Research on Microelectromagnetic Relays

LI De-sheng, LIU Ben-dong

Front. Mech. Eng. ›› 2006, Vol. 1 ›› Issue (1) : 111-114.

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PDF(188 KB)
Front. Mech. Eng. ›› 2006, Vol. 1 ›› Issue (1) : 111-114. DOI: 10.1007/s11465-005-0013-8

Research on Microelectromagnetic Relays

  • LI De-sheng, LIU Ben-dong
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Abstract

A new microelectromagnetic relay is presented and fabricated based on micromachining technology, aiming at the miniaturization and high manufacturing efficiency of electromagnetic relays. This microrelay is composed of a lower magnetic circuit, a planar exciting coil, and an upper magnetic armature. A complete magnetic circuit is composed, and the ON  and OFF  states are controlled by the current of the exciting coil. The dimension of this microrelay is 5 mm ? 5 mm ? 0.4 mm. The fabrication process mainly includes lithography, sputtering, electroplating, etching, sacrifice-layer technology, etc. Electromagnetic force is calculated theoretically. The calculation results are used for the optimization design of the armature and the number of turns of the exciting coil. A microelectromagnetic relay is fabricated and the initial test results are given. The resistance of the exciting coil is about 300 Ω. The switch-on state resistance is about 1.7 Ω at an exciting current of about 50 mA.

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LI De-sheng, LIU Ben-dong. Research on Microelectromagnetic Relays. Front. Mech. Eng., 2006, 1(1): 111‒114 https://doi.org/10.1007/s11465-005-0013-8
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