Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation

Abstract

In this paper, a CO₂ laser induced discharge plasma extreme ultraviolet (EUV) source experimental device was established. The optical emission spectroscopy was used to diagnose the characteristics of the plasma, and the evolution of electron temperature and electron density with time was obtained. The influence of discharge voltage on plasma parameters was analyzed and discussed. The EUV radiation characteristics of the plasma were investigated by self-made grazing incidence EUV spectrometer. The EUV radiation intensity and conversion efficiency were discussed.

Graphical abstract

Keywords

extreme ultraviolet (EUV) radiation / laser induced discharge plasma / optical emission spectroscopy / electron temperature and density

References

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Acknowledgements

This work was supported by the Fundamental Research Funds for the Central Universities (HUST: 2016YXMS028).

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