Thermal analysis for fast thermal-response Si waveguide wrapped by SiN

Abstract

A new type of Si waveguide wrapped by silicon nitride (SiN) is designed, and its optical and thermal analysis are presented. The thickness of SiN up-cladding should be larger than 1 μm in order to prevent the absorption of optical field by metal heater. Thermal response of the proposed waveguide structure is enhanced by the high thermal conductivity of SiN. Moreover, this thermal response can be further improved by a fast heat dissipation channel created in this structure. Our simulation results indicate that a rise time of about 110 ns can be achieved for the proposed waveguide structure, which is about two orders of magnitude less than that of the conventional Si waveguide. The influences of the thickness of up-cladding and the stretching width and etching depth on the thermal performance are also discussed. The simulation shows thin up-cladding, large stretching width and etching depth are critical to enhance the thermal response speed.

Keywords

thermo-optic / SiN / Si / waveguide / rise time

References

[1] Chu T, Yamada H, Ishida S, Arakawa Y. Compact 1 × N thermo-optic switches based on silicon photonic wire waveguides. Optics Express, 2005, 13(25): 10109-10114

[2] Geis M W, Spector S J, Williamson R C, Lyszczarz T M. Submicrosecond submilliwatt silicon-on-insulator thermooptic switch. IEEE Photonics Technology Letters, 2004, 16(11): 2514-2516

[3] Espinola R L, Tsai M C, Yardley J T, Osgood R M. Fast and low-power thermooptic switch on thin silicon-on-insulator. IEEE Photonics Technology Letters, 2003, 15(10): 1366-1368

[4] Geng M M, Jia L X, Zhang L, Yang L, Chen P, Wang T, Liu Y. Four-channel reconfigurable optical add-drop multiplexer based on photonic wire waveguide. Optics Express, 2009, 17(7): 5502-5516

[5] Zhang L, Ji R Q, Jia L X, Yang L, Zhou P, Tian Y, Chen P, Lu Y, Jiang Z, Liu Y, Fang Q, Yu M. Demonstration of directed XOR/XNOR logic gates using two cascaded microring resonators. Optics Letters, 2010, 35(10): 1620-1622

[6] van Campenhout J, Green W M J, Assefa S, Vlasov Y A. Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices. Optics Letters, 2010, 35(7): 1013-1015

[7] Liu Y, Dai D, He S. Thermal analysis for a photonic Si ridge wire with a submicron metal heater. Optics Communications, 2008, 281(9): 2467-2471

[8] Yap K P, Smy T, Syrett B, Schmid J H, Waldron P, Densmore A, Janz S. Power and speed analysis of miniaturized SOI Y-branch Mach-Zehnder thermo-optic switches. In: Proceedings of SPIE, 2010, 7606: 76060P1-76060P11

[9] Jalali B, Fathpour S. Silicon photonics. Journal of Lightwave Technology, 2006, 24(12): 4600-4615

[10] Yap K P. Silicon Photonics: coupling, propagation and modulation of light in silicon. Dissertation for the Doctoral Degree. Ottawa: Carleton University, 2009

[11] Bogaerts W, Dumon P, Wiaux V, Wouters J, Beckx S, Taillaert D, Luyssaert B, van Campenhout J, van Thourhout D, Baets R. Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology. Journal of Lightwave Technology, 2005, 23(1): 401-411

Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grant No. 60977037), and the National High Technology Research and Development Program of China (No. 2009AA03Z416).

RIGHTS & PERMISSIONS

2014 Higher Education Press and Springer-Verlag Berlin Heidelberg