Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Abstract

Soft-brittle crystal materials are widely used in many fields, especially optics and microelectronics. However, these materials are difficult to machine through traditional machining methods because of their brittle, soft, and anisotropic nature. In this article, the characteristics and machining difficulties of soft-brittle and crystals are presented. Moreover, the latest research progress of novel machining technologies and their applications for soft-brittle crystals are introduced by using some representative materials (e.g., potassium dihydrogen phosphate (KDP), cadmium zinc telluride (CZT)) as examples. This article reviews the research progress of soft-brittle crystals processing.

Keywords

brittle / soft / functional crystal / ultra-precision machining

References

[1] Yukhnevich T V, Voloshinov V B. Photoelastic and acousto-optic properties of KDP crystal applied in wide angle tunable filters. Physics Procedia, 2015, 70: 745–748

[2] Dekemper E, Vanhamel J, Van Opstal B, Influence of driving power on the performance of UV KDP-based acousto-optical tunable filters. Journal of Optics, 2015, 17(7): 75404–75412

[3] Moses E I. Advances in inertial confinement fusion at the National Ignition Facility (NIF). Fusion Engineering and Design, 2010, 85(7–9): 983–986

[4] Martyniuk M, Sewell R H, Musca C A, Nanoindentation of HgCdTe prepared by molecular beam epitaxy. Applied Physics Letters, 2005, 87(25): 251905

[5] Bolotnikov A E, Camarda G S, Chen E, CdZnTe position-sensitive drift detectors with thicknesses up to 5 cm. Applied Physics Letters, 2016, 108(9): 093504

[6] Beikahmadi M, Mirabbasi S, Iniewski K K. Design and analysis of a low-power readout circuit for CdZnTe detectors in 0.13-CMOS. IEEE Sensors Journal, 2016, 16(4): 903–911

[7] MacKenzie J, Kumar F J, Chen H. Advancements in THM-grown CdZnTe for use as substrates for HgCdTe. Journal of Electronic Materials, 2013, 42(11): 3129–3132

[8] Tanaka H, Kawaguchi N, Abe N, Crystal growth and scintillation properties of Nd: CaF₂. Optical Materials, 2011, 33(3): 284–287

[9] Snetkov I L, Yakovlev A I, Palashov O V. CaF₂, BaF₂ and SrF₂ crystals’ optical anisotropy parameters. Laser Physics Letters, 2015, 12(9): 095001

[10] Sun F, Zhang P, Lu L, The effect of air flow on the temperature distribution and the harmonic conversion efficiency of the ADP crystal with large aperture in the temperature control scheme. Optics & Laser Technology, 2016, 77: 126–133

[11] Campbell J H, Hawley-Fedder R A, Stolz C J, NIF optical materials and fabrication technologies: An overview. Proceedings of the Society for Photo-Instrumentation Engineers, 2004, 5341: 84–101

[12] Koziejowska A, Sangwal K. Surface micromorphology and dissolution kinetics of potassium dihydrogen phosphate (KDP) crystals in undersaturated aqueous solutions. Journal of Materials Science, 1988, 23(8): 2989–2994

[13] Xu D, Xue D, Ratajczak H. Morphology and structure studies of KDP and ADP crystallites in the water and ethanol solutions. Journal of Molecular Structure, 2005, 740(1–3): 37–45

[14] Gao H, Wang X, Teng X, Micro water dissolution machining principle and its application in ultra-precision processing of KDP optical crystal. Science China. Technological Sciences, 2015, 58(11): 1877–1883

[15] Teng X, Gao H, Wang X, Experimental study on precision sawing of KDP crystal with diamond wire saw assisted with water dissolution. Journal of Synthetic Crystals, 2015, 44(06): 1438–1442 (in Chinese)

[16] Deng L, Duan J, Zeng X, A study on dual laser beam separation technology of KDP crystal. International Journal of Machine Tools & Manufacture, 2013, 72: 1–10

[17] Deng L, Yang H, Zeng X, Study on mechanics and key technologies of laser nondestructive mirror-separation for KDP crystal. International Journal of Machine Tools & Manufacture, 2015, 94: 26–36

[18] Fuchs B A, Hed P P, Baker P C. Fine diamond turning of KDP crystals. Applied Optics, 1986, 25(11): 1733–1735

