A review of low-temperature plasma-assisted machining: from mechanism to application

Abstract

Materials with high hardness, strength or plasticity have been widely used in the fields of aviation, aerospace, and military, among others. However, the poor machinability of these materials leads to large cutting forces, high cutting temperatures, serious tool wear, and chip adhesion, which affect machining quality. Low-temperature plasma contains a variety of active particles and can effectively adjust material properties, including hardness, strength, ductility, and wettability, significantly improving material machinability. In this paper, we first discuss the mechanisms and applications of low-temperature plasma-assisted machining. After introducing the characteristics, classifications, and action mechanisms of the low-temperature plasma, we describe the effects of the low-temperature plasma on different machining processes of various difficult-to-cut materials. The low-temperature plasma can be classified as hot plasma and cold plasma according to the different equilibrium states. Hot plasma improves material machinability via the thermal softening effect induced by the high temperature, whereas the main mechanisms of the cold plasma can be summarized as chemical reactions to reduce material hardness, the hydrophilization effect to improve surface wettability, and the Rehbinder effect to promote fracture. In addition, hybrid machining methods combining the merits of the low-temperature plasma and other energy fields like ultrasonic vibration, liquid nitrogen, and minimum quantity lubrication are also described and analyzed. Finally, the promising development trends of low-temperature plasma-assisted machining are presented, which include more precise control of the heat-affected zone in hot plasma-assisted machining, cold plasma-assisted polishing of metal materials, and further investigations on the reaction mechanisms between the cold plasma and other materials.

Graphical abstract

Keywords

low-temperature plasma / difficult-to-cut material / machinability / hydrophilization effect / Rehbinder effect

References

[1] Bai H Q , Zhong L S , Kang L , Liu J B , Zhuang W J , Lv Z L , Xu Y H . A review on wear-resistant coating with high hardness and high toughness on the surface of titanium alloy. Journal of Alloys and Compounds, 2021, 882: 160645

[2] Heimann R B . Silicon nitride, a close to ideal ceramic material for medical application. Ceramics, 2021, 4(2): 208–223

[3] Balbus G H , Kappacher J , Sprouster D J , Wang F L , Shin J , Eggeler Y M , Rupert T J , Trelewicz J R , Kiener D , Maier-Kiener V , Gianola D S . Disordered interfaces enable high temperature thermal stability and strength in a nanocrystalline aluminum alloy. Acta Materialia, 2021, 215: 116973

[4] Pollock T M . Alloy design for aircraft engines. Nature Materials, 2016, 15(8): 809–815

[5] Veiga C , Davim J P , Loureiro A J R . Review on machinability of titanium alloys: the process perspective. Reviews on Advanced Materials Science, 2013, 34(2): 148–164

[6] Davim J P. Mechanical and Industrial Engineering: Historical Aspects and Future Directions. Cham: Springer, 2022

[7] Davim J P. Machining of Titanium Alloys. Heidelberg: Springer, 2014

[8] Ma D X . Novel casting processes for single-crystal turbine blades of superalloys. Frontiers of Mechanical Engineering, 2018, 13(1): 3–16

[9] Khanna N , Davim J P . Design-of-experiments application in machining titanium alloys for aerospace structural components. Measurement, 2015, 61: 280–290

[10] Hu D Y , Wang X Y , Mao J X , Wang R Q . Creep-fatigue crack growth behavior in GH4169 superalloy. Frontiers of Mechanical Engineering, 2019, 14(3): 369–376

[11] Wang X Y , Huang C Z , Zou B , Liu G L , Zhu H T , Wang J . Experimental study of surface integrity and fatigue life in the face milling of Inconel 718. Frontiers of Mechanical Engineering, 2018, 13(2): 243–250

[12] Sun T , Qin L F , Hou J M , Fu Y C . Machinability of damage-tolerant titanium alloy in orthogonal turn-milling. Frontiers of Mechanical Engineering, 2020, 15(3): 504–515

