RESEARCH ARTICLE

Impact of film thickness in laser-induced periodic structures on amorphous Si films

  • Liye Xu 1,2,3,4 ,
  • Jiao Geng , 2,4 ,
  • Liping Shi 2,4,5 ,
  • Weicheng Cui , 3,4 ,
  • Min Qiu , 2,4
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  • 1. College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, China
  • 2. Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
  • 3. Key Laboratory of Coastal Environment and Resources of Zhejiang Province (KLaCER), School of Engineering, Westlake University, Hangzhou 310024, China
  • 4. Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China
  • 5. Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
gengjiao@westlake.edu.cn
cuiweicheng@westlake.edu.cn
qiumin@westlake.edu.cn

Received date: 13 Jan 2023

Accepted date: 23 Apr 2023

Published date: 15 Jun 2023

Copyright

2023 The Author(s) 2023

Abstract

We report self-organized periodic nanostructures on amorphous silicon thin films by femtosecond laser-induced oxidation. The dependence of structural periodicity on the thickness of silicon films and the substrate materials is investigated. The results reveal that when silicon film is 200 nm, the period of self-organized nanostructures is close to the laser wavelength and is insensitive to the substrates. In contrast, when the silicon film is 50 nm, the period of nanostructures is much shorter than the laser wavelength, and is dependent on the substrates. Furthermore, we demonstrate that, for the thick silicon films, quasi-cylindrical waves dominate the formation of periodic nanostructures, while for the thin silicon films, the formation originates from slab waveguide modes. Finite-difference time-domain method-based numerical simulations support the experimental discoveries.

Cite this article

Liye Xu , Jiao Geng , Liping Shi , Weicheng Cui , Min Qiu . Impact of film thickness in laser-induced periodic structures on amorphous Si films[J]. Frontiers of Optoelectronics, 2023 , 16(2) : 16 . DOI: 10.1007/s12200-023-00071-6

1
Caldarola, M., Albella, P., Cortés, E., Rahmani, M., Roschuk, T., Grinblat, G., Oulton, R.F., Bragas, A.V., Maier, S.A.: Non-plasmonic nanoantennas for surface enhanced spectroscopies with ultra-low heat conversion. Nat. Commun. 6(1), 7915 (2015)

DOI

2
Yang, Y., Wang, W., Boulesbaa, A., Kravchenko, I.I., Briggs, D.P., Puretzky, A., Geohegan, D., Valentine, J.: Nonlinear fano-resonant dielectric metasurfaces. Nano. Lett. 15(11), 7388–7393 (2015)

DOI

3
Liu, X., Osgood, R.M., Jr., Vlasov, Y.A., Green, W.M.: Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides. Nat. Photonics 4(8), 557–560 (2010)

DOI

4
Yu, N., Capasso, F.: Flat optics with designer metasurfaces. Nat. Mater. 13(2), 139–150 (2014)

DOI

5
Staude, I., Schilling, J.: Metamaterial-inspired silicon nanophotonics. Nat. Photonics 11(5), 274–284 (2017)

DOI

6
Zhang, D., Wu, L.C., Ueki, M., Ito, Y., Sugioka, K.: Femtosecond laser shockwave peening ablation in liquids for hierarchical micro/nanostructuring of brittle silicon and its biological application. Int. J. Extreme Manuf. 2(4), 045001 (2020)

DOI

7
Chambonneau, M., Richter, D., Nolte, S., Grojo, D.: Inscribing diffraction gratings in bulk silicon with nanosecond laser pulses. Opt Lett 43(24), 6069–6072 (2018)

DOI

8
Wang, M., Zhao, K., Wu, J., Li, Y., Yang, Y., Huang, S., Zhao, J., Tweedle, T., Carpenter, D., Zheng, G., Yu, Q., Chen, K.P.: Femtosecond laser fabrication of nanograting-based distributed fiber sensors for extreme environmen tal applications. Int. J. Extreme Manuf. 3(2), 025401 (2021)

