Magnetorheological finishing of optical surface combined with symmetrical tool function

Abstract

This research is aimed at the development of computer-aided polishing technology for optical surfaces using magnetorheological (MR) fluid as medium. The mechanism of a dual-axis polishing wheel and the mathematical model combined with a symmetrical tool function are demonstrated. The effects of speed, gap, time and geometric parameters of the tool have been experimentally evaluated by polishing a parabolic BK7 mirror in 120 mm diameter. The surface topography presented an obvious amelioration, and the shape accuracy decreased to 0.067λ from 0.519λ (λ=632.8 nm, RMS) after 75 min finishing.

Keywords

magnetorheological finishing (MRF) / material removal / symmetrical tool function

References

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Acknowledgements

The authors would like to acknowledge the support provided by the National Natural Science Foundation of China (Grant No. 60978043), the Hi-Tech Research and Development Program of China (No. 2009AA04Z115), the Key Lab of Beijing Advanced Manufacturing Technology, and the Beijing Municipal Natural Science Foundation Project (No. 4092036).

RIGHTS & PERMISSIONS

2014 Higher Education Press and Springer-Verlag Berlin Heidelberg