Recent advancements in optical microstructure fabrication through glass molding process

Tianfeng ZHOU, Xiaohua LIU, Zhiqiang LIANG, Yang LIU, Jiaqing XIE, Xibin WANG

PDF(1333 KB)
PDF(1333 KB)
Front. Mech. Eng. ›› 2017, Vol. 12 ›› Issue (1) : 46-65. DOI: 10.1007/s11465-017-0425-2
REVIEW ARTICLE
REVIEW ARTICLE

Recent advancements in optical microstructure fabrication through glass molding process

Author information +
History +

Abstract

Optical microstructures are increasingly applied in several fields, such as optical systems, precision measurement, and microfluid chips. Microstructures include microgrooves, microprisms, and microlenses. This paper presents an overview of optical microstructure fabrication through glass molding and highlights the applications of optical microstructures in mold fabrication and glass molding. The glass-mold interface friction and adhesion are also discussed. Moreover, the latest advancements in glass molding technologies are detailed, including new mold materials and their fabrication methods, viscoelastic constitutive modeling of glass, and microstructure molding process, as well as ultrasonic vibration-assisted molding technology.

Keywords

optical microstructure / microgroove / microlens / glass molding process / single-point diamond cutting

Cite this article

Download citation ▾
Tianfeng ZHOU, Xiaohua LIU, Zhiqiang LIANG, Yang LIU, Jiaqing XIE, Xibin WANG. Recent advancements in optical microstructure fabrication through glass molding process. Front. Mech. Eng., 2017, 12(1): 46‒65 https://doi.org/10.1007/s11465-017-0425-2

