Introduction
Laser-assisted growth of one-dimensional material: carbon nanotubes
Existing methods and challenges in growth and integration of carbon nanotubes
Laser-assisted growth of carbon nanotubes
Laser assisted chemical vapor deposition growth of carbon nanotubes
Numerical simulation of optical near-field effects
Fig.7 Numerical simulation results of electrical field distribution in the Ru tip structure under the laser irradiation with (a) vertical and (b) horizontal E field polarizations; and the simulation results of heat distribution under the laser beam with (c) vertical (d) horizontal E field polarizations [57] |
Parallel integration of carbon nanotubes using optical near-field effects
Fig.10 (a) SEM micrograph of the electrode pattern containing two pairs of tip-shaped electrodes; (b) SEM micrograph of the zoomed-in region of the electrode tips; (c) and (d) zoomed-in SEM micrographs showing the SWNT-integrated bridge structures in a side view and top view, respectively. The arrows in (c) and (d) indicate the location of the SWNT bridge [57] |
Laser-assisted growth of two-dimensional material: graphene
Existing methods and challenges in fabricating graphene patterns
Laser direct writing of graphene patterns on dielectric substrates
Experimental setup
Characterization of graphene patterns
Fig.16 Characterization of the as-fabricated graphene patterns on glass substrates. Optical micrographs of (a) “Graphene” text pattern; (b) a graphene spiral pattern; (c) arrays of graphene lines; (d) NAND circuit pattern; (e) SEM micrograph of graphene line; (f) typical Raman spectrum of the graphene patterns; (g) TEM micrograph of the graphene transferred on a Cu grid; (h) optical transmittance spectrum of the graphene film on a glass substrate fabricated by the LDW method [83] |
Fig.17 Electrical characterization of graphene devices fabricated by the LDW method. (a) Optical micrograph of a four-terminal device for sheet resistance measurements; (b) I-V curve of the four-terminal electrical device with eight graphene straight line channels as shown in (a), the inset show an optical micrograph of one graphene channel between two Au contacts; (c) optical micrograph of electrical device with Greek-cross graphene pattern for Hall measurements. The insets in (a) and (c) show the zoomed-out optical micrographs of the parallel line and cross-bar graphene devices, respectively [83] |
Large-scale fabrication of graphene patterns on glass substrates
Laser direct writing of three-dimensional micro/nano-structures
Additive 3D micro/nanofabrication using two-photon polymerization
Fig.22 SEM images of micro-lens arrays and optical cavity structures fabricated by additive TPP micro/nanofabrication. (a) Vertically-aligned aspheric lens array; (b) horizontally-aligned aspheric lens array; (c) vertically-aligned bi-convex lens array; (d) horizontally-aligned bi-convex lens array; (e) disk-shaped optical cavity for dye laser application; (f) spherical micro-lens array |
Subtractive 3D micro/nanofabrication using multi-photon ablation
Fig.24 Micro/nanostructures fabricated by the subtractive MPA process in cured IP-L polymer films. (a) SEM micrograph of nano holes, the inset is a magnified image of a hole with a sharp edge and a pore diameter of 180 nm; (b) optical image of five micro-sized interconnected hollow rings resembling Olympic rings embedded in a cured IP-L polymer film created by MPA [119] |
Comprehensive micro/nanofabrication
Fig.27 2D meshed micro-fluidic channels inside IPL polymer fabricated by the “TPP+MPA” method. (a) Optical micrograph of a typical micro-fluidic channel inside a polymer cube; (b) SEM cross-section image of the micro-fluidic channel; (c) optical micrograph of the fabricated meshed micro-fluidic channels; (d) and (e) demonstrate the liquid flow inside the meshed channels at T = 0 and T = 10 s, respectively. The dash line shows the pathway of liquid flow through the meshed micro-fluidic channels [26] |
Fig.28 3D spiral micro-fluidic channels inside a IPL polymer cube fabricated by the “TPP+MPA” method. (a) Schematic of the 3D spiral micro-fluidic channel; (b), (c), and (d) show the X-Y cross-sectional view of a spiral channel under a transmission-mode optical microscope at different focal planes (scale bar: 10 µm). The coil diameter of the spiral channel is 20 µm; (e) array of spiral micro-fluidic channels fabricated inside a polymer cube with a coil diameter of 5 µm and an inter-channel spacing of 3 µm [26] |