[13] Pimenov D Y , Mia M , Gupta M K , Machado A R , Tomaz Í V , Sarikaya M , Wojciechowski S , Mikolajczyk T , Kapłonek W . Improvement of machinability of Ti and its alloys using cooling-lubrication techniques: a review and future prospect. Journal of Materials Research and Technology, 2021, 11: 719–753

[14] Li G X , Chandra S , Rahman Rashid R A , Palanisamy S , Ding S L . Machinability of additively manufactured titanium alloys: a comprehensive review. Journal of Manufacturing Processes, 2022, 75: 72–99

[15] Sarikaya M , Gupta M K , Tomaz I , Danish M , Mia M , Rubaiee S , Jamil M , Pimenov D Y , Khanna N . Cooling techniques to improve the machinability and sustainability of light-weight alloys: a state-of-the-art review. Journal of Manufacturing Processes, 2021, 62: 179–201

[16] Davim J P. Machining: Fundamentals and Recent Advances. London: Springer, 2008

[17] Lauro C H , Filho S L M R , Brandão L C , Davim J P . Analysis of behaviour biocompatible titanium alloy (Ti‒6Al‒7Nb) in the micro-cutting. Measurement, 2016, 93: 529–540

[18] Davim J P. Nontraditional Machining Processes: Research Advances. London: Springer, 2013

[19] Yao Z Q , Fan C , Zhang Z , Zhang D H , Luo M . Position-varying surface roughness prediction method considering compensated acceleration in milling of thin-walled workpiece. Frontiers of Mechanical Engineering, 2021, 16(4): 855–867

[20] Vijaya Ganesa Velan M , Subha Shree M , Muthuswamy P . Effect of cutting parameters and high-pressure coolant on forces, surface roughness and tool life in turning AISI 1045 steel. Materials Today: Proceedings, 2021, 43: 482–489

[21] Díaz-Álvarez A , Díaz-Álvarez J , Cantero J L , Miguélez M H . High-pressure cooling in finishing turning of Haynes 282 using carbide tools: Haynes 282 and Inconel 718 comparison. Metals, 2021, 11(12): 1916

[22] Ayed Y, Germain G. High-pressure water-jet-assisted machining of Ti555-3 titanium alloy: investigation of tool wear mechanisms. The International Journal of Advanced Manufacturing Technology, 2018, 96(1–4): 845–856

[23] Wang F B , Wang Y Q . Comparison of cryogenic cooling strategy effects on machinability of milling nickel-based alloy. Journal of Manufacturing Processes, 2021, 66: 623–635

[24] Gupta M K , Song Q H , Liu Z Q , Sarikaya M , Mia M , Jamil M , Singla A K , Bansal A , Pimenov D Y , Kuntoğlu M . Tribological performance based machinability investigations in cryogenic cooling assisted turning of α-β titanium alloy. Tribology International, 2021, 160: 107032

[25] Tu L Q , Chen J , An Q L , Ming W , Xu J Y , Chen M , Lin L , Yang Z M . Machinability improvement of compacted graphite irons in milling process with supercritical CO₂-based MQL. Journal of Manufacturing Processes, 2021, 68: 154–168

[26] Yu W , Chen J , Ming W , An Q L , Chen M . Feasibility of supercritical CO₂-based minimum quantity lubrication to improve the surface integrity of 50% Sip/Al composites. Journal of Manufacturing Processes, 2022, 73: 364–374

[27] Dang J Q , Zang H , An Q L , Ming W , Chen M . Feasibility study of creep feed grinding of 300M steel with zirconium corundum wheel. Chinese Journal of Aeronautics, 2022, 35(3): 565–578

[28] Dang J Q , Zhang H , An Q L , Ming W , Chen M . On the microstructural evolution pattern of 300M steel subjected to surface cryogenic grinding treatment. Journal of Manufacturing Processes, 2021, 68: 169–185

[29] Zou F , Zhong B F , Zhang H , An Q L , Chen M . Machinability and surface quality during milling CFRP laminates under dry and supercritical CO₂-based cryogenic conditions. International Journal of Precision Engineering and Manufacturing—Green Technology, 2022, 9(3): 765–781

