Fabrication of Si-based three-dimensional microbatteries: A review

Abstract

High-performance, Si-based three-dimensional (3D) microbattery systems for powering micro/nano-electromechanical systems and lab-on-chip smart electronic devices have attracted increasing research attention. These systems are characterized by compatible fabrication and integratibility resulting from the silicon-based technologies used in their production. The use of support substrates, electrodes or current collectors, electrolytes, and even batteries used in 3D layouts has become increasingly important in fabricating microbatteries with high energy, high power density, and wide-ranging applications. In this review, Si-based 3D microbatteries and related fabrication technologies, especially the production of micro-lithium ion batteries, are reviewed and discussed in detail in order to provide guidance for the design and fabrication.

Graphical abstract

Keywords

three-dimensional (3D) / wafer-scale / Si-based anode / micro-LIBs / thin-film deposition

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Acknowledgements

This work was financially supported by the National Basic Research Program of China (Grant No. 2015CB932301), the National Natural Science Foundation of China (Grant Nos. 61675173 and 61505172), the Natural Science Foundation of Fujian Province of China (Grant No. 2017H6022), and by the Science and Technology Program of Xiamen City of China (Grant Nos. 3502Z20161223 and 3502Z20144079).

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