References

[1]
Zhou T, Yan J, Masuda J, Investigation on the viscoelasticity of optical glass in ultraprecision lens molding process. Journal of Materials Processing Technology, 2009, 209(9): 4484–4489
CrossRef Google scholar
[2]
Madanipour K, Tavassoly M T. Moiré fringes as two-dimensional autocorrelation of transmission function of linear gratings and its application for modulation transfer function measurement. Optics and Lasers in Engineering, 2010, 48(1): 43–47
CrossRef Google scholar
[3]
Morgan C J, Vallance R R, Marsh E R. Micro machining glass with polycrystalline diamond tools shaped by micro electro discharge machining. Journal of Micromechanics and Microengineering, 2004, 14(12): 1687–1692
CrossRef Google scholar
[4]
Fang F, Chen L. Ultra-precision cutting for ZKN7 glass. CIRP Annals—Manufacturing Technology, 2000, 49(1): 17–20
CrossRef Google scholar
[5]
Nicholas D J, Boon J E. The generation of high precision aspherical surfaces in glass by CNC machining. Journal of Physics D: Applied Physics, 1981, 14(4): 593–600
CrossRef Google scholar
[6]
Ono T, Matsumura T. Influence of tool inclination on brittle fracture in glass cutting with ball end mills. Journal of Materials Processing Technology, 2008, 202(1–3): 61–69
CrossRef Google scholar
[7]
Bouzid S, Bouaouadja N. Effect of impact angle on glass surfaces eroded by sand blasting. Journal of the European Ceramic Society, 2000, 20(4): 481–488
CrossRef Google scholar
[8]
Chen S, Kwok H S. Light extraction from organic light-emitting diodes for lighting applications by sand-blasting substrates. Optics Express, 2010, 18(1): 37–42
CrossRef Google scholar
[9]
Chen M, Shen M, Zhu S, Effect of sand blasting and glass matrix composite coating on oxidation resistance of a nickel-based superalloy at 1000 °C. Corrosion Science, 2013, 73: 331–341
CrossRef Google scholar
[10]
Revzin A, Russell R J, Yadavalli V K, Fabrication of poly (ethylene glycol) hydrogel microstructures using photolithography. Langmuir, 2001, 17(18): 5440–5447
CrossRef Google scholar
[11]
Ehrfeld W, Lehr H. Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics. Radiation Physics and Chemistry, 1995, 45(3): 349–365
CrossRef Google scholar
[12]
Totsu K, Fujishiro K, Tanaka S, Fabrication of three-dimensional microstructure using maskless gray-scale lithography. Sensors and Actuators A: Physical, 2006, 130–131: 387–392
CrossRef Google scholar
[13]
Bassous E. Fabrication of novel three-dimensional microstructures by the anisotropic etching of (100) and (110) silicon. IEEE Transactions on Electron Devices, 1978, 25(10): 1178–1185
CrossRef Google scholar
[14]
Jee S E, Lee P S, Yoon B J, Fabrication of microstructures by wet etching of anodic aluminum oxide substrates. Chemistry of Materials, 2005, 17(16): 4049–4052
CrossRef Google scholar
[15]
Murakami K, Wakabayashi Y, Minami K, Cryogenic dry etching for high aspect ratio microstructures. In: Proceedings of An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems, Micro Electro Mechanical Systems. IEEE, 1993
CrossRef Google scholar
[16]
Sökmen Ü, Stranz A, Fündling S, Capabilities of ICP-RIE cryogenic dry etching of silicon: Review of exemplary microstructures. Journal of Micromechanics and Microengineering, 2009, 19(10): 105005
CrossRef Google scholar
[17]
Reyntjens S, Puers R. A review of focused ion beam applications in microsystem technology. Journal of Micromechanics and Microengineering, 2001, 11(4): 287–300
CrossRef Google scholar
[18]
Wirth R. Focused ion beam (FIB) combined with SEM and TEM: Advanced analytical tools for studies of chemical composition, microstructure and crystal structure in geomaterials on a nanometre scale. Chemical Geology, 2009, 261(3–4): 217–229
CrossRef Google scholar
[19]
Chao C, Shen S, Wu J. Fabrication of 3-D submicron glass structures by FIB. Journal of Materials Engineering and Performance, 2009, 18(7): 878–885
CrossRef Google scholar
[20]
Mailis S, Zergioti I, Koundourakis G, Etching and printing of diffractive optical microstructures by a femtosecond excimer laser. Applied Optics, 1999, 38(11): 2301–2308
CrossRef Google scholar
[21]
Cao G, Konishi H, Li X. Mechanical properties and microstructure of SiC-reinforced Mg-(2,4)Al-1Si nanocomposites fabricated by ultrasonic cavitation based solidification processing. Materials Science and Engineering: A, 2008, 486(1–2): 357–362
CrossRef Google scholar
[22]
Däschner W, Long P, Stein R, Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass. Applied Optics, 1997, 36(20): 4675–4680
CrossRef Google scholar
[23]
Pang Y K, Lee J C W, Lee H F, Chiral microstructures (spirals) fabrication by holographic lithography. Optics Express, 2005, 13(19): 7615–7620