[30] An Q L , Cai C Y , Zou F , Liang X , Chen M . Tool wear and machined surface characteristics in side milling Ti6Al4V under dry and supercritical CO₂ with MQL conditions. Tribology International, 2020, 151: 106511

[31] Dang J Q , Zhang H , An Q L , Ming W , Chen M . Surface modification of ultrahigh strength 300M steel under supercritical carbon dioxide (scCO₂)-assisted grinding process. Journal of Manufacturing Processes, 2021, 61: 1–14

[32] Liu M Z , Li C H , Zhang Y B , An Q L , Yang M , Gao T , Mao C , Liu B , Cao H J , Xu X F , Said Z , Debnath S , Jamil M , Ali H M , Sharma S . Cryogenic minimum quantity lubrication machining: from mechanism to application. Frontiers of Mechanical Engineering, 2021, 16(4): 649–697

[33] Wang X M, Li C H, Zhang Y B, Said Z, Debnath S, Sharma S, Yang M, Gao T. Influence of texture shape and arrangement on nanofluid minimum quantity lubrication turning. The International Journal of Advanced Manufacturing Technology, 2022, 119(1–2): 631–646

[34] Yang M , Li C H , Zhang Y B , Jia D Z , Zhang X P , Hou Y L , Li R Z , Wang J . Maximum undeformed equivalent chip thickness for ductile-brittle transition of zirconia ceramics under different lubrication conditions. International Journal of Machine Tools and Manufacture, 2017, 122: 55–65

[35] Guo S M , Li C H , Zhang Y B , Wang Y G , Li B K , Yang M , Zhang X P , Liu G T . Experimental evaluation of the lubrication performance of mixtures of castor oil with other vegetable oils in MQL grinding of nickel-based alloy. Journal of Cleaner Production, 2017, 140: 1060–1076

[36] Gupta M K , Boy M , Korkmaz M E , Yaşar N , Günay M , Krolczyk G M . Measurement and analysis of machining induced tribological characteristics in dual jet minimum quantity lubrication assisted turning of duplex stainless steel. Measurement, 2022, 187: 110353

[37] Wang Y D , Kang R K , Qin Y , Meng Q , Dong Z G . Effects of inclination angles of disc cutter on machining quality of Nomex honeycomb core in ultrasonic cutting. Frontiers of Mechanical Engineering, 2021, 16(2): 285–297

[38] Zhou W H , Tang J Y , Shao W . Modelling of surface texture and parameters matching considering the interaction of multiple rotation cycles in ultrasonic assisted grinding. International Journal of Mechanical Sciences, 2020, 166: 105246

[39] Bhaduri D , Soo S L , Aspinwall D K , Novovic D , Bohr S , Harden P , Webster J A . Ultrasonic assisted creep feed grinding of gamma titanium aluminide using conventional and superabrasive wheels. CIRP Annals-Manufacturing Technology, 2017, 66(1): 341–344

[40] Bourrianne P , Lv C J , Quéré D . The cold Leidenfrost regime. Science Advances, 2019, 5(6): eaaw0304

[41] Quéré D . Leidenfrost dynamics. Annual Review of Fluid Mechanics, 2013, 45(1): 197–215

[42] Alagan N T, Hoier P, Beno T, Klement U, Wretland A. Coolant boiling and cavitation wear—a new tool wear mechanism on WC tools in machining alloy 718 with high-pressure coolant. Wear, 2020, 452–453: 203284

[43] Levchenko I , Xu S Y , Baranov O , Bazaka O , Ivanova E , Bazaka K . Plasma and polymers: recent progress and trends. Molecules, 2021, 26(13): 4091

[44] Huang Y W , Yu Q F , Li M , Sun S N , Zhao H , Jin S X , Fan J , Wang J G . An overview of low-temperature plasma surface modification of carbon materials for removal of pollutants from liquid and gas phases. Plasma Processes and Polymers, 2021, 18(3): 2000171