DOI

9
Pavlov, I., Tokel, O., Pavlova, S., Kadan, V., Makey, G., Turnali, A., Yavuz, Ö., Ilday, F.Ö.: Femtosecond laser written waveguides deep inside silicon. Opt. Lett. 42(15), 3028–3031 (2017)

DOI

10
Tokel, O., Turnali, A., Makey, G., Elahi, P., Çolakoğlu, T., Ergeçen, E., Yavuz, Ö., Hübner, R., Borra, M.Z., Pavlov, I., Bek, A., Turan, R., Kesim, D.K., Tozburun, S., Ilday, S., Ilday, F.Ö.: In-chip microstructures and photonic devices fabricated by non-linear laser lithography deep inside silicon. Nat. Photonics 11(10), 639–645 (2017)

DOI

11
Sipe, J., Young, J.F., Preston, J., Van Driel, H.: Laser-induced periodic surface structure. I. Theory. Phys. Rev. B Condens. Matter. 27(2), 1141–1154 (1983)

DOI

12
Bonse, J., Gräf, S.: Maxwell meets marangoni—a review of theories on laser-induced periodic surface structures. Laser Photonics Rev. 14(10), 2000215 (2020)

DOI

13
Fauchet, P., Siegman, A.: Surface ripples on silicon and gallium arsenide under picosecond laser illumination. Appl. Phys. Lett. 40(9), 824–826 (1982)

DOI

14
Guosheng, Z., Fauchet, P., Siegman, A.: Growth of spontaneous periodic surface structures on solids during laser illumination. Phys. Rev. B Condens. Matter 26(10), 5366–5381 (1982)

DOI

15
Birnbaum, M.: Semiconductor surface damage produced by ruby lasers. J. Appl. Phys. 36(11), 3688–3689 (1965)

DOI

16
Borowiec, A., Haugen, H.: Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses. Appl. Phys. Lett. 82(25), 4462–4464 (2003)

DOI

17
Bonse, J., Baudach, S., Krüger, J., Kautek, W., Lenzner, M.: Femtosecond laser ablation of silicon–modification thresholds and morphology. Appl. Phys. A Mater. Sci. Process. 74(1), 19–25 (2002)

DOI

18
Shimotsuma, Y., Kazansky, P.G., Qiu, J., Hirao, K.: Self-organized nanogratings in glass irradiated by ultrashort light pulses. Phys. Rev. Lett. 91(24), 247405 (2003)

DOI

19
Derrien, T.Y., Torres, R., Sarnet, T., Sentis, M., Itina, T.E.: Formation of femtosecond laser induced surface structures on silicon: insights from numerical modeling and single pulse experiments. Appl. Surf. Sci. 258(23), 9487–9490 (2012)

DOI

20
Golosov, E., Ionin, A., Kolobov, Y.R., Kudryashov, S., Ligachev, A., Makarov, S., Novoselov, Y.N., Seleznev, L., Sinitsyn, D.: Formation of periodic nanostructures on aluminum surface by femtosecond laser pulses. Nanotechnol. Russ. 6(3), 237–243 (2011)

DOI

21
Huang, J., Liu, Y., Jin, S., Wang, Z., Qi, Y., Zhang, J., Wang, K., Qiu, R.: Uniformity control of laser-induced periodic surface structures. Front. Phys. (Lausanne) 10, 932284 (2022)

DOI

22
Gnilitskyi, I., Derrien, T.J.Y., Levy, Y., Bulgakova, N.M., Mocek, T., Orazi, L.: High-speed manufacturing of highly regular femto-second laser-induced periodic surface structures: physical origin of regularity. Sci. Rep. 7(1), 8485 (2017)

DOI

23
Levy, Y., Derrien, T.J.Y., Bulgakova, N.M., Gurevich, E.L., Mocek, T.: Relaxation dynamics of femtosecond-laser-induced temperature modulation on the surfaces of metals and semiconductors. Appl. Surf. Sci. 374, 157–164 (2016)

