Simple technique to fabricate microscale and nanoscale silicon waveguide devices

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Front. Optoelectron. ›› 2009, Vol. 2 ›› Issue (3) : 308-311. DOI: 10.1007/s12200-009-0049-1
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Simple technique to fabricate microscale and nanoscale silicon waveguide devices

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front Optoelec Chin, 2009, 2(3): 308‒311 https://doi.org/10.1007/s12200-009-0049-1

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