The fast-axial-flow radio frequency (RF)-excited CO
2 laser is applied in current research areas like nano-particle synthesis, generation of mono-energetic million electron volts (MeV) photons in laser synchrotron sources, 13.5 nm extreme ultraviolet (EUV) sources for the next generation high volume chip manufacturing, particle acceleration, etc [
1−
4]. The performance of high-power fast-axial-flow RF-excited CO
2 laser is directly determined by the stable RF gas mixtures glow discharges in the discharge tube. The stable gas discharges is strongly influenced by the efficiency of solid state power supply. Power metal-oxide-semiconductor field-effect transistor (MOSFET) as one of core component of solid state power supply is usually operated under severe conditions of high power dissipation, consequently high junction temperatures may lead to poor reliability and ultimately premature failure of components [
5]. As power density requirements grow for power converters, thermal management design for power devices has become an important factor [
6]. Therefore, thermal management is a crucial step in the design of high efficiency solid state power supply. To find the most efficient way to control temperature and remove heat at power device for safe and reliable operation, a large number of researchers studied the thermal management of power device. Bar-Cohenand Iyengar [
7] presented some useful research results on air-cooling heat sinks in power device cooling issues. In their studies, a number of fin designs and their manufacturing technologies, as well as performed optimization to identify the maximum heat transfer capability within a given design domain were considered. For the sake of studying the influence of more parameters on air-cooling heat sinks, Ozturk and Tari [
8] analyzed three different commercial air-cooling heat sinks designed by using fluid dynamics software packages Icepak. The number of fins and their distribution, the fin material, and the base plate thickness were investigated in their study. Especially, replacing aluminum with copper as the heat sinks material improves the performance of whole system. However, the volume occupied and noise associated with the heat dissipation modules were always encountered in air-cooling heat sinks designs compared with liquid-cooling system. Advanced cooling techniques involving forced liquid convection, phase change and micro channel cooling system were drawn more attention to current and future semiconductor devices [
9]. Lee [
10] concentrated on a process of applying a computational fluid dynamics (CFD) technique to optimize pin array design of an integrated liquid-cooling insulated gate bipolar transistor (IGBT) power module. By simulating different pin array designs, the effects of total convective area and fluid pattern on die temperature were examined. From Lee's studies, the two rows of rectangular pins along with the inclined deflecting plates were the best array design. Moores et al. [
11] investigated heat dissipation effect of cooling fin heights design on an aluminum silicon carbide metal matrix composite base plate with integral cooling fins by using the thermal analysis and experimental performance. The studies showed 2 mm was the best height for cooling fin in this heat sink system. Nevertheless, the effect of the different shapes design of channel in liquid-cooling heat dissipating plate on heat dissipation has not been studied in Refs. [
10,
11]. At the system level, in order to radiate heats from power device more effectively, it is necessary to study the flow channel configurations. Thus, the purpose of this paper is to investigate the different shapes of channel and flow rates in water cooling radiation designs by using ANSYS Icepak 14.0 and to improve them based on the results of the analyses. In this paper, we took Mircosemi’s MOSFET product DRF 1201 as the research objective, which is used as power device for 13.56 MHz solid state power supply in fast-axial-flow (FAF) laser. The investigations include numerical simulation and experimental verification. First, in order to obtain the better performance of heat radiation from the model power device on water cooling radiation, the geometric configurations of the flow channels were simulated with two designs (the S channel and the cylindrical channel). The nine different flow rates were also simulated by Icepak. We found that the cylindrical channel can improve heat dissipation effect and get lower peak temperature. Meanwhile, the thermal resistance of heat sinks decreases by increasing the volumetric flow rate and the number of cylindrical columns in the flow channel. Secondly, the water cooling radiation inlay different shapes of channel are manufactured by computer numerical control(CNC) machine tools. The nine different flow rates have been measured by flow meter. The surrounding temperature of power device on the water cooling radiation is monitored by Fluke Ti9 infrared thermal imager. Finally, the numerical simulation results can be explained well by the above experimental performance and the experimental result can verify the improved heat radiation performance.