Linear ultrasonic motor using quadrate plate transducer

Abstract

A linear ultrasonic motor using a quadrate plate transducer was developed for precision positioning. This motor consists of two pairs of Pb(Zr,Ti)O₃ piezoelectric ceramic elements, which are piezoelectrically excited into the second-bending mode of the motor stator’s neutral surface in two orthogonal directions, on which the tops of four projections move along an elliptical trajectory, which in turn drives a contacted slider into linear motion via frictional forces. The coincident frequency of the stator is easily obtained for its coincident characteristic dimension in two orthogonal directions. The performance characteristics achieved by the motor are: 1) a maximum linear speed of more than 60 mm/s; 2) a stroke of more than150 mm; 3) a driving force of more than 5.0 N; and 4) a response time of about 2 ms.

Keywords

ultrasonic motor,quadrate plate,coincident frequency,alternant contact

References

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RIGHTS & PERMISSIONS

Higher Education Press and Springer-Verlag Berlin Heidelberg