Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

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Front. Mech. Eng. ›› 2013, Vol. 8 ›› Issue (2) : 146-149. DOI: 10.1007/s11465-013-0260-z
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Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front Mech Eng, 2013, 8(2): 146‒149 https://doi.org/10.1007/s11465-013-0260-z

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