[45] Vajpayee M , Singh M , Ledwani L . Non-thermal plasma treatment of cellulosic biopolymer to enhance its surface property for various applications: a review. Materials Today: Proceedings, 2021, 43: 3250–3255

[46] Khani S , Farahnakian M , Razfar M R . Experimental study on hybrid cryogenic and plasma-enhanced turning of 17-4PH stainless steel. Materials and Manufacturing Processes, 2015, 30(7): 868–874

[47] Katahira K , Ohmori H , Takesue S , Komotori J , Yamazaki K . Effect of atmospheric-pressure plasma jet on polycrystalline diamond micro-milling of silicon carbide. CIRP Annals-Manufacturing Technology, 2015, 64(1): 129–132

[48] Rao T B . Reliability analysis of the cutting tool in plasma-assisted turning and prediction of machining characteristics. Australian Journal of Mechanical Engineering, 2022, 20(4): 1020–1034

[49] López de Lacalle L N , Sánchez J A , Lamikiz A , Celaya A . Plasma-assisted milling of heat-resistant superalloys. Journal of Manufacturing Science and Engineering, 2004, 126(2): 274–285

[50] Lee Y , Lee C . A study on optimal machining conditions and energy efficiency in plasma-assisted machining of Ti‒6Al‒4V. Materials, 2019, 12(16): 2590

[51] Di L B , Zhang J S , Zhang X L , Wang H Y , Li H , Li Y Q , Bu D C . Cold plasma treatment of catalytic materials: a review. Journal of Physics D: Applied Physics, 2021, 54(33): 333001

[52] Rehbinder P . New physico-chemical phenomena in the deformation and mechanical treatment of solids. Nature, 1947, 159(4052): 866–867

[53] Chaudhari A , Soh Z Y , Wang H , Kumar A S . Rehbinder effect in ultraprecision machining of ductile materials. International Journal of Machine Tools and Manufacture, 2018, 133: 47–60

[54] Yin Q A , Liu Z Q , Wang B . Machinability improvement of Inconel 718 through mechanochemical and heat transfer effects of coated surface-active thermal conductive mediums. Journal of Alloys and Compounds, 2021, 876: 160186

[55] Herrera-Jimenez E J , Bousser E , Schmitt T , Klemberg-Sapieha J E , Martinu L . Effect of plasma interface treatment on the microstructure, residual stress profile, and mechanical properties of PVD TiN coatings on Ti‒6Al‒4V substrates. Surface and Coatings Technology, 2021, 413: 127058

[56] Deng Y , Chen W L , Li B X , Wang C Y , Kuang T C , Li Y Q . Physical vapor deposition technology for coated cutting tools: a review. Ceramics International, 2020, 46(11): 18373–18390

[57] Meng X F , Zhang K D , Guo X H , Wang C D , Sun L N . Preparation of micro-textures on cemented carbide substrate surface by plasma-assisted laser machining to enhance the PVD tool coatings adhesion. Journal of Materials Processing Technology, 2021, 288: 116870

[58] Martinez M A , Abenojar J , Lopez De Armentia S . Environmentally friendly plasma activation of acrylonitrile-butadiene-styrene and polydimethylsiloxane surfaces to improve paint adhesion. Coatings, 2018, 8(12): 428

[59] Godec M , Donik Č , Kocijan A , Podgornik B , Skobir Balantič D A . Effect of post-treated low-temperature plasma nitriding on the wear and corrosion resistance of 316L stainless steel manufactured by laser powder-bed fusion. Additive Manufacturing, 2020, 32: 101000

[60] Kaseem M , Choe H C . Simultaneous improvement of corrosion resistance and bioactivity of a titanium alloy via wet and dry plasma treatments. Journal of Alloys and Compounds, 2021, 851: 156840

[61] Madhavulu G, Ahmed B. Hot machining process for improved metal removal rates in turning operations. Journal of Materials Processing Technology, 1994, 44(3–4): 199–206