CrossRef Google scholar
[24]
LinC H, Lee G B, Chang B W, A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist. Journal of Micromechanics and Microengineering, 2002, 12(5): 590–597
CrossRef Google scholar
[25]
Zhang C, Rentsch R, Brinksmeier E. Advances in micro ultrasonic assisted lapping of microstructures in hard-brittle materials: A brief review and outlook. International Journal of Machine Tools and Manufacture, 2005, 45(7–8): 881–890
CrossRef Google scholar
[26]
Gottmann J, Hermans M, Ortmann J. Microcutting and hollow 3D microstructures in glasses by in-volume selective laser-induced etching (ISLE). Journal of Laser Micro/Nanoengineering, 2013, 8(1): 15–18
CrossRef Google scholar
[27]
Piotter V, Bauer W, Benzler T, Injection molding of components for microsystems. Microsystem Technologies, 2001, 7(3): 99–102
CrossRef Google scholar
[28]
Liou A C, Chen R H. Injection molding of polymer micro-and sub-micron structures with high-aspect ratios. The International Journal of Advanced Manufacturing Technology, 2006, 28(11): 1097–1103
CrossRef Google scholar
[29]
Lee H, Hong S, Yang K, Fabrication of nano-sized resist patterns on flexible plastic film using thermal curing nano-imprint lithography. Microelectronic Engineering, 2006, 83(2): 323–327
CrossRef Google scholar
[30]
Zhou T, Yan J, Yoshihara N, Study on nonisothermal glass molding press for aspherical lens. Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2010, 4(5): 806–815
CrossRef Google scholar
[31]
Katsuki Masahide. Transferability of glass lens molding. Proceedings of SPIE, 2nd international Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 2006, 61490M
CrossRef Google scholar
[32]
Aono Y, Negishi M, Takano J. Development of large-aperture aspherical lens with glass molding. Proceedings of SPIE, Advanced Optical Manufacturing and Testing Technology, 2000, 4231: 16–23
CrossRef Google scholar
[33]
Zhou T, Yan J, Yoshihara N, Shape compensation of the molding dies in glass molding press for aspherical lens. In: Proceed-ings of the 9th international conference on frontiers of design and manufacturing. 2010
[34]
Zhou T, Yan J, Kuriyagawa T. High-efficiency and ultra-precision glass molding of aspherical lens and microstructures. In: Proceedings of International Symposium on Ultraprecision Engineering and Nanotechnology. 2011
[35]
Zhou T, Yan J, Masuda J, Investigation on shape transferability in ultraprecision glass molding press for microgrooves. Precision Engineering, 2011, 35(2): 214–220
CrossRef Google scholar
[36]
Zhou T, Ji W, Kuriyagawa T. Comparing microgroove array forming with micropyramid array forming in the glass molding press. Key Engineering Materials, 2010, 447–448: 361–365
CrossRef Google scholar
[37]
Pan C, Wu T, Chen M, Hot embossing of micro-lens array on bulk metallic glass. Sensors and Actuators A: Physical, 2008, 141(2): 422–431
CrossRef Google scholar
[38]
Yan J, Zhou T, Masuda J, Modeling high-temperature glass molding process by coupling heat transfer and viscous deformation analysis. Precision Engineering, 2009, 33(2): 150–159
CrossRef Google scholar
[39]
Yan J, Oowada T, Zhou T, Precision machining of microstructures on electroless-plated NiP surface for molding glass components. Journal of Materials Processing Technology, 2009, 209(10): 4802–4808
CrossRef Google scholar
[40]
Barbacki A, Kawalec M, Hamrol A. Turning and grinding as a source of microstructural changes in the surface layer of hardened steel. Journal of Materials Processing Technology, 2003, 133(1–2): 21–25
CrossRef Google scholar
[41]
Cao D M, Jiang J, Meng W, Fabrication of high-aspect-ratio microscale Ta mold inserts with micro electrical discharge machining. Microsystem technologies, 2007, 13(5): 503–510
[42]
Bojorquez B, Marloth R T, Es-Said O S. Formation of a crater in the workpiece on an electrical discharge machine. Engineering Failure Analysis, 2002, 9(1): 93–97
CrossRef Google scholar
[43]
Guu Y H, Hocheng H, Tai N H, Effect of electrical discharge machining on the characteristics of carbon fiber reinforced carbon composites. Journal of Materials Science, 2001, 36(8): 2037–2043
CrossRef Google scholar
[44]
Huang M, Chiang Y, Lin S, Fabrication of microfluidic chip using micro-hot embossing with micro electrical discharge machining mold. Polymers for Advanced Technologies, 2012, 23(1): 57–64
CrossRef Google scholar
[45]
Reynaerts D, Meeusen W, Van Brussel H. Machining of three-dimensional microstructures in silicon by electro-discharge machining. Sensors and Actuators A: Physical, 1998, 67(1–3): 159–165
CrossRef Google scholar
[46]
