Frontiers of Optoelectronics >
Laser self-mixing interferometer for MEMS dynamic measurement
Received date: 04 Feb 2013
Accepted date: 18 Mar 2013
Published date: 05 Jun 2013
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Laser self-mixing interferometer has the advantages of simple architecture, compact size, naturally self-aligned optical characteristics, and low cost. It is promising to replace conventional interferometers for physical measurements, such as displacement, distance, velocity, vibration, and so on. In this paper, this interferometer was tried to be used for micro-electro-mechanical system (MEMS) dynamic measurement. Firstly, its measurement principle based on a three-mirror cavity model was presented, and then the laser self-mixing interferometer for MEMS dynamic measurement was designed, experiments were finally performed as target moves with different forms. Experimental results suggest that self-mixing interferometer is available for MEMS dynamic measurement, and may have wider applications in the future.
Zhaoyun ZHANG , Yang GAO , Wei SU . Laser self-mixing interferometer for MEMS dynamic measurement[J]. Frontiers of Optoelectronics, 2013 , 6(2) : 210 -215 . DOI: 10.1007/s12200-013-0318-x
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