DOI

24
Ruiz de la Cruz, A., Lahoz, R., Siegel, J., de la Fuente, G.F., Solis, J.: High speed inscription of uniform, large-area laser-induced periodic surface structures in Cr films using a high repetition rate fs laser. Opt. Lett. 39(8), 2491–2494 (2014)

DOI

25
Dostovalov, A.V., Derrien, T.J.Y., Lizunov, S.A., Přeučil, F., Okotrub, K.A., Mocek, T., Korolkov, V.P., Babin, S.A., Bulgakova, N.M.: LIPSS on thin metallic films: new insights from multiplicity of laser-excited electromagnetic modes and efficiency of metal oxidation. Appl. Surf. Sci. 491, 650–658 (2019)

DOI

26
Yang, H.D., Li, X.H., Li, G.Q., Wen, C., Qiu, R., Huang, W.H., Wang, J.B.: Formation of colorized silicon by femtosecond laser pulses indifferent background gases. Appl. Phys. A Mater. Sci. Process. 104(2), 749–753 (2011)

DOI

27
Zhang, Y., Jiang, Q., Cao, K., Chen, T., Cheng, K., Zhang, S., Feng, D., Jia, T., Sun, Z., Qiu, J.: Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser. Photon. Res. 9(5), 839–847 (2021)

DOI

28
Gnilitskyi, I., Gruzdev, V., Bulgakova, N.M., Mocek, T., Orazi, L.: Mechanisms of high-regularity periodic structuring of silicon surface by sub-mhz repetition rate ultrashort laser pulses. Appl. Phys. Lett. 109(14), 143101 (2016)

DOI

29
Wang, L., Chen, Q.D., Cao, X.W., Buividas, R., Wang, X., Juodkazis, S., Sun, H.B.: Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing. Light Sci. Appl. 6(12), e17112 (2017)

DOI

30
Jiang, L., Wang, A.D., Li, B., Cui, T.H., Lu, Y.F.: Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application. Light Sci. Appl. 7(2), 17134 (2017)

DOI

31
Öktem, B., Pavlov, I., Ilday, S., Kalaycıoğlu, H., Rybak, A., Yavas, S., Erdoğan, M., Ilday, F.O.: Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses. Nat. Photonics 7(11), 897–901 (2013)

DOI

32
Geng, J., Shi, L., Sun, X., Yan, W., Qiu, M.: Artificial seeds-regulated femtosecond laser plasmonic nanopatterning. Laser Photonics Rev. 16(11), 2200232 (2022)

DOI

33
Geng, J., Yan, W., Shi, L., Qiu, M.: Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds. Light Sci. Appl. 11(1), 189 (2022)

DOI

34
Dostovalov, A.V., Korolkov, V.P., Okotrub, K.A., Bronnikov, K.A., Babin, S.A.: Oxide composition and period variation of thermochemical LIPSS on chromium films with different thickness. Opt. Express 26(6), 7712–7723 (2018)

DOI

35
Dostovalov, A., Bronnikov, K., Korolkov, V., Babin, S., Mitsai, E., Mironenko, A., Tutov, M., Zhang, D., Sugioka, K., Maksimovic, J., Katkus, T., Juodkazis, S., Zhizhchenko, A., Kuchmizhak, A.: Hierarchical anti-reflective laser-induced periodic surface structures (LIPSSs) on amorphous Si films for sensing applications. Nanoscale 12(25), 13431–13441 (2020)

DOI

36
Geng, J., Fang, X., Zhang, L., Yao, G., Xu, L., Liu, F., Tang, W., Shi, L., Qiu, M.: Controllable generation of large-scale highly regular gratings on Si films. Light Adv. Manuf 2(3), 274–282 (2021)

DOI

37
Geng, J., Yan, W., Shi, L., Qiu, M.: Quasicylindrical waves for ordered nanostructuring. Nano Lett. 22(23), 9658–9663 (2022)

DOI

38
van Beijnum, F., Rétif, C., Smiet, C.B., Liu, H., Lalanne, P., van Exter, M.P.: Quasi-cylindrical wave contribution in experiments on extraordinary optical transmission. Nature 492(7429), 411–414 (2012)

DOI

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