[19] Kozlowski M R, Thomas I M, Edwards G J, Influence of diamond turning and surface cleaning processes on the degradation of KDP crystal surfaces. Proceedings of the Society for Photo-Instrumentation Engineers, 1991, 1561: 59–69

[20] An C, Zhang Y, Xu Q, Modeling of dynamic characteristic of the aerostatic bearing spindle in an ultra-precision fly cutting machine. International Journal of Machine Tools & Manufacture, 2010, 50(4): 374–385

[21] Liang Y, Chen W, Bai Q, Design and dynamic optimization of an ultraprecision diamond fly cutting machine tool for large KDP crystal machining. International Journal of Advanced Manufacturing Technology, 2013, 69(1–4): 237–244

[22] Liang Y, Chen W, Sun Y, Dynamic design approach of an ultra-precision machine tool used for optical parts machining. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2012, 226(11): 1930–1936

[23] Chen W, Liang Y, Sun Y, Design philosophy of an ultra-precision fly cutting machine tool for KDP crystal machining and its implementation on the structure design. International Journal of Advanced Manufacturing Technology, 2014, 70(1–4): 429–438

[24] Wang J, Meng Q, Chen M, Study on the surface degenerative layer in ultra-precision machining of KDP crystals. In: Proceedings of 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. 2009, 72823U

[25] Wang J, Guo X, Meng Q, Influence on the profile accuracy in diamond turning of KDP crystal in vacuum chuck. Journal of Jiamusi University (Natural Science Edition), 2009(01): 1–3 (in Chinese)

[26] Chen H, Dai Y, Zheng Z, Effect of crystallographic orientation on cutting forces and surface finish in ductile cutting of KDP crystals. Machining Science and Technology, 2011, 15(2): 231–242

[27] Tie G, Dai Y, Guan C, Research on full-aperture ductile cutting of KDP crystals using spiral turning technique. Journal of Materials Processing Technology, 2013, 213(12): 2137–2144

[28] Wang S, An C, Zhang F, An experimental and theoretical investigation on the brittle ductile transition and cutting force anisotropy in cutting KDP crystal. International Journal of Machine Tools & Manufacture, 2016, 106: 98–108

[29] Chen M, Xiao G, Li D, Multiscale modeling study on the nanometric cutting process of CaF₂. Key Engineering Materials, 2012, 516: 13–18

[30] Zong W, Cao Z, He C, Theoretical modelling and FE simulation on the oblique diamond turning of ZnS crystal. International Journal of Machine Tools & Manufacture, 2016, 100: 55–71

[31] Chen M, Pang Q, Wang J, Analysis of 3D microtopography in machined KDP crystal surfaces based on fractal and wavelet methods. International Journal of Machine Tools & Manufacture, 2008, 48(7–8): 905–913

[32] Tie G, Dai Y, Guan C, Research on subsurface defects of potassium dihydrogen phosphate crystals fabricated by single point diamond turning technique. Optical Engineering, 2013, 52(3): 033401

[33] Chen M, Li M, Cheng J, Study on the optical performance and characterization method of texture on KH₂PO₄ surface processed by single point diamond turning. Applied Surface Science, 2013, 279: 233–244

[34] Li M, Chen M, Cheng J, Two important mechanisms damaging KH₂PO₄ crystal processed by ultraprecision fly cutting and their relationships with cutting parameters. Applied Optics, 2013, 52(15): 3451–3460

[35] Namba Y, Yoshida K, Yoshida H, Ultraprecision grinding of optical materials for high-power lasers. Proceedings of the Society for Photo-Instrumentation Engineers, 1998, 320: 320–330

[36] Zhang Z, Wu Y, Huang H. New deformation mechanism of soft-brittle CdZnTe single crystals under nanogrinding. Scripta Materialia, 2010, 63(6): 621–624

[37] Wu Y, Huang H, Zou J. Transmission electron microscopy characterization of the deformation of CdZnTe single crystals induced by nanoscratching. Scripta Materialia, 2011, 65(6): 392–395

[38] Zhang Z, Meng Y, Guo D, Material removal mechanism of precision grinding of soft-brittle CdZnTe wafers. International Journal of Advanced Manufacturing Technology, 2010, 46(5–8): 563–569

