High precision mode of subaperture stitching for optical surfaces measurement

Abstract

Subaperture stitching (SAS) provides us with an attractive way of extending the effective aperture and dynamic range of phase measuring interferometers. Accuracy of stitching algorithm becomes the key factor in the SAS technology. In this paper, the basic principle of SAS was introduced and four modes of SAS were discussed. The stitching experiments were done through the SSI-300 workstation designed and developed independently. There were several comparisons between the four different stitching methods and the measurement of full aperture. The results suggest that the global error averaging mode with reference of subaperture near optic axis is of high precision.

Keywords

optical testing / subaperture stitching (SAS) / algorithm / stitching mode

References

[1] Thetford A. Optical shop testing. Malacara D, ed. John Wiley. Optics & Laser Technology, 1979, 11(1): 55

[2] Huxford R B. Wide-FOV head-mounted display using hybrid optics. Proceedings of the International Society for Optics and Photonics, 2004, 5249: 230-237

[3] Malacara D. Optical Shop Testing. New York: John Wiley & Sons Inc, 2007

[4] Martin H M, Zappellini G B, Cuerden B, Miller S M, Riccardi A, Smith B K. Deformable secondary mirrors for the LBT adaptive optics system. In: Proceedings of the International Society for Optics and Photonics. 2006, 6372

[5] Haensel T, Nickel A, Schindler A. Stitching interferometry of aspherical surfaces. In: Proceedings of the International Society for Optics and Photonics. 2001, 4449

[6] Shorey A B, Kordonski W, Tricard M. Magnetorheological finishing and subaperture stitching interferometry of large and lightweight optics. In: Proceedings of the International Society for Optics and Photonics. 2004, 5494

[7] Murphy P E, Fleig J, Forbes G, Tricard M. High precision metrology of domes and aspheric optics. Proceedings of the International Society for Optics and Photonics, 2005, 5786: 112-121

[8] Chen S Y, Li S Y, Dai Y F, Zheng Z W. Testing of large optical surfaces with subaperture stitching. Applied Optics, 2007, 46(17): 3504-3509

[9] Thunen J G, Kwon O Y. Full aperture testing with subaperture test optics. Proceedings of the International Society for Optics and Photonics,1983, 0351: 19-27

[10] Chow W W, Lawrence G N.Method for subaperture testing interferogram reduction. Optics Letters, 1983, 8(9): 468-470

[11] Stuhlinger T W. Subaperture optical testing: experimental verification. Proceedings of the International Society for Optics and Photonics, 1986, 0655: 350-359

[12] Chen H B, Wang Y W. Research on testing technology for aspheric. Aviation Precision Manufacturing Technology, 2004, 40(4): 8-10 (in Chinese)

[13] Chen H B, Wang Y W, Feng Z J, Feng Z W, Zhang R. Study on conic constant and paraxial radius of optical aspheric. Optical Technique, 2004, 30(3): 311-313,317 (in Chinese)

[14] Gao Y, Tam H Y, Wen Y F, Zhang H J, Cheng H B. Measurement of optical mirror with a small-aperture interferometer. Frontiers of Optoelectronics, 2012, 5(2): 218-223

[15] Yun, Y. Research on technique of large aperture optical components test based on sub-aperture stitching. Dissertation for the Master Degree. Changchun: Changchun University of Science and Technology, 2009 (in Chinese)

[16] Li X N, Zhang M Y. Study on the sub-aperture stitching interferometry for large plano-optics. Optical Technique, 2006, 32(4): 514-517 (in Chinese)

[17] Chen G, Jiang S L. Large aperture optical components of stitching technique by error averaging. Opto-Electronic Engineering, 2006, 33(6): 118-120 (in Chinese)

[18] Otsubo M, Okada K, Tsujiuchi J. Measurement of large plane surface shapes by connecting small-aperture interferograms. Optical Engineering, 1994, 33(2): 608-613

[19] Wang C X. Research on the subaperture stitching interferometry for large plano optics. Dissertation for the Master Degree. Nanjing: Nanjing University of Science and Technology, 2007 (in Chinese)

[20] Yang J. Research on performance of the subaperture stitching algorithm for optical surfaces. Dissertation for the Master Degree. Changsha: National University of Defense Technology, 2008 (in Chinese)

Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grant Nos. 60978043, 61128012, 61061160503, 61222506).

RIGHTS & PERMISSIONS

2014 Higher Education Press and Springer-Verlag Berlin Heidelberg