[62] Kitagawa T , Maekawa K , Kubo A . Plasma hot machining for high hardness metals. Bulletin of the Japan Society of Precision Engineering, 1988, 22(2): 145–151

[63] Moon S H, Lee C M. A study on the machining characteristics using plasma-assisted machining of AISI 1045 steel and Inconel 718. International Journal of Mechanical Sciences, 2018, 142–143: 595–602

[64] Wang Z Y , Rajurkar K P , Fan J , Lei S , Shin Y C , Petrescu G . Hybrid machining of Inconel 718. International Journal of Machine Tools and Manufacture, 2003, 43(13): 1391–1396

[65] Feyzi T, Safavi S M. Improving machinability of Inconel 718 with a new hybrid machining technique. The International Journal of Advanced Manufacturing Technology, 2013, 66(5–8): 1025–1030

[66] Leshock C E , Kim J N , Shin Y C . Plasma enhanced machining of Inconel 718: modeling of workpiece temperature with plasma heating and experimental results. International Journal of Machine Tools and Manufacture, 2001, 41(6): 877–897

[67] Shao-Hsien C , Tsai K T . Predictive analysis for the thermal diffusion of the plasma-assisted machining of superalloy Inconel-718 based on exponential smoothing. Advances in Materials Science and Engineering, 2018, 2018: 9532394

[68] Farahnakian M , Razfar M R . Experimental study on hybrid ultrasonic and plasma aided turning of hardened steel AISI 4140. Materials and Manufacturing Processes, 2014, 29(5): 550–556

[69] Sun S , Brandt M , Dargusch M S . Thermally enhanced machining of hard-to-machine materials—a review. International Journal of Machine Tools and Manufacture, 2010, 50(8): 663–680

[70] Fitriani S W , Ikeda S , Tani M , Yajima H , Furuta H , Hatta A . Hydrophilization of polytetrafluoroethylene using an atmospheric-pressure plasma of argon gas with water–ethanol vapor. Materials Chemistry and Physics, 2022, 282: 125974

[71] Dufour T , Gutierrez Q . Cold plasma treatment of seeds: deciphering the role of contact surfaces through multiple exposures, randomizing and stirring. Journal of Physics D: Applied Physics, 2021, 54(50): 505202

[72] Dufour T , Gutierrez Q , Bailly C . Sustainable improvement of seeds vigor using dry atmospheric plasma priming: evidence through coating wettability, water uptake, and plasma reactive chemistry. Journal of Applied Physics, 2021, 129(8): 084902

[73] Oehr C , Hegemann D , Liehr M , Wohlfart P . Cost structure and resource efficiency of plasma processes. Plasma Processes and Polymers, 2022, 19(10): 2200022

[74] Chiper A S . Tailoring the working gas flow to improve the surface modification of plasma-treated polymers. Materials Letters, 2021, 305: 130832

[75] Dvořáková H , Čech J , Stupavská M , Prokeš L , Jurmanová J , Buršíková V , Ráheľ J , Sťahel P . Fast surface hydrophilization via atmospheric pressure plasma polymerization for biological and technical applications. Polymers, 2019, 11(10): 1613

[76] Liu J Y , Song J L , Wang G S , Chen F Z , Liu S , Yang X L , Sun J , Zheng H X , Huang L , Jin Z J , Liu X . Maskless hydrophilic patterning of the superhydrophobic aluminum surface by an atmospheric pressure microplasma jet for water adhesion controlling. ACS Applied Materials & Interfaces, 2018, 10(8): 7497–7503

[77] Thompson R , Austin D , Wang C , Neville A , Lin L . Low-frequency plasma activation of nylon 6. Applied Surface Science, 2021, 544: 148929

[78] Jang H J , Jung E Y , Parsons T , Tae H , Park C . A review of plasma synthesis methods for polymer films and nanoparticles under atmospheric pressure conditions. Polymers, 2021, 13(14): 2267

[79] Huang S , Yin S H , Chen F J , Luo H , Tang Q C , Song J L . Directional transport of droplets on wettability patterns at high temperature. Applied Surface Science, 2018, 428: 432–438

