Development and application prospects of piezoelectric precision driving technology

Abstract

With the rapid development of science and technology, microelectronics manufacturing, photonics technology, space technology, ultra-precision machining, micro-robotics, biomedical engineering and other fields urgently need the support of modern precision driving theory and technology. Modern precision driving technology can be generally divided into two parts: electromagnetic and non-electromagnetic driving technology. Electromagnetic driving technology is based on traditional technology, has a low thrust-weight ratio, and needs deceleration devices with a cumbrous system or a complex structure. Moreover, it is difficult to improve positioning accuracy with this technology type. Thus, electromagnetic driving technology is still unable to meet the requirements for the above applications. Non-electromagnetic driving technology is a new choice. As a category of non-electromagnetic driving technology, piezoelectric driving technology becomes an important branch of modern precision driving technology. High holding torque and acute response make it suitable as an accurate positioning actuator. This paper presents the development of piezoelectric precision driving technology at home and abroad and gives an in-depth analysis. Future perspectives on the technology’s applications in the following fields are described: 1) integrated circuit manufacturing technology; 2) fiber optic component manufacturing technology; 3) micro parts manipulation and assembly technology; 4) biomedical engineering; 5) aerospace technology; and 6) ultra-precision processing technology.

References

1. Büchi R Zesch W Codourey A et al.Inertial drives for micro and nanorobots:analyticalstudy. SPIE Conf on Microrobots and micromechanicalsystems.Philadelphia, USA 1995 8997
2. Zhao Chunsheng Ultrasonic motor techniques for 21st centuryEngineering Science 2002 4(2)8691(in Chinese)
3. Chu Xiangcheng Chen Weishan Chen Zaili Development of ultrasonic motor in USA.Piezoelectrics & Acoustooptics. 1999 21(1)3840(in Chinese)
4. Bar-Chen Y Bao X et al.Rotary ultrasonic motorsactuated by traveling flexural wavesSPIE 2000 3668794798
5. Shigematsu T Kurosawa M Asai K Sub-nanometer stepping drive of surface acoustic ultrasonicmotorIEEE Int Conf Nanotechnology, SanFrancisco, CA 2003
6. Sun Y Nelson B J Autonomous injection of biologicalcells using visual servoingInt'1 Symp.On Experimental Robotics (ISER 2000) 2000 175184
7. Higuchi T AutomaticMicro Manipulation System for Cell Manipulation
8. Richter M Linnemann R Woias P Robust design of gas and liquid micro pumpsSensors and Actuators A. 1998 68480486. doi:10.1016/S0924‐4247(98)00053‐3
9. Nguyen N T White R M Design and optimization ofan ultrasonic flexural plate wave micropump using simulationSensors and Actuators 1999 77229236. doi:10.1016/S0924‐4247(99)00216‐2
10. Meng A H Nguyen N T White R M Focused flow micropump using ultrasonic flexural platewavesBiomedical Microdevices2(3) 2000 169174
11. Bar-Cohen Y Chang Z Piezoelectrically actuatedminiature peristaltic pumpProceedings ofthe SPIE Smart Structures Conference, SPIE 2002 3992669676
12. Mao Fengwei Theoretical research on application of ultrasonic motors for celloperatingMaster thesis.Nanjing University of Aeronautics and AstronauticsChina 2005 (inChinese)
13. Kan Junwu Yang Zhigang Cheng Guangming Research on piezoelectric pump and its developmentOptics and Precision Engineering 2002 6(in Chinese)
14. Wu Boda E Shiju Yang Zhigang Qu Xingtian Studyon characteristics of a new actuator used to electrohydraulic servovalvesChina Mechanical Engineering 2004 15(3)189191(in Chinese)
15. Zhao Chunsheng Development and application of ultrasonic motors in China2nd International Workshop on Piezoelectric Materialand Applications in Actuators (IWPMA)University of PaderbornGermany 2005 130138
