures in air conditions. Here, we reviewed the work on laser interference fabrication of large-area functional periodic structures for antireflection, self-cleaning, and superhydrophobicity based on our past and current research. For the common cases, four-beam interference and multi-exposure of two-beam interference were emphasized for their setup, structure diversity, and various applications for antireflection, self-cleaning, and superhydrophobicity. The relations between multi-beam interference and multi-exposure of two-beam interference were compared theoretically and experimentally. Nanostructures as a template for growing nanocrystals were also shown to present future possible applications in surface chemical control. Perspectives on future directions and applications for laser interference were presented.

Keywords

laser interference / four-beam interference / multi-exposure of two-beam interference / additive fabrication

Cite this article

Download citation ▾
Lei WANG, Zi-Han WANG, Yan-Hao YU, Hong-Bo SUN. Laser interference fabrication of large-area functional periodic structure surface. Front. Mech. Eng., 2018, 13(4): 493-503 DOI:10.1007/s11465-018-0507-9

登录浏览全文

4963

注册一个新账户 忘记密码

References

[1]

Clapham P B, Hutley M C. Reduction of lens reflexion by the “moth eye” principle. Nature, 1973, 244(5414): 281–282

[2]

Li X M, Reinhoudt D, Crego-Calama M. What do we need for a superhydrophobic surface? A review on the recent progress in the preparation of superhydrophobic surfaces. Chemical Society Reviews, 2007, 36(8): 1350–1368

[3]

Roach P, Shirtcliffe N J, Newton M I. Progress in superhydrophobic surface development. Soft Matter, 2008, 4(2): 224–240

[4]

De Angelis F, Gentile F, Mecarini F, Breaking the diffusion limit with super-hydrophobic delivery of molecules to plasmonic nanofocusing SERS structures. Nature Photonics, 2011, 5(11): 682–687

[5]

Abid M I, Wang L, Chen Q D, Angle-multiplexed optical printing of biomimetic hierarchical 3D textures. Laser & Photonics Reviews, 2017, 11(2): 1600187

[6]

Xia D, Ku Z, Lee S C, Nanostructures and functional materials fabricated by interferometric lithography. Advanced Materials, 2011, 23(2): 147–179

[7]

Kim K, Zhu W, Qu X, 3D optical printing of piezoelectric nanoparticle—Polymer composite materials. ACS Nano, 2014, 8(10): 9799–9806

[8]

Li Y, Zhang J, Zhu S, Biomimetic surfaces for high-performance optics. Advanced Materials, 2009, 21(46): 4731– 4734

[9]

Chen F. Micro- and submicrometric waveguiding structures in optical crystals produced by ion beams for photonic applications. Laser & Photonics Reviews, 2012, 6(5): 622–640

[10]

Guo R, Yuan D, Das S. Large-area microlens arrays fabricated on flexible polycarbonate sheets via single-step laser interference ablation. Journal of Micromechanics and Microengineering, 2011, 21(1): 015010

[11]

Kim K S, Jeong H, Jeong M S, Polymer-templated hydrothermal growth of vertically aligned single-crystal ZnO nanorods and morphological transformations using structural polarity. Advanced Functional Materials, 2010, 20(18): 3055–3063

[12]

Wang L, Lu Z H, Lin X F, Rapid fabrication of large-area periodic structures by multiple exposure of two-beam interference. Journal of Lightwave Technology, 2013, 31(2): 276–281

[13]

Lin C, Yan S, You F. Fabrication and characterization of short-period double-layer cross-grating with holographic lithography. Optics Communications, 2017, 383: 17–25

[14]

Liu Y F, Feng J, Yin D, Viewing-angle independence of white emission from microcavity top-emitting organic light-emitting devices with periodically and gradually changed cavity length. Organic Electronics, 2013, 14(6): 1597–1601

[15]

Wu D, Chen Q D, Xia H, A facile approach for artificial biomimetic surfaces with both superhydrophobicity and iridescence. Soft Matter, 2010, 6(2): 263–267

[16]

Cho C Y, Moon J H. Hierarchically porous TiO2 electrodes fabricated by dual templating methods for dye-sensitized solar cells. Advanced Materials, 2011, 23(26): 2971–2975

[17]

Chen Y, Yuan D, Yang M, High efficiency GaN LEDs with submicron-scale 2D periodic structures directly fabricated by laser interference ablation. Optics & Laser Technology, 2017, 90: 211–215

[18]

Wu D, Wu S Z, Chen Q D, Curvature-driven reversible in situ switching between pinned and roll-down superhydrophobic states for water droplet transportation. Advanced Materials, 2011, 23(4): 545–549

[19]

Wu D, Wu S, Chen Q D, Facile creation of hierarchical PDMS microstructures with extreme underwater superoleophobicity for anti-oil application in microfluidic channels. Lab on a Chip, 2011, 11(22): 3873–3879

[20]

Cornago I, Hernández A L, Casquel R, Bulk sensing performance comparison between silicon dioxide and resonant high aspect ratio nanopillars arrays fabricated by means of interference lithography. Optical Materials Express, 2016, 6(7): 2264–2272

