Growth of InGaN-based blue-LED on AlN/sapphire sputtered with different oxygen flow rate

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Front. Optoelectron. ›› 2021, Vol. 14 ›› Issue (4) : 507-512. DOI: 10.1007/s12200-021-1216-2
RESEARCH ARTICLE

Growth of InGaN-based blue-LED on AlN/sapphire sputtered with different oxygen flow rate

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front. Optoelectron., 2021, 14(4): 507‒512 https://doi.org/10.1007/s12200-021-1216-2

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