Yan J, Horikoshi A, Kuriyagawa T, Manufacturing structured surface by combining microindentation and ultraprecision cutting. CIRP Journal of Manufacturing Science and Technology, 2012, 5(1): 41–47
CrossRef Google scholar
[47]
Takahashi M, Sugimoto K, Maeda R. Nanoimprint of glass materials with glassy carbon molds fabricated by focused-ion-beam etching. Japanese Journal of Applied Physics, 2005, 44(7B): 5600
CrossRef Google scholar
[48]
Marty F, Rousseau L, Saadany B, Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro-and nanostructures. Microelectronics Journal, 2005, 36(7): 673–677
CrossRef Google scholar
[49]
Tanaka S, Rajanna K, Abe T, Deep reactive ion etching of silicon carbide. Journal of Vacuum Science & Technology B, 2001, 19(6): 2173–2176
CrossRef Google scholar
[50]
Youn S W, Takahashi M, Goto H, Microstructuring of glassy carbon mold for glass embossing—Comparison of focused ion beam, nano/femtosecond-pulsed laser and mechanical machining. Microelectronic Engineering, 2006, 83(11–12): 2482–2492
CrossRef Google scholar
[51]
Wurtz M Ad. On the hydruret of copper. Philosophical Magazine Series 3, 1844, 25(164): 154–156
CrossRef Google scholar
[52]
Brenner A, Riddell G E. Nickel plating on steel by chemical reduction. Journal of Research of the National Bureau of Standards, 1946, 37(1): 31–34
CrossRef Google scholar
[53]
Brenner A, Riddell G E. Deposition of nickel and cobalt by chemical reduction. Journal of Research of the National Bureau of Standards, 1947, 39(5): 385–395
CrossRef Google scholar
[54]
Krishnan K H, John S, Srinivasan K N, An overall aspect of electroless Ni-P depositions—A review article. Metallurgical and Materials Transactions A, 2006, 37(6): 1917–1926
CrossRef Google scholar
[55]
Strafford K N, Datta P K, O’donnell A K. Electroless nickel coatings: Their application, evaluation & production techniques. Materials & Design, 1982, 3(6): 608–614
CrossRef Google scholar
[56]
Nakasuji T, Kodera S, Hara S, Diamond turning of brittle materials for optical components. CIRP Annals—Manufacturing Technology, 1990, 39(1): 89–92
CrossRef Google scholar
[57]
Casstevens J M, Daugherty C E. Diamond turning optical surfaces on electroless nickel. Proceedings of SPIE, Precision Machining of Optics, 1978, 159: 109
[58]
Zhou T, Yan J, Liang Z, Development of polycrystalline Ni-P mold by heat treatment for glass microgroove forming. Precision Engineering, 2015, 39: 25–30
CrossRef Google scholar
[59]
Liu Y, Zhao W, Zhou T, Microgroove machining on crystalline nickel phosphide plating by single-point diamond cutting. International Journal of Advanced Manufacturing Technology (in press)
[60]
Guo Z, Keong K G, Sha W. Crystallisation and phase transformation behaviour of electroless nickel phosphorus platings during continuous heating. Journal of Alloys and Compounds, 2003, 358(1–2): 112–119
CrossRef Google scholar
[61]
Chern G L. Experimental observation and analysis of burr formation mechanisms in face milling of aluminum alloys. International Journal of Machine Tools and Manufacture, 2006, 46(12–13): 1517–1525
CrossRef Google scholar
[62]
Dornfeld D A, Kim J S, Dechow H, Drilling burr formation in titanium alloy, Ti-6AI-4V. CIRP Annals—Manufacturing Technology, 1999, 48(1): 73–76
CrossRef Google scholar
[63]
Guo Y B, Dornfeld D A. Finite element modeling of burr formation process in drilling 304 stainless steel. Journal of Manufacturing Science and Engineering, 2000, 122(4): 612–619
CrossRef Google scholar
[64]
Jain A, Yi A Y. Numerical modeling of viscoelastic stress relaxation during glass lens forming process. Journal of the American Ceramic Society, 2005, 88(3): 530–535
CrossRef Google scholar
[65]
Yi A Y, Jain A. Compression molding of aspherical glass lenses—A combined experimental and numerical analysis. Journal of the American Ceramic Society, 2005, 88(3): 579–586
CrossRef Google scholar
[66]
Jain A, Firestone G C, Yi A Y. Viscosity measurement by cylindrical compression for numerical modeling of precision lens molding process. Journal of the American Ceramic Society, 2005, 88(9): 2409–2414
CrossRef Google scholar
[67]
Jung W, Lee H J, Park K. Investigation of localized heating characteristics in selective ultrasonic imprinting. International Journal of Precision Engineering and Manufacturing, 2015, 16(9): 1999–2004
CrossRef Google scholar
[68]
Xie J, Zhou T, Liu Y, The effects of ultrasonic vibration in hot pressing for microgrooves. Materials Science Forum, 2016, 861: 121–126
[69]
Xie J, Zhou T, Liu Y, Mechanism study on microgroove forming by ultrasonic vibration assisted hot pressing. Precision Engineering, 2016, 46: 270–277
CrossRef Google scholar
[70]
