Investigation on a cylindrical ultrasonic micromotor

Abstract

The relationship between the arrangement of ceramics and the force coefficient shows that the maximum excitation efficiency will be obtained when the ceramics are placed at the trough of the first bending mode of the stator. Therefore, a cylindrical ultrasonic micromotor with a novel stator is proposed. The prototype motor is 5 mm in diameter, 30 mm in length and 4.2 g in weight. The micromotor operates with the first bending mode at 53 kHz. Its maximum speed is 350 r/min when the drive voltage is 200 V and the stall torque reaches 2.5 mN · m. As this motor is suitable for miniaturization because of its simple structure, another cylindrical ultrasonic micromotor is developed. Piezoelectric ceramic tube is used as its stator. This micromtor is 2 mm in diameter, 7 mm in length and 0.258 g in weight. Its speed reaches 813 r/min when the drive voltage is 60 V at 75 kHz. The operation mechanism, structure and design method of these two motors are introduced.

Keywords

micromotor, ultrasonic motor, micro electro mechanical system, optimal design, modal analysis