Energy-efficient integrated silicon optical phased array

Huaqing Qiu, Yong Liu, Xiansong Meng, Xiaowei Guan, Yunhong Ding, Hao Hu

Front. Optoelectron. ›› 2023, Vol. 16 ›› Issue (3) : 23.

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Front. Optoelectron. ›› 2023, Vol. 16 ›› Issue (3) : 23. DOI: 10.1007/s12200-023-00076-1
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Energy-efficient integrated silicon optical phased array

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Abstract

An optical phased array (OPA) is a promising non-mechanical technique for beam steering in solid-state light detection and ranging systems. The performance of the OPA largely depends on the phase shifter, which affects power consumption, insertion loss, modulation speed, and footprint. However, for a thermo-optic phase shifter, achieving good performance in all aspects is challenging due to trade-offs among these aspects. In this work, we propose and demonstrate two types of energy-efficient optical phase shifters that overcome these trade-offs and achieve a well-balanced performance in all aspects. Additionally, the proposed round-spiral phase shifter is robust in fabrication and fully compatible with deep ultraviolet (DUV) processes, making it an ideal building block for large-scale photonic integrated circuits (PICs). Using the high-performance phase shifter, we propose a periodic OPA with low power consumption, whose maximum electric power consumption within the field of view is only 0.33 W. Moreover, we designed Gaussian power distribution in both the azimuthal (ϕ) and polar (θ) directions and experimentally achieved a large sidelobe suppression ratio of 15.1 and 25 dB, respectively.

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Optical phased array / Optical phase shifter / Silicon photonics / Integrated optics

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Huaqing Qiu, Yong Liu, Xiansong Meng, Xiaowei Guan, Yunhong Ding, Hao Hu. Energy-efficient integrated silicon optical phased array. Front. Optoelectron., 2023, 16(3): 23 https://doi.org/10.1007/s12200-023-00076-1

1 Introduction

The fiber Bragg grating (FBG) is a fiber passive apparatus, which was rapidly developed and widely applied in recent years. Measuring the temperature change is the most important and direct application of an FBG sensor. Lots of researches had been carried out in this regard, but most of them were involved in the normal temperature zone, while few were covered below zero. Some relevant researches considered the relationship between thermal variation ΔT and reflected center wavelength λB as linear, but it is not suitable for wavelength variation at low temperatures or in the large-scope temperature sensing.
According to the temperature sensing model of FBG, the theoretical research was carried out, which focused on the relationship between the thermal variation and the relative shift of the reflected center wavelength. The relationship was put forward at liquid nitrogen temperature (-196°C) based on the experiment. The theoretical and experimental results were compared and analyzed, which show that at liquid nitrogen temperature or in a large-scope temperature sensing, the relationship between thermal variation ΔT and relative shift of reflected center wavelength ΔλB/λB of FBG is nonlinear and conic multinomial. The result is helpful on both the theoretical analysis and application research on the mechanism of FBG temperature sensing.

2 Theory of FBG temperature sensing

FBG is an apparatus whose refractive index is lengthways cycled distribution, and its Bragg equation is
λB(T)=2neffΛ.
When the environmental temperature T changes, without consideration of the strain affection, the effective refractive index neff and the FBG spatial cycle Λ would change by the calorescence effect and the thermal dilatant effect, which is due to the shift of the Bragg reflected center wavelength λB. If the original environmental temperature is T0, λB(T) is expanded by Thaler, and kept quantic item, then
λB(T)=λB(T0)+dλB(T)dTΔT+12dλB(T)dT2ΔT2,
where ΔT = T - T0.
By Eqs. (1) and (2), we can get
ΔλBλB=λB(T)-λB(T0)λB(T)=1λBdλBdTΔT+121λBd2λBdT2ΔT2=ηΔT,
where η represents the thermal sensitivity coefficient,
η=1λBdλBdT+121λBd2λBdT2ΔT.
Taking the natural logarithm on Eq. (1) and taking the derivative on T, we can get the following equation:
1λBdλBdT=1neffdneffdT+1ΛdΛdT,
where 1λBdλBdT is the calorescence coefficient of FBG and indicated as ϵ, and 1ΛdΛdT is the thermal dilatant coefficient of FBG and indicated as α. Therefore, Eq. (5) can be described as
1λBdλBdT=ϵ+α.
By Eq. (6), we can get
1λBd2λBdT2=[dϵdT+dαdT+(ϵ+α)2].
By Eqs. (5), (6) and (7), we can get
η=(ϵ+α)+12[dϵdT+dαdT+(ϵ+α)2]ΔT.
The thermal dilatants' coefficient and the calorescence coefficient of germanium-doped silicon fiber are α ≅ 0.5 × 10-6/°C 1 and ϵ ≅ 8.3 × 10-6/°C 2,3, respectively. Because the mechanical parameter changes with temperature, there is a reliable relationship between the thermal dilatant coefficient α, the calorescence coefficient ϵ and temperature is not constant. Therefore, the FBG thermal sensitivity coefficient η is not constant.

