Residual stresses in coating-based systems, part I: Mechanisms and analytical modeling

Abstract

Thin films and multi-layered coatings comprised of different classes of materials are often used for various functional devices. The thermo-mechanical integrity of these systems is becoming a major concern and is strongly related to the residual stresses because of the fabrication processes. In this paper, the sources of the residual stresses in the coating-based systems and the concept of misfit strain  were briefly reviewed. Analytical models were developed to predict the residual stresses in multi-layered film structures or coating-based systems using the force and moment balances. In addition, the residual stress distributions in the func tionally and compositionally graded coatings were also analyzed.