In recent years, the size of many optical components has reduced and demands of surface figure accuracy of micro-sized glass lenses have increased considerably. These trends have prompted research in the finishing of small-size and high precision parts. Various field–assisted polishing processes have been developed. Among them, magneto-rheological polishing [
1–
3], magnetic fluid polishing [
4] and magnetic abrasive polishing [
5–
7] are noticeable for the ultra-precision finishing of parts at macro and meso scales. However, these processes are not suitable for the production of micro-aspheric shapes due to difficulties in concentrating abrasive particles to tiny regions of small optics.