[80] Chen X D , Qiu H H . Bubble dynamics and heat transfer on a wettability patterned surface. International Journal of Heat and Mass Transfer, 2015, 88: 544–551

[81] Qiu Y H, Liu Z H. The theoretical simulation of the effect of solid-liquid contact angle on the critical heat flux of saturated water jet boiling on stagnation zone. International Journal of Heat and Mass Transfer, 2010, 53(9–10): 1921–1926

[82] Takata Y, Hidaka S, Cao J M, Nakamura T, Yamamoto H, Masuda M, Ito T. Effect of surface wettability on boiling and evaporation. Energy, 2005, 30(2–4): 209–220

[83] Chen R K , Lu M C , Srinivasan V , Wang Z J , Cho H H , Majumdar A . Nanowires for enhanced boiling heat transfer. Nano Letters, 2009, 9(2): 548–553

[84] Yamamura K , Takiguchi T , Ueda M , Deng H , Hattori A N , Zettsu N . Plasma-assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface. CIRP Annals-Manufacturing Technology, 2011, 60(1): 571–574

[85] Liu J Y, Song J L, Chen Y, Zhang J C, Wu L B, Wang G S, Zhang F, Liu Z A, Sun J, Liu S, Liu X, Jin Z J, Zhao D Y. Atmospheric pressure cold plasma jet-assisted micro-milling TC4 titanium alloy. The International Journal of Advanced Manufacturing Technology, 2021, 112(7–8): 2201–2209

[86] Xu W J , Huang S , Chen F Z , Song J L , Liu X . Diamond wear properties in cold plasma jet. Diamond and Related Materials, 2014, 48: 96–103

[87] Liu X , Chen F Z , Huang S , Yang X L , Lu Y , Zhou W L , Xu W J . Characteristic and application study of cold atmospheric-pressure nitrogen plasma jet. IEEE Transactions on Plasma Science, 2015, 43(6): 1959–1968

[88] Chen F Z , Liu S , Liu J Y , Huang S , Xia G Q , Song J L , Xu W J , Sun J , Liu X . Surface modification of tube inner wall by transferred atmospheric pressure plasma. Applied Surface Science, 2016, 389: 967–976

[89] Deng H , Monna K , Tabata T , Endo K , Yamamura K . Optimization of the plasma oxidation and abrasive polishing processes in plasma-assisted polishing for highly effective planarization of 4H-SiC. CIRP Annals-Manufacturing Technology, 2014, 63(1): 529–532

[90] Deng H , Yamamura K . Atomic-scale flattening mechanism of 4H-SiC (0001) in plasma-assisted polishing. CIRP Annals-Manufacturing Technology, 2013, 62(1): 575–578

[91] Deng H , Yamamura K . Smoothing of reaction sintered silicon carbide using plasma-assisted polishing. Current Applied Physics, 2012, 12: S24–S28

[92] Deng H, Ueda M, Yamamura K. Characterization of 4H-SiC (0001) surface processed by plasma-assisted polishing. The International Journal of Advanced Manufacturing Technology, 2014, 72(1–4): 1–7

[93] Yamamura K, Takiguchi T, Ueda M, Hattori A N, Zettsu N. High-integrity finishing of 4H-SiC (0001) by plasma-assisted polishing. Advanced Materials Research, 2010, 126–128: 423–428

[94] Deng H , Ueda M , Yamamura K . Chemical and morphological analysis of 4H-SiC surface processed by plasma-assisted polishing. Key Engineering Materials, 2012, 516: 186–191

[95] Sun R Y , Yang X , Arima K , Kawai K , Yamamura K . High-quality plasma-assisted polishing of aluminum nitride ceramic. CIRP Annals-Manufacturing Technology, 2020, 69(1): 301–304

[96] Sun R Y , Nozoe A , Nagahashi J , Arima K , Kawai K , Yamamura K . Novel highly-efficient and dress-free polishing technique with plasma-assisted surface modification and dressing. Precision Engineering, 2021, 72: 224–236

