A sub-wavelength high-contrast grating (HCG) has been attracting much attention for various applications, including vertical-cavity surface-emitting lasers, high-
Q resonator, polarizing beam splitter, couplers, spectroscopy, and photodetectors for optical communications. It is a sub-wavelength grating of alternating sections of high refractive index semiconductor material and a low refractive index material such as air. High index gratings (blue) are surrounded by low index material, typically air. This index contrast is extremely critical for achieving broadband high reflectivity. Sub-wavelength grating has the optical character of guided-mode resonance anomaly, which can be used as spike filter [
1-
4]. This kind of spike filter has the advantages of high diffraction efficiency, good symmetry and fine sideband suppression [
5]. Sub-wavelength grating can be not only used as a spike filter, but also achieves the function of the broadband filter [
6,
7]. Both broadband and spike filters play important role in the field of optical communications and optical processing [
8,
9]. There are many studies about spike filters already published, but the broadband filters based on sub-wavelength grating had not been researched much. In this paper, we combined multiple single-layer HCG to make a multi-layer HCG structure. With our design, this multi-layer HCG structure has a very broad reflection spectrum and high reflectivity, and it can be used as broadband filter.