Error compensation for three-dimensional profile measurement system

Abstract

Three-dimensional (3D) profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.2λ.

Keywords

aspheric surface / three-dimensional (3D) profile measurement / alignment error / error compensation

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Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grant Nos. 61128012, 61061160503 and 61222506), the Key Laboratory of Photoelectronic Imaging Technology and System, BIT, Ministry of Education of China (No. 2013OEIOF06).

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2014 Higher Education Press and Springer-Verlag Berlin Heidelberg