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Abstract
A novel piezoelectric (PZT) precision step rotary actuator was developed on the basis of PZT technology. It adopts the principle of bionics and works with an inside anchoring/loosening of the stator and a distortion structure of the uniformly distributed thin flexible hinge to solve problems such as ineffective anchoring/loosening, low step rotary frequency, small travel, poor resolution, low speed and unsteady output. The developed actuator is characterized by high frequency (30 Hz), high speed (380 μrad/s), large travel (>270º), high resolution (1 μrad/step), and work stability. It greatly improves the ability to drive the existing PZT step rotary actuator. The new actuator can be applied in the field of micromanipulation and precision engineering, including precision driving and positioning and optics engineering.
Keywords
mechanical engineering, piezoelectric element, step actuator, anchor/loosen, flexible hinge
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LIU Jianfang, YANG Zhigang, ZHAO Hongwei, CHENG Guangming.
Novel precision piezoelectric step rotary actuator.
Front. Mech. Eng., 2007, 2 (3) : 356-360 DOI:10.1007/s11465-007-0062-2
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A Correction to this paper has been published:
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This article has been retracted.Please see the Retraction Notice for more detail:
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