Experimental Study on the Piezoelectric Prestage Driver of Electrohydraulic Servo Valves

Abstract

A piezoelectric actuated prestage driver of hydraulic servo valves for the low-frequency response of electrohydraulic servo valve electromagnetic prestage driver was presented. The new driver was driven by piezoelectric multilayer actuators. The displacement of a piezoelectric multilayer actuator was amplified by a flexure-hinged amplifier based on the principles of triangle amplification. Static and dynamic characteristics were tested on the model machine. The characteristics of good linearity, high resolution, and high-frequency response were approved. The natural frequency reached 1.201 kHz using finite element analysis, and the practice measurement result was 1 kHz.