[21]

Oh Y, Lim J W, Kim J G, Plasmonic periodic nanodot arrays via laser interference lithography for organic photovoltaic cells with>10% efficiency. ACS Nano, 2016, 10(11): 10143–10151

[22]

Raub A K, Li D, Frauenglass A, Fabrication of 22 nm half-pitch silicon lines by single-exposure self-aligned spatial-frequency doubling. Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena: An Official Journal of the American Vacuum Society, 2007, 25(6): 2224–2227

[23]

Kondo T, Matsuo S, Juodkazis S, Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals. Applied Physics Letters, 2001, 79(6): 725–727

[24]

Lei M, Yao B L, Rupp R A. Structuring by multi-beam interference using symmetric pyramids. Optics Express, 2006, 14(12): 5803–5811

[25]

Wu D, Chen Q D, Xu B B, Self-organization of polymer nanoneedles into large-area ordered flowerlike arrays. Applied Physics Letters, 2009, 95(9): 091902

[26]

Shoji S, Sun H B, Kawata S. Photofabrication of wood-pile three-dimensional photonic crystals using four-beam laser interference. Applied Physics Letters, 2003, 83(4): 608–610

[27]

Kawai K, Sakamoto M, Noda K, Tunable dichroic polarization beam splitter created by one-step holographic photoalignment using four-beam polarization interferometry. Journal of Applied Physics, 2017, 121(1): 013102

[28]

Shoji S, Sun H B, Kawata S. Photofabrication of wood-pile three-dimensional photonic crystals using four-beam laser interference. Applied Physics Letters, 2003, 83(4): 608–610

[29]

Wang L, Cao X W, Li Q K, Periodic structures fabricated by nanosecond laser four-beam interference ablation. Chinese Science Bulletin, 2016, 61(6): 616–621

[30]

Lee S K, Park S G, Moon J H, Holographic fabrication of photonic nanostructures for optofluidic integration. Lab on a Chip, 2008, 8(3): 388–391

[31]

Dobrowolski J A, Guo Y N, Tiwald T, Toward perfect antireflection coatings. 3. Experimental results obtained with the use of Reststrahlen materials. Applied Optics, 2006, 45(7): 1555–1562

[32]

Doshi P, Jellison G E, Rohatgi A. Characterization and optimization of absorbing plasma-enhanced chemical vapor deposited antireflection coatings for silicon photovoltaics. Applied Optics, 1997, 36(30): 7826–7837

[33]

Ji L, Hsu H Y, Li X, Localized dielectric breakdown and antireflection coating in metal-oxide-semiconductor photoelectrodes. Nature Materials, 2017, 16(1): 127–131

[34]

Yin D, Feng J, Ma R, Efficient and mechanically robust stretchable organic light-emitting devices by a laser-programmable buckling process. Nature Communications, 2016, 7: 11573

[35]

Sahoo P K, Dev Choudhury B, Joseph J, ZnO nanowire-enabled light funneling effect for antireflection and light convergence applications. Optics Letters, 2017, 42(1): 45–48

[36]

Wang L, Xu B B, Chen Q D, Maskless laser tailoring of conical pillar arrays for antireflective biomimetic surfaces. Optics Letters, 2011, 36(17): 3305–3307

[37]

Cai J, Qi L. Recent advances in antireflective surfaces based on nanostructure arrays. Materials Horizons, 2015, 2(1): 37–53

[38]

Wu D, Zhao Y B, Wu S Z, Simultaneous efficiency enhancement and self-cleaning effect of white organic light-emitting devices by flexible antireflective films. Optics Letters, 2011, 36(14): 2635–2637

[39]

Wu D, Wu S Z, Chen Q D, Curvature-driven reversible in situ switching between pinned and roll-down superhydrophobic states for water droplet transportation. Advanced Materials, 2011, 23(4): 545–549

[40]

Wu D, Chen Q D, Xu B B, Self-organization of polymer nanoneedles into large-area ordered flowerlike arrays. Applied Physics Letters, 2009, 95(9): 091902

[41]

Kim J B, Lee J H, Moon C K, Highly enhanced light extraction from surface plasmonic loss minimized organic light-emitting diodes. Advanced Materials, 2013, 25(26): 3571–3577

[42]

Zhu J, Hsu C M, Yu Z, Nanodome solar cells with efficient light management and self-cleaning. Nano Letters, 2010, 10(6): 1979–1984

[43]

Rao J, Winfield R, Keeney L. Moth-eye-structured light-emitting diodes. Optics Communications, 2010, 283(11): 2446–2450

[44]

Qu Y, Coburn C, Fan D, Elimination of plasmon losses and enhanced light extraction of top-emitting organic light-emitting devices using a reflective subelectrode grid. ACS Photonics, 2017, 4(2): 363–368

[45]

Forberich K, Dennler G, Scharber M C, Performance improvement of organic solar cells with moth eye anti-reflection coating. Thin Solid Films, 2008, 516(20): 7167–7170

[46]