3 Experimental results and analysis

Many researches indicated that the accurate measurement temperature with FBG was not meant to measure the thermal sensitivity coefficient with fiber mechanical parameter. The accurate measurement temperature should be based on the experiments because the original mechanical parameter will change after the silicon through fiber forming and input fiber grating. The laboratory quadratic curve fitting equation of Refs. 4 and 5 is
ΔλBλB=(6.045×10-6+10-8ΔT)ΔT.
The measurement temperature zone of this curve is 20°C–260°C, which does not cover the temperature response of the reflected center wavelength of the FBG in the low temperature zone. The temperature response of the reflected center wavelength of FBG at liquid nitrogen temperature (-196°C) was measured. The experimental equipment is shown in
Fig0 Experimental equipment of thermal sensing

Full size|PPT slide

Fig. 1. The light from the erbium-doped fiber amplifier (EDFA, produced by TAIKE) makes the incidence to the FBG in the liquid nitrogen through the ring, and the reflected light by FBG goes into the optical spectrum analyzers (OSA, produced by ANDO with AQ6319, and its resolution is 0.001 nm) through the ring. The FBG was produced by Lightwave Technology Institute, Beijing Jiaotong University, which used ultraviolet radiation and induced it to the germanium-doped single-mode fiber at the ultraviolet zone through the technology of phase masks.
The FBG reflected wavelength λB is 1559.650 nm.
Fig0 FBG reflected spectrogram at room temperature(23°C)

Full size|PPT slide

Figure 2 shows the FBG reflected spectrogram at room temperature (23°C), and
Fig0 FBG reflected spectrogram at the temperature point of liquid nitrogen state(-196°C)

Full size|PPT slide

Fig. 3 shows the FBG reflected spectrogram at liquid nitrogen temperature (-196°C). From room temperature to liquid nitrogen temperature, the total shift ΔλB0 of the reflected center wavelength λB is 1.398 nm. The cycle experiment of liquid nitrogen temperature to room temperature, to liquid nitrogen temperature was implemented 4 times. The experimental data is listed in the
Tab0 Measurement dada of temperature sensing(nm)
λB (23°C)λB (-196°C)ΔλB0
1569.6501568.2511.399
1569.6501568.2491.401
1569.6501568.2471.403
1569.6501568.2521.398
Table 1. The shift of λB is about 1.4 nm, which indicates that the thermal variation is a reversible process to FBG.
In terms of Eq. (9), the shift ΔλB of FBG at liquid nitrogen temperature is 1.325 nm, inosculated with the shift of the wavelength in the experiment. The deviation may be caused by some factors such as the difference of FBG, and the reflected center wavelength, etc. The experimental results indicate that FBG can realize the temperature sensing at liquid nitrogen temperature, there is no aberrance in the FBG reflected spectrogram, and the shift of the wavelength is quadric with temperature.

4 Conclusions

We studied the characteristics of FBG at low temperature, measured the relative shift of the reflected center wavelength at liquid nitrogen temperature, and obtain the following conclusions: 1) FBG can achieve temperature sensing at liquid nitrogen temperature, and there is no aberrance in the FBG reflected spectrogram. 2) The relative shift of reflected wavelength is quadric with the temperature variation.

