Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probe error separation

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Front. Mech. Eng. ›› 2017, Vol. 12 ›› Issue (2) : 143-157. DOI: 10.1007/s11465-017-0432-3
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Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probe error separation

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