Precision control system of two-DOF stage with linear ultrasonic motor

Abstract

Using an appropriate control method, linear ultrasonic motors can be used in applications requiring high position accuracy. In this paper, a closed loop PI control system is designed to achieve high position accuracy during the control of a two-DOF stage driven by linear ultrasonic motors. Two ultrasonic motors are mounted on the stage to generate motion in two orthogonal directions. The PI control algorithm is used to increase the stability and accuracy of position control. The x-axis mover covers 30 mm forward and backward in less than 0.3 s settling time and the y-axis mover in less than 0.4 s. Experimental results denote that the control strategy proposed in this paper appears to have high efficiency, quick response, and high accuracy.

References

1. Zhao Chunsheng . Research on ultrasonic motors in Nanjing University of Aeronauticsand Astronautics. Journal of Vibration,Measurement and Diagnosis, 2005, 25(3): 167–173
2. Chen Zhihua, Zhao Chunsheng . Some key problems in controllingthe ultrasonic motors. Small and SpecialMachines, 2002, 6(9): 23–25
3. Yan Han, Wang Xiankui, Duan Guanghong . Research on the control systems of a precision linearmotor drive device. Frontiers of MechanicalEngineering in China, 2006, 1(3): 260–264. doi:10.1007/s11465-006-0036-9
4. Zhao Chunsheng . Some proposals for development of ultrasonic motor techniques inChina. Micromotors, 2006, 39(2): 64–67
5. Tobias Hemsel, Jőrg Wallaschek . Survey of the present stateof the art of piezoelectric linear motors. Ultrasonics, 2000, 38: 37–40. doi:10.1016/S0041-624X(99)00143-2
6. Ueha S, Tomikava Y, Kurosawa M, Nakamura N . UltrasonicMotors,Theory and Applications. Oxford: Clarendon Press, 1993
7. Valentinas S . Ultrasonicactuators for nanometre positioning. Ultrasonics, 2000, 38: 20–25. doi:10.1016/S0041-624X(99)00086-4
8. Lim C K, He Siyuan, Chen I M, et al.. A piezo-on-slider type linear ultrasonic motorfor the application of positioning stages. In: Proceedings of the 1999 IEEE/ASME, International Conference on AdvancedIntelligent Mechatronics. Atlanta,USA, 1999
9. Zhu Hua, Chen Chao, Zhao Chunsheng . Investigation on a cylindrical ultrasonic micromotor. Frontiers of Mechnical Engineering in China, 2007, 2(4): 394–398. doi:10.1007/s11465-007-0068-9
10. He Honglin, Zhao Chunsheng . Study on the control of therobot driven by ultrasonic motors. Piezoelectricsand Acoustooptics, 2005, 27(6): 694–697
11. Zeng Jinsong, Yao Zhiyuan, Zhao Chunsheng . Realization of measurement and control system for ultrasonicmotor. Transducer and Microsystem Technologies, 2006, 25(7): 64–66
12. He Honglin, Zhu Hua, Zhao Chunsheng . Position control of an ultrasonic motor using Fussy-PItechnique. Mechanical Science and Technology, 2006, 25(5): 603–607
13. Zhao Chunsheng .Ultrasonic Motors Technologies and Application. Beijing: Science Press, 2007
14. Xia Changliang, Wang Mengli, Wang Xiangcun . Study on driving circuit of the ultrasonic motor. In: Proceedings of the IEEE International Conferenceon Mechatronics and Automation. Niagara Falls, Canada, 2005 : 2165–2168
15. Feng Jinzhi, Zheng Songlin, Yu Fan . Bandwidth-limited active suspension controller for anoff-road vehicle based on co-simulation technology. Frontiers of Mechanical Engineering in China, 2008, 3(1): 111–117. doi:10.1007/s11465-008-0020-7