References

[1]
Chakraborty,M., Khot,L.R., Sankaran,S., Jacoby, P.W.: Evaluation of mobile 3D light detection and ranging based canopy mapping system for tree fruit crops. Comput. Electron. Agric. 158, 284–293 (2019)
CrossRef Google scholar
[2]
Collis,R.: Lidar. In: Advances in Geophysics vol. 13, pp. 113–139. Elsevier (1969)
CrossRef Google scholar
[3]
Northend,C.A.: Lidar, a laser radar for meteorological studies. Naturwissenschaften 54, 77–80 (1967)
CrossRef Google scholar
[4]
Reutebuch,S.E., Andersen, H.-E., McGaughey,R.J.: Light detection and ranging (lidar): an emerging tool for multiple resource inventory. J. Forest. 103(6), 286–292 (2005)
[5]
Kim,I., Martins, R.J., Jang,J., Badloe,T., Khadir, S., Jung,H.-Y., Kim,H., Kim,J., Genevet,P., Rho, J.: Nanophotonics for light detection and ranging technology. Nat. Nanotechnol. 16(5), 508–524 (2021)
CrossRef Google scholar
[6]
Raj,T., Hanim Hashim, F., Baseri Huddin,A., Ibrahim,M.F., Hussain, A.: A survey on lidar scanning mechanisms. Electronics 9(5), 741 (2020)
CrossRef Google scholar
[7]
Liu,J., Sun,Q., Fan,Z., Jia, Y.: Tof lidar development in autonomous vehicle. In: 2018 IEEE 3rd Optoelectronics Global Conference (OGC), pp. 185–190. IEEE (2018)
CrossRef Google scholar
[8]
Wang,D., Watkins, C., Xie,H.: Mems mirrors for lidar: a review. Micromachines 11(5), 456 (2020)
CrossRef Google scholar
[9]
McManamon,P.F., Banks,P., Beck,J., Fried, D.G., Huntington,A.S., Watson,E.A.: Comparison of flash lidar detector options. Opt. Eng. 56(3), 031223–031223 (2017)
CrossRef Google scholar
[10]
Stettner,R.: Compact 3d flash lidar video cameras and applications. In: Laser Radar Technology and Applications XV, vol. 7684, pp. 39–46. SPIE (2010)
CrossRef Google scholar
[11]
Yoo,H.W., Druml,N., Brunner,D., Schwarzl, C., Thurner,T., Hennecke,M., Schitter, G.: Mems-based lidar for autonomous driving. e & i Elektrotechnik und Informationstechnik (2018)
CrossRef Google scholar
[12]
Takashima,Y., Hellman, B., Rodriguez,J., Chen,G., Smith,B., Gin,A., Espinoza, A., Winkler,P., Perl,C., Luo,C., et al.: Mems-based imaging lidar. In: Optics and Photonics for Energy and the Environment, pp. 4–1. Optica Publishing Group (2018)
CrossRef Google scholar
[13]
Dong,L., Zhu,W., Zhao,Y., Liu, X., Zhang,J., Liu,W., Zhou,X.: A novel optical-mechanical scanning passive thz imaging system. In: 2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves, pp. 1–2 IEEE (2012)
CrossRef Google scholar
[14]
Hsu,C.-P., Li,B., Solano-Rivas,B., Gohil,A.R., Chan,P.H., Moore,A.D., Donzella, V.: A review and perspective on optical phased array for automotive lidar. IEEE J. Sel. Top. Quantum Electron. 27(1), 1–16 (2020)
CrossRef Google scholar
[15]
Poulton,C.V., Yaacobi, A., Cole,D.B., Byrd,M.J., Raval,M., Vermeulen,D., Watts,M.R.: Coherent solid-state lidar with silicon photonic optical phased arrays. Opt. Lett. 42(20), 4091–4094 (2017)
CrossRef Google scholar
[16]
Wang,Y., Wu,M.: An optical phased array for lidar. In: Journal of Physics: Conference Series, vol. 772, p. 012004. IOP Publishing (2016)
CrossRef Google scholar
[17]
Heck,M.J.: Highly integrated optical phased arrays: photonic integrated circuits for optical beam shaping and beam steering. Nanophotonics 6(1), 93–107 (2017)
CrossRef Google scholar
[18]
Poulton,C.V., Byrd,M.J., Timurdogan,E., Russo,P., Vermeulen, D., Watts,M.R.: Optical phased arrays for integrated beam steering. In: 2018 IEEE 15th International Conference on Group IV Photonics (GFP), pp. 1–2, IEEE (2018)