Wu S Z, Wu D, Yao J, One-step preparation of regular micropearl arrays for two-direction controllable anisotropic wetting. Langmuir, 2010, 26(14): 12012–12016

[47]

Wu D, Wu S Z, Zhao S, Rapid, controllable fabrication of regular complex microarchitectures by capillary assembly of micropillars and their application in selectively trapping/releasing microparticles. Small, 2013, 9(5): 760–767

[48]

Xu J, Wang Z, Zhang Z, Fabrication of moth-eye structures on silicon by direct six-beam laser interference lithography. Journal of Applied Physics, 2014, 115(20): 203101

[49]

Burrow G M, Gaylord T K. Multi-beam interference advances and applications: Nano-electronics, photonic crystals, metamaterials, subwavelength structures, optical trapping, and biomedical structures. Micromachines, 2011, 2(4): 221–257

[50]

Lasagni A, Yuan D, Das S. Rapid fabrication of pentaerythritol triacrylate periodic structures on large areas by laser interference patterning with nanosecond pulses. Journal of Applied Physics, 2009, 105(2): 023101

[51]

Mao W, Liang G, Zou H, Design and fabrication of two-dimensional holographic photonic quasi crystals with high-order symmetries. JOSA B, 2006, 23(10): 2046–2050

[52]

Jiménez-Ceniceros A, Trejo-Durán M, Alvarado-Méndez E, Extinction zones and scalability in N-beam interference lattices. Optics Communications, 2010, 283(3): 362–367

[53]

Abid M I, Wang L, Zhang X, Silver nano islands enhanced Raman scattering on large area grating substrates fabricated by two beam laser interference. Chemical Research in Chinese Universities, 2013, 29(5): 1006–1010

[54]

Stavenga D G, Leertouwer H L, Osorio D C, High refractive index of melanin in shiny occipital feathers of a bird of paradise. Light, Science & Applications, 2015, 4(1): e243

[55]

Shi X B, Qian M, Zhou D Y, Origin of light manipulation in nano-honeycomb structured organic light-emitting diodes. Journal of Materials Chemistry. C, Materials for Optical and Electronic Devices, 2015, 3(8): 1666–1671

[56]

Bi Y G, Feng J, Li Y F, Broadband light extraction from white organic light-emitting devices by employing corrugated metallic electrodes with dual periodicity. Advanced Materials, 2013, 25(48): 6969–6974

[57]

Feng J, Liu Y F, Bi Y G, Light manipulation in organic light-emitting devices by integrating micro/nano patterns. Laser & Photonics Reviews, 2017, 11(2): 1600145

[58]

Ou Q D, Zhou L, Li Y Q, Simultaneously enhancing color spatial uniformity and operational stability with deterministic quasi-periodic nanocone arrays for tandem organic light-emitting diodes. Advanced Optical Materials, 2015, 3(1): 87–94

[59]

Qiao W, Huang W, Liu Y, Toward scalable flexible nanomanufacturing for photonic structures and devices. Advanced Materials, 2016, 28(47): 10353–10380

[60]

Choy W C H, Chan W K, Yuan Y. Recent advances in transition metal complexes and light-management engineering in organic optoelectronic devices. Advanced Materials, 2014, 26(31): 5368–5399

[61]

Bi Y G, Feng J, Chen Y, Dual-periodic-corrugation-induced broadband light absorption enhancement in organic solar cells. Organic Electronics, 2015, 27: 167–172

[62]

Bi Y, Ji J, Chen Y, Dual-periodic-microstructure-induced color tunable white organic light-emitting devices. Frontiers of Optoelectronics, 2016, 9(2): 283–289

[63]

Matioli E, Brinkley S, Kelchner K M, High-brightness polarized light-emitting diodes. Light, Science & Applications, 2012, 1(8): e22

[64]

Xu W, Okamoto T, Li A, Preparation of large-area controllable patterned silver nanocrystals for high sensitive and stable surface-enhanced Raman spectroscopy. Chemical Research in Chinese Universities, 2016, 32(3): 428–432

[65]

Zhang J, Wang Z, Di X, Effects of azimuthal angles on laser interference lithography. Applied Optics, 2014, 53(27): 6294– 6301

[66]

Kravchenko A, Shevchenko A, Ovchinnikov V, Optical interference lithography using azobenzene-functionalized polymers for micro- and nanopatterning of silicon. Advanced Materials, 2011, 23(36): 4174–4177

[67]

Bagheri S, Giessen H, Neubrech F. Large-area antenna-assisted SEIRA substrates by laser interference lithography. Advanced Optical Materials, 2014, 2(11): 1050–1056

[68]

Moein T, Ji D, Zeng X, Holographic photopolymer linear variable filter with enhanced blue reflection. ACS Applied Materials & Interface, 2014, 6(5): 3081–3087

[69]

Gu F, Xie F, Lin X, Single whispering-gallery mode lasing in polymer bottle microresonators via spatial pump engineering. Light, Science & Applications, 2017, 6(10): e17061

AI Summary AI Mindmap
PDF (866KB)

4084

Accesses

0

Citation

Detail

Sections
Recommended

AI思维导图

/