[97] Deng H , Endo K , Yamamura K . Plasma-assisted polishing of gallium nitride to obtain a pit-free and atomically flat surface. CIRP Annals-Manufacturing Technology, 2015, 64(1): 531–534

[98] Yamamura K , Emori K , Sun R , Ohkubo Y , Endo K , Yamada H , Chayahara A , Mokuno Y . Damage-free highly efficient polishing of single-crystal diamond wafer by plasma-assisted polishing. CIRP Annals-Manufacturing Technology, 2018, 67(1): 353–356

[99] Luo H , Ajmal K M , Liu W , Yamamura K , Deng H . Atomic-scale and damage-free polishing of single crystal diamond enhanced by atmospheric pressure inductively coupled plasma. Carbon, 2021, 182: 175–184

[100] Liu N , Sugawara K , Yoshitaka N , Yamada H , Takeuchi D , Akabane Y , Fujino K , Kawai K , Arima K , Yamamura K . Damage-free highly efficient plasma-assisted polishing of a 20-mm square large mosaic single crystal diamond substrate. Scientific Reports, 2020, 10(1): 19432

[101] Liu N , Sugimoto K , Yoshitaka N , Yamada H , Sun R Y , Kawai K , Arima K , Yamamura K . Effects of polishing pressure and sliding speed on the material removal mechanism of single crystal diamond in plasma-assisted polishing. Diamond and Related Materials, 2022, 124: 108899

[102] Bastawros A F , Chandra A , Poosarla P A . Atmospheric pressure plasma enabled polishing of single crystal sapphire. CIRP Annals-Manufacturing Technology, 2015, 64(1): 515–518

[103] Lyu P , Lai M , Liu Z , Fang F Z . Damage-free finishing of Lu₂O₃ by combining plasma-assisted etching and low-pressure polishing. CIRP Annals-Manufacturing Technology, 2022, 71(1): 169–172

[104] Koinuma H , Ohkubo H , Hashimoto T , Inomata K , Shiraishi T , Miyanaga A , Hayashi S . Development and application of a microbeam plasma generator. Applied Physics Letters, 1992, 60(7): 816–817

[105] Liu L J , Zhang Y , Tian W J , Meng Y , Ouyang J T . Electrical characteristics and formation mechanism of atmospheric pressure plasma jet. Applied Physics Letters, 2014, 104(24): 244108

[106] Algwari Q T , O’Connell D . Electron dynamics and plasma jet formation in a helium atmospheric pressure dielectric barrier discharge jet. Applied Physics Letters, 2011, 99(12): 121501

[107] Shao X J , Jiang N , Zhang G J , Cao Z X . Comparative study on the atmospheric pressure plasma jets of helium and argon. Applied Physics Letters, 2012, 101(25): 253509

[108] Matsusaka S . Control of particle charge by atmospheric pressure plasma jet (APPJ): a review. Advanced Powder Technology, 2019, 30(12): 2851–2858

[109] Cheng H , Liu X , Lu X P , Liu D W . Numerical study on propagation mechanism and bio-medicine applications of plasma jet. High Voltage, 2016, 1(2): 62–73

[110] Jiang N , Ji A L , Cao Z X . Atmospheric pressure plasma jet: effect of electrode configuration, discharge behavior, and its formation mechanism. Journal of Applied Physics, 2009, 106(1): 013308

[111] Latham J , Belova E V , Yamada M . Numerical study of coronal plasma jet formation. Physics of Plasmas, 2021, 28(1): 012901

[112] Yu N, Yang Y N, Jourdain R, Gourma M, Bennett A, Fang F Z. Design and optimization of plasma jet nozzles based on computational fluid dynamics. The International Journal of Advanced Manufacturing Technology, 2020, 108(7–8): 2559–2568

[113] Takemura Y , Kubota Y , Yamaguchi N , Hara T . Development of atmospheric plasma jet with long flame. IEEE Transactions on Plasma Science, 2009, 37(8): 1604–1606