CrossRef Google scholar
[19]
Qiu,H., Dong,J., Liu,L., Zhang, X.: Energy-efficient on-chip optical diode based on the optomechanical effect. Opt. Express 25(8), 8975–8985 (2017)
CrossRef Google scholar
[20]
Miller,S.A., Chang,Y.-C., Gordillo,O.A.J., et al.: Large-scale optical phased array using a low-power multi-pass silicon photonic platform. Optica 7(1), 3–6 (2020)
CrossRef Google scholar
[21]
Kang,G., Kim,S.-H., You,J.-B., Lee, D.-S., Yoon,H., Ha,Y.-G., Kim,J.-H., Yoo,D.-E., Lee, D.-W., Youn,C.-H., et al.: Silicon-based optical phased array using electro-optic p-i-n phase shifters. IEEE Photonics Technol. Lett. 31(21), 1685–1688 (2019)
CrossRef Google scholar
[22]
Tu,X., Liow,T.-Y., Song,J., Luo, X., Fang,Q., Yu,M., Lo,G.-Q.: 50-gb/s silicon optical modulator with traveling-wave electrodes. Opt. Express 21(10), 12776–12782 (2013)
CrossRef Google scholar
[23]
Wang,Y., Zhou,G., Zhang,X., Kwon, K., Blanche,P.-A., Triesault,N., Yu,K.-S., Wu,M.C.: 2d broadband beamsteering with large-scale mems optical phased array. Optica 6(5), 557–562 (2019)
CrossRef Google scholar
[24]
Jin,W., Polcawich, R.G., Morton,P.A., Bowers,J.E.: Piezoelectrically tuned silicon nitride ring resonator. Opt. Express 26(3), 3174–3187 (2018)
CrossRef Google scholar
[25]
Chung,S., Nakai,M., Hashemi,H.: Low-power thermo-optic silicon modulator for large-scale photonic integrated systems. Opt. Express 27(9), 13430–13459 (2019)
CrossRef Google scholar
[26]
Szelag,B., Fowler, D., Tyler,N.A., Grosse,P., Malhouitre, S., Garcia,S., Rabaud,W.: Sin integrated optical phased arrays for two-dimensional beam steering at a single near-infrared wave-length. Opt. Express 27(4), 5851–5858 (2019)
CrossRef Google scholar
[27]
Wang,Q., Wang,Q., Wang,S., Wang, S., Jia,L., Cai,Y., Yue,W., Yu,M.: Silicon nitride assisted 1x64 optical phased array based on a SOI platform. Opt. Express 29(7), 10509–10517 (2021)
CrossRef Google scholar
[28]
Van Acoleyen,K., Rogier, H., Baets,R., Kahn,J.M., Barry,J.R., Van Acoleyen,K., Bogaerts,W., Jágerská, J., Le Thomas,N., Houdré,R., Baets, R., McManamon,P.F., Dorschner,T.A., Corkum, D.L., Friedman,L.J., Hobbs,D.S., Holz,M., Liberman,S., Nguyen, H.Q., Resler,D.P., Sharp,R.C., Watson, E.A., Joshi,H., Higgins,M.D., Leeson, M.S.: Two-dimensional optical phased array antenna on silicon-on-insulator. Optics Express 18(13), 13655–13660 (2010)
CrossRef Google scholar
[29]
Sun,J., Hosseini, E.S., Yaacobi,A., Cole,D.B., Coolbaugh, D., Leake,G., Watts,M.R.: Two-dimensional apodized silicon photonic phased arrays. Opt. Lett. 39(2), 367–370 (2014)
CrossRef Google scholar
[30]
Phare,C.T., Shin,M.C., Miller,S.A., Stern, B., Lipson,M.: Silicon optical phased array with grating lobe-free beam formation over 180 degree field of view. CLEO: Science and Innovations, 3–2 (2018)
CrossRef Google scholar
[31]
Sabouri,S., Jamshidi, K.: Design considerations of silicon nitride optical phased array for visible light communications. IEEE J. Sel. Top. Quantum Electron. 24(6) (2018)
CrossRef Google scholar
[32]
Qin,C., Liu,G., Shang,K., Yoo, S.J.B., Feng,S., Xiao,X., Zhang,Y.: Uniform emission, constant wavevector silicon grating surface emitter for beam steering with ultra-sharp instantaneous field-of-view. Opt. Express 25(17), 19655–19661 (2017)
CrossRef Google scholar
[33]
Hutchison,D.N., Sun,J., Doylend,J.K., Kumar,R., Heck,J., Kim,W., Phare, C.T., Feshali,A., Rong,H.: High-resolution aliasing-free optical beam steering. Optica 3(8), 887–890 (2016)