[39] Li Y, Kang R, Gao H, Effect of mechanical anisotropy on grinding of CdZnTe wafers. Materials and Manufacturing Processes, 2010, 25(6): 412–417

[40] Kordonski W I, Golini D. Fundamentals of magnetorheological fluid utilization in high precision finishing. Journal of Intelligent Material Systems and Structures, 1999, 10(9): 683–689

[41] Jacobs S D, Golini D, Hsu Y, Magnetorheological finishing: A deterministic process for optics manufacturing. Proceedings of the Society for Photo-Instrumentation Engineers, 1995, 2576: 372–382

[42] Arrasmith S R, Kozhinova I A, Gregg L L, Details of the polishing spot in magnetorheological finishing (MRF). Proceedings of the Society for Photo-Instrumentation Engineers, 1999, 3782: 92–100

[43] Jacobs S D. Manipulating mechanics and chemistry in precision optics finishing. Science and Technology of Advanced Materials, 2007, 8(3): 153–157

[44] Ma Y, Li S, Peng X, Research on polishing KDP crystals with MRF. Aviation Precision Manufacturing Technology, 2007(04): 9–12 (in Chinese)

[45] Peng X, Jiao F, Chen H, Novel magnetorheological figuring of KDP crystal. Chinese Optics Letters, 2011, 10: 71–75

[46] Ji F, Xu M, Wang B, Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF). Applied Surface Science, 2015, 353: 723–727

[47] Li F, Xie X, Tie G, Research on temperature field of KDP crystal under ion beam cleaning. Applied Optics, 2016, 55(18): 4888–4894

[48] Wilson S R, Mcneil J R. Neutral ion beam figuring of large optical surfaces. Proceedings of the Society for Photo-Instrumentation Engineers, 1987, 818: 320–324

[49] Allen L, Keim R. An ion figuring system for large optic fabrication. Proceedings of the Society for Photo-Instrumentation Engineers, 1989, 1168: 33–50

[50] Chen S, Li S, Peng X, Research of polishing process to control the iron contamination on the magnetorheological finished KDP crystal surface. Applied Optics, 2015, 54(6): 1478–1484

[51] Yin G, Li S, Xie X, Ultra-precision process of CaF₂ single crystal. Proceedings of the Society for Photo-Instrumentation Engineers, 2014, 9281: 1–6

[52] Teng X. Deliquescent mechanisms and experimental study on machinability based on solution theory of KDP crystals. Dissertation for the Master’s Degree. Dalian: Dalian University of Technology, 2007, 35–37 (in Chinese)

[53] Menapace J A, Ehrmann P R, Bickel R C. Magnetorheological finishing (MRF) of potassium dihydrogen phosphate (KDP) crystals: Nonaqueous fluids development, optical finish, and laser damage performance at 1064 nm and 532 nm. Proceedings of the Society for Photo-Instrumentation Engineers, 2009, 7504: 750411–750414

[54] Zhang F, Guo S, Zhang Y, Effect of several processing parameters on material removal ratio in the deliquescent polishing of KDP crystals. In: Proceedings of 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. 2009, 728227

[55] Zhang F, Guo S, Zhang Y, Research on the material removal mechanism in deliquescent polishing of KDP crystals. Key Engineering Materials, 2009, 416: 487–491

[56] Gao H, Wang B, Guo D, Experimental study on abrasive-free polishing for KDP crystal. Journal of the Electrochemical Society, 2010, 157(9): H853–H856

[57] Wang B, Li Y, Gao H. Water-in-oil dispersion for KH₂PO₄ (KDP) crystal CMP. Journal of Dispersion Science and Technology, 2010, 31(12): 1611–1617

[58] Wang X, Gao H, Chen Y, A water dissolution method for removing micro-waviness caused by SPDT process on KDP crystals. International Journal of Advanced Manufacturing Technology, 2016, 85(5–8): 1347–1360

Acknowledgments

This work was funded by the National Natural Science Foundation of China (Grant No. 51135002) and Science Fund for Creative Research Groups (Grant No. 51321004). The authors are grateful to Professor Bi Zhang for proofreading the manuscript.

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