Chen J, Chen Y, Li H, Physical and chemical effects of ultrasound vibration on polymer melt in extrusion. Ultrasonics Sonochemistry, 2010, 17(1): 66–71
CrossRef Google scholar
[71]
Masuda J, Yan J, Tashiro T, Microstructural and topographical changes of Ni-P plated moulds in glass lens pressing. International Journal of Surface Science and Engineering, 2009, 3(1–2): 86–102
CrossRef Google scholar
[72]
Masuda J, Yan J, Zhou T, Thermally induced atomic diffusion at the interface between release agent coating and mould substrate in a glass moulding press. Journal of Physics D: Applied Physics, 2011, 44(21): 215302
CrossRef Google scholar
[73]
Schmidt M S, Hübner J, Boisen A. Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy. Advanced Materials, 2012, 24(10): OP11–OP18
[74]
Guo C, Feng L, Zhai J, Large-area fabrication of a nanostructure-induced hydrophobic surface from a hydrophilic polymer. ChemPhysChem, 2004, 5(5): 750–753
CrossRef Google scholar
[75]
Gao W, Araki T, Kiyono S, Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder. Precision Engineering, 2003, 27(3): 289–298
CrossRef Google scholar
[76]
Khorasaninejad M, Chen W T, Devlin R C, Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging. Science, 2016, 352(6290): 1190–1194
CrossRef Google scholar
[77]
Dunkel J, Wippermann F, Reimann A, Fabrication of microoptical freeform arrays on wafer level for imaging applications. Optics Express, 2015, 23(25): 31915–31925
CrossRef Google scholar
[78]
Brückner A, Leitel R, Oberdörster A, Multi-aperture optics for wafer-level cameras. Journal of Micro/Nanolithography, MEMS, and MOEMS, 2011, 10(4): 043010
CrossRef Google scholar
[79]
Li L, Yi A Y. Design and fabrication of a freeform prism array for 3D microscopy. Journal of the Optical Society of America A, 2010, 27(12): 2613–2620
CrossRef Google scholar
[80]
Wippermann F C, Radtke D, Zeitner U, Fabrication technologies for chirped refractive microlens arrays. Proceedings of SPIE, Current Developments in Lens Design and Optical Engineering VII, 2006, 6288: 62880O
CrossRef Google scholar
[81]
Li L, Yi A Y. Design and fabrication of a freeform microlens array for a compact large-field-of-view compound-eye camera. Applied Optics, 2012, 51(12): 1843–1852
CrossRef Google scholar
[82]
Li L, Yi A Y. Design and fabrication of a freeform microlens array for uniform beam shaping. Microsystem Technologies, 2011, 17(12): 1713–1720
CrossRef Google scholar
[83]
Duparré J, Wippermann F, Dannberg P, Chirped arrays of refractive ellipsoidal microlenses for aberration correction under oblique incidence. Optics Express, 2005, 13(26): 10539–10551
CrossRef Google scholar
[84]
Scheiding S, Yi A Y, Gebhardt A, Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo. Optics Express, 2011, 19(24): 23938–23951
CrossRef Google scholar
[85]
Cheng D, Wang Y, Hua H, Design of an optical see-through head-mounted display with a low f-number and large field of view using a freeform prism. Applied Optics, 2009, 48(14): 2655–2668
CrossRef Google scholar
[86]
Asobe M. Nonlinear optical properties of chalcogenide glass fibers and their application to all-optical switching. Optical Fiber Technology, 1997, 3(2): 142–148
CrossRef Google scholar
[87]
Sanghera J S, Aggarwal I D. Active and passive chalcogenide glass optical fibers for IR applications: A review. Journal of Non-Crystalline Solids, 1999, 256–257: 6–16
CrossRef Google scholar
[88]
Zhang X, Guimond Y, Bellec Y. Production of complex chalcogenide glass optics by molding for thermal imaging. Journal of Non-Crystalline Solids, 2003, 326–327: 519–523
CrossRef Google scholar
[89]
Aitken B G, Currie S C, Monahan B C, US Patent 7330634.<Date>2008-02-12</Date>
[90]
Liao M, Chaudhari C, Qin G, Fabrication and characterization of a chalcogenide-tellurite composite microstructure fiber with high nonlinearity. Optics Express, 2009, 17(24): 21608–21614
CrossRef Google scholar
[91]
Brilland L, Smektala F, Renversez G, Fabrication of complex structures of holey fibers in chalcogenide glass. Optics Express, 2006, 14(3): 1280–1285
CrossRef Google scholar

Acknowledgments

This work was supported by the National Basic Research Program of China (Grant No. 2015CB059900) and the National Natural Science Foundation of China (Grant No. 51375050).Open AccessƒThis article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

Open Access

ƒThis article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

RIGHTS & PERMISSIONS

2017 The Author(s) 2017. This article is published with open access at link.springer.com and journal.hep.com.cn
AI Summary AI Mindmap
PDF(1333 KB)

Accesses

Citations

Detail

Sections
Recommended

/