CrossRef Google scholar
[34]
Chung,S., Abediasl, H., Hashemi,H.: A monolithically integrated large-scale optical phased array in silicon-on-insulator CMOS. IEEE J. Solid-State Circuits 53(1), 275–296 (2017)
CrossRef Google scholar
[35]
Zhang,X., Kwon,K., Henriksson,J., Luo,J., Wu,M.C.: A large-scale microelectromechanical-systems-based silicon photonics lidar. Nature 603(7900), 253–258 (2022)
CrossRef Google scholar
[36]
Xu,W., Guo,Y., Li,X., Liu, C., Lu,L., Chen,J., Zhou,L.: Fully integrated solid-state lidar transmitter on a multi-layer silicon-nitride-on-silicon photonic platform. J. Light. Technol. (2022)
CrossRef Google scholar
[37]
Li,W., Chen,J., Liang,D., Dai, D., Shi,Y.: Silicon optical phased array with calibration-free phase shifters. Opt. Express 30(24), 44029–44038 (2022)
CrossRef Google scholar
[38]
Li,Y., Chen,B., Na,Q., Xie, Q., Tao,M., Zhang,L., Zhi,Z., Li,Y., Liu, X., Luo,X., et al.: Wide-steering-angle high-resolution optical phased array. Photonics Res. 9(12), 2511–2518 (2021)
CrossRef Google scholar
[39]
Poulton,C.V., Byrd,M.J., Russo,P., Moss, B., Shatrovoy,O., Khandaker,M., Watts,M.R.: Coherent lidar with an 8,192-element optical phased array and driving laser. IEEE J. Sel. Top Quantum Electron. 28(5: Lidars and Photonic Radars), 1–8 (2022)
CrossRef Google scholar
[40]
Midkiff,J., Yoo,K.M., Shin,J.-D., Dalir, H., Teimourpour,M.H., Chen,R.: Optical phased array beam steering in the mid-infrared on an INP-based platform. Optica 7(11), 1544–1547 (2020)
CrossRef Google scholar
[41]
Xie,W., Komljenovic, T., Huang,J., Tran,M., Davenport, M., Torres,A., Pintus,P., Bowers, J.: Heterogeneous silicon photonics sensing for autonomous cars. Opt. Express 27(3), 3642–3663 (2019)
CrossRef Google scholar
[42]
Poulton,C.V., Byrd,M.J., Russo,P., Moss, B., Shatrovoy,O., Khandaker,M., Watts,M.R.: Coherent lidar with an 8,192-element optical phased array and driving laser. IEEE J. Sel. Top Quantum Electron. 28(5: Lidars and Photonic Radars), 1–8 (2022)
CrossRef Google scholar
[43]
Epping,J.P., Marchenko, D., Leinse,A., Mateman,R., Hoekman, M., Wevers,L., Roeloffzen,C.G., Dekkers, M., Heideman,R.G.: Ultra-low-power stress-based integrated photonic phase actuator. Proc. Eur. Conf. Integr. Opt (2018)
[44]
Sun,J., Timurdogan, E., Yaacobi,A., Su,Z., Hosseini, E.S., Cole,D.B., Watts,M.R.: Large-scale silicon photonic circuits for optical phased arrays. IEEE J. Sel. Top. Quantum Electron. 20(4), 264–278 (2013)
CrossRef Google scholar
[45]
Watts,M.R., Sun,J., DeRose,C., Trotter, D.C., Young,R.W., Nielson,G.N.: Adiabatic thermo-optic Mach-Zehnder switch. Opt. Lett. 38(5), 733–735 (2013)
CrossRef Google scholar
[46]
Liu,Y., Hu,H.: Silicon optical phased array with a 180-degree field of view for 2D optical beam steering. Optica 9(8), 903–907 (2022)
CrossRef Google scholar
[47]
Komma,J., Schwarz, C., Hofmann,G., Heinert,D., Nawrodt, R.: Thermo-optic coefficient of silicon at 1550 nm and cryogenic temperatures. Appl. Phys. Lett. 101(4), 041905 (2012)
CrossRef Google scholar
[48]
Frey,B.J., Leviton, D.B., Madison,T.J.: Temperature-dependent refractive index of silicon and germanium. In: Optomechanical Technologies for Astronomy, vol. 6273, pp. 790–799. SPIE (2006)
CrossRef Google scholar
[49]
Espinola,R., Tsai,M., Yardley,J.T., Osgood,R.: Fast and low-power thermooptic switch on thin silicon-on-insulator. IEEE Photonics Technol. Lett. 15(10), 1366–1368 (2003)
CrossRef Google scholar
[50]