16. Zhao Chunsheng Research on Ultrasonic Motors in NUAA(Invited Talk)The First International Workshop Motors and ActuatorsYokohama 2005
17. Zhao Chunsheng Some proposals for development of ultrasonic motor techniques inChinaMicromotors Servo Technique 2006 26467(in Chinese)
18. Liu Changgeng Zhou Zhaoying Wang Xiaohao The characteristics of a piezoelectrically actuated microjet (in Chinese)Piezoelectrics & Acoustooptics 2001 23(4)272274
19. Zhao Chunsheng Li Chaodong Jin Long Ultrasonic linear motor and drive vibrator. ChinaPatent: ZL98111286.2. 2003
20. Zhao Chunsheng Liu Jian Ultrasonic linear motorbased on rectangular piezoelectric ceramic plate in-plane vibration.China Patent: ZL01127038.1. 2004
21. Feng Yanying Zhou Zhaoying Ye Xiongying et al.Characterization of the pressure wave in piezoelectricallyactuated micro jet (in Chinese)MicronanoelectronicTechnology 2003 Z1506511
22. Cheng Guangming Wu Boda Zeng Ping Yang Zhigang et alTheoriginal study of the piezoelectric membrane pump with taper valve(in Chinese)Piezoelectrics & Acoustooptics 1998 20(5)300303
23. Li Jun Wu Boda Cheng Guangming et al.The principle of diffuser/nozzle based valvelesspiezoelectric pump (in Chinese)Piezoelectrics &Acoustooptics 2000 22(6)376378
24. Kan Junwu Yang Zhigang et al.Pumping performanceof a new piezoelectric pump for drug deliveryJournal of Biomedical Engineering 2004 21(2)297301(in Chinese)
25. Zhang Jianhui A new type of piezoelectric pumpChinaPatentZL98122356.7
26. Zhang Jianhui A valveless piezoelectric pump with Y-shaped flow tubeChina Patent ZL99110248.7
27. Zhang Jianhui Xia Qixiao Lai Dehui et al.Discovery and analysis on cavitation in piezoelectricpumpsChinese Journal of Mechanical Engineering 2004 17(4)591594
28. Zhang Jianhui Wang Dakang Xia Qixiao et al.The research on the vibration radiation noise ofpiezoelectric pumpPiezoelectrics &Acoustooptics 2005 27(1)3739(in Chinese)
29. Zhang Jianhui Lu Jizhuang Xia Qixiao et al.Influence of piezoelectric vibrator and fluid onclose noise field of pumpOptics and PrecisionEngineering 2006 14(4)628634(in Chinese)
30. Zhang Jianhui Xia Qixiao Hong Zhen et al.Flow direction of piezoelectric pump with nozzle/diffuserelementsChinese Journal of Mechanical Engineering 2004 17(1)107109
31. Zhang Jianhui A reciprocating valveless piezoelectric pump with continuously variablecone angleChina Patent2004100006697.2
32. Wang Yanyuan Science and technology development strategies for Chinese IC industry:from a big consumer country to a major industrial countryThe second academician science and technology forum'sspeechBeijing 2006 (in Chinese)
33. Zhong Jue Duan Ji'an et al.The inspection reportof natural sciences key foundation of China (theory and key technologyfor micron manufacturing of optical device)Changsha 2006
34. Wu Yingfei Zhou Zhaoying Using piezoactuator and flexurehinge mechanism to achieve ultra precision positioningJournal of Mechanical Strength 2002 24(2)157160(in Chinese)
35. Schmoeckel Ferdinand Remotely controllable mobile microrobots acting as nano positionersand intelligent tweezers in scanning electron microscopes (SEMs)IEEE Trans. Robot. Autom18148153
36. Nelson B J Sun Yu Micorobotics and MEMS technologyfor biological cell researchRobotics andMachine Perception2002713
37. Tanikawa T Arai T Development of a micro-manipulationsystem having a two-fingered micro-hand IEEE TransRobot 1999 152162
38. Takashi Maeno Recent Progress of Ultrasonic Motors in JapanThe First International Workshop Motors and ActuatorsYokohama 2005
39. Zhou Zhibin Xiao Shali et al.General situation andapplication of ultraprecise machining techniqueMachinery Manufacturing Engineer 2005 (1)121123(in Chinese)
40. Lee W B To S et al.Ultra-Precision machiningof optical microstructuresNanoteohnologyand Precision Engineering 2003 1(1)5861(in Chinese)