[114] Johnson M J , Boris D R , Petrova T B , Walton S G . Characterization of a compact, low-cost atmospheric-pressure plasma jet driven by a piezoelectric transformer. IEEE Transactions on Plasma Science, 2019, 47(1): 434–444

[115] Zhu P , Li B , Duan Z C , Ouyang J T . Development from dielectric barrier discharge to atmospheric pressure plasma jet in helium: experiment and fluid modeling. Journal of Physics D: Applied Physics, 2018, 51(40): 405202

[116] Liu W Z , Zheng Q T , Hu M C , Zhao L X , Li Z Y . Study of generation characteristics of glow-type atmospheric-pressure plasma jet based on DC discharge in air. Plasma Science & Technology, 2019, 21(12): 125404

[117] Srakaew K , Chingsungnoen A , Sutthisa W , Lakhonchai A , Poolcharuansin P , Chunpeng P , Rojviriya C , Thumanu K , Tunmee S . Development of a multihole atmospheric plasma jet for growth rate enhancement of broccoli seeds. Processes, 2021, 9(7): 1134

[118] Fu W J , Zhang C Y , Nie C , Li X Y , Yan Y . A high efficiency low-temperature microwave-driven atmospheric pressure plasma jet. Applied Physics Letters, 2019, 114(25): 254106

[119] Liu X. Basic research on mechanism and application of ionized gas jet assisted cutting. Dissertation for the Doctoral Degree. Dalian: Dalian University of Technology, 2012, 131–134 (in Chinese)

[120] Xu W J , Liu X , Song J L , Wu L B , Sun J . Friction and wear properties of Ti6Al4V/WC-Co in cold atmospheric plasma jet. Applied Surface Science, 2012, 259: 616–623

[121] Huang S, Liu X, Chen F Z, Zheng H X, Yang X L, Wu L B, Song J L, Xu W J. Diamond-cutting ferrous metals assisted by cold plasma and ultrasonic elliptical vibration. The International Journal of Advanced Manufacturing Technology, 2016, 85(1–4): 673–681

[122] Tang Q C , Yin S H , Chen F J , Huang S , Luo H . New technology for cutting ferrous metal with diamond tools. Diamond and Related Materials, 2018, 88: 32–42

[123] Liu X, Zhang F, Liu J Y, Zhang J C, Chen Y, Zhang Z T, Shen H Y, Kong J X, Sun J. Atmospheric pressure plasma-assisted precision turning of pure iron material. The International Journal of Advanced Manufacturing Technology, 2020, 106(11–12): 5187–5197

[124] Liu J Y, Chen Y, Zhang J C, Wu L B, Yang Z K, Zhang F, Sun J, Liu X, Jin Z J, Zhao D Y. Atmospheric pressure plasma jet and minimum quantity lubrication assisted micro-grinding of quenched GCr15. The International Journal of Advanced Manufacturing Technology, 2020, 106(1–2): 191–199

[125] Mustafa G, Liu J Y, Zhang F, Wang G S, Yang Z K, Harris M, Liu S, Liu X, Jin Z J, Sun J. Atmospheric pressure plasma jet assisted micro-milling of Inconel 718. The International Journal of Advanced Manufacturing Technology, 2019, 103(9–12): 4681–4687

Nomenclature

CPAC	Cold plasma-assisted cutting
CPAM	Cold plasma-assisted machining
CPAP	Cold plasma-assisted polishing
CRT	Cryogenic liquid nitrogen turning
CT	Conventional turning
DPM	Dew-point meter
HF	Hydrofluoric acid
HPAM	Hot plasma-assisted machining
HYT	Hybrid turning
MFC	Micro flow controller
MQL	Minimum quantity lubrication
PCD	Polycrystalline diamond
PET	Plasma-enhanced turning
RF	Radio frequency
RMS	Root mean square
UPW	Ultrapure water

Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grant No. 51975092) and the Fundamental Research Funds for the Central Universities, China (Grant No. DUT19ZD202). The authors sincerely thank the researchers and original publishers for granting permission to use the figures included in this paper.

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