Gu,L., Jiang,W., Chen,X., Chen, R.T.: Thermooptically tuned photonic crystal waveguide silicon-on-insulator Mach-Zehnder interferometers. IEEE Photonics Technol. Lett. 19(5), 342–344 (2007)
CrossRef Google scholar
[51]
Yan,S., Zhu,X., Frandsen,L.H., Xiao,S., Mortensen, N.A., Dong,J., Ding,Y.: Slow-light-enhanced energy efficiency for graphene microheaters on silicon photonic crystal waveguides. Nat. Commun. 8(1), 1–8 (2017)
CrossRef Google scholar
[52]
Densmore,A., Janz,S., Ma,R., Schmid, J.H., Xu,D.-X., Delâge,A., Lapointe, J., Vachon,M., Cheben,P.: Compact and low power thermo-optic switch using folded silicon waveguides. Opt. Express 17(13), 10457–10465 (2009)
CrossRef Google scholar
[53]
Murray,K., Lu,Z., Jayatilleka,H., Chrostowski,L.: Dense dissimilar waveguide routing for highly efficient thermo-optic switches on silicon. Opt. Express 23(15), 19575–19585 (2015)
CrossRef Google scholar
[54]
Sun,P., Reano,R.M.: Submilliwatt thermo-optic switches using free-standing silicon-on-insulator strip waveguides. Opt. Express 18(8), 8406–8411 (2010)
CrossRef Google scholar
[55]
Lu,Z., Murray, K., Jayatilleka,H., Chrostowski,L.: Michelson interferometer thermo-optic switch on SOI with a 50-μw power consumption. IEEE Photonics Technol. Lett. 27(22), 2319–2322 (2015)
CrossRef Google scholar
[56]
Qiu,H., Liu,Y., Luan,C., Kong, D., Guan,X., Ding,Y., Hu,H.: Energy-efficient thermo-optic silicon phase shifter with well-balanced overall performance. Opt. Lett. 45(17), 4806–4809 (2020)
CrossRef Google scholar
[57]
Qiu,H., Liu,Y., Luan,C., Kong, D., Guan,X., Ding,Y., Hu,H.: Energy-efficient thermo-optic silicon phase shifter with well-balanced overall performance. Opt. Lett. 45(17), 4806–4809 (2020)
CrossRef Google scholar
[58]
Tong,W., Wei,Y., Zhou,H., Dong, J., Zhang,X.: The design of a low-loss, fast-response, metal thermo-optic phase shifter based on coupled-mode theory. In: Photonics, vol. 9, p. 447, MDPI (2022)
CrossRef Google scholar
[59]
Jacques,M., Samani, A., El-Fiky,E., Patel,D., Xing,Z., Plant,D.V.: Optimization of thermo-optic phase-shifter design and miti-gation of thermal crosstalk on the SOI platform. Opt. Express 27(8), 10456–10471 (2019)
CrossRef Google scholar
[60]
Liu,Y., Meng,X., Hu,H.: 1000-element silicon optical phased array for aliasing-free 2d optical beam steering. In: CLEO: Applications and Technology, pp. 6–3. Optica Publishing Group (2022).
CrossRef Google scholar
[61]
Liu,Y., Hu,H.: Silicon optical phased array with 180-degree field of view for solid-state 2d beam steering. In: CLEO: Science and Innovations, pp. 1–3. Optica Publishing Group (2022).
CrossRef Google scholar
[62]
Qiu,H., Liu,Y., Meng,X., Guan, X., Ding,Y., Hu,H.: Bidirectional high sidelobe suppression silicon optical phased array. Photonics Res. 11(4), 659–668 (2023)
CrossRef Google scholar
[63]
Qiu,H., Liu,Y., Meng,X., Guan, X., Ding,Y., Hu,H.: Silicon optical phased array with high sidelobe suppression on both horizontal and vertical directions. In: CLEO: Science and Innovations, pp. 2–7. Optica Publishing Group (2022)
CrossRef Google scholar
[64]
Chung,S., Abediasl, H., Hashemi,H.: A monolithically integrated large-scale optical phased array in silicon-on-insulator CMOS. IEEE J. Solid-State Circuits 53(1), 275–296 (2017)
CrossRef Google scholar
[65]
Wang,Q., Wang,S., Yu,M., et al.: Silicon nitride assisted 1×64 optical phased array based on a SOI platform. Opt. Express 29(7), 10509–10517 (2021)
CrossRef Google scholar

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