Process simulation and economic analysis of reactor systems for perfluorinated compounds abatement without HF effluent

Abstract

New and efficient reactor systems were proposed to treat perfluorinated compounds via catalytic decomposition. One system has a single reactor (S-1), and another has a series of reactors (S-2). Both systems are capable of producing a valuable CaF₂ and eliminating toxic HF effluent and their feasibility was studied at various temperatures with a commercial process simulator, Aspen HYSYS^®. They are better than the conventional system, and S-2 is better than S-1 in terms of CaF₂ production, a required heat for the system, natural gas usage and CO₂ emissions in a boiler, and energy consumption. Based on process simulation results, preliminary economic analysis shows that cost savings of 12.37% and 13.55% were obtained in S-2 at 589.6 and 621.4 °C compared to S-1 at 700 and 750 °C, respectively, for the same amount of CaF₂ production.

Graphical abstract

Keywords

perfluorinated compounds (PFCs) / CF₄ / process simulation / economic analysis

References

[1] Gompel J V, Walling T. A new way to treat process exhaust to remove CF₄. Semiconductor International, 1977, 20(10): 95–100

[2] Tsai W T, Chem H P, Hsien W Y. A review of uses, environmental hazards and recovery/recycle technologies of perfluorocarbons (PFCs) emissions from the semiconductor manufacturing processes. Journal of Loss Prevention in the Process Industries, 2002, 15(2): 65–75

[3] Brown R S, Rossin J A, Thomas C J. Catalytic process for control of PFC emissions. Semiconductor International, 2001, 24(6): 209–215

[4] Takita Y, Morita C, Ninomiya M, Wakamatsu H, Nishiguchi H, Ishihara T. Catalytic decomposition of CF₄ over AlPO₄-based catalysts. Chemistry Letters, 1999, 28(5): 417–418

[5] Xu X F, Jeon J Y, Choi M H, Kim H Y, Choi W C, Park Y K. A strategy to protect Al₂O₃-based PFC decomposition catalyst from deactivation. Chemistry Letters, 2005, 34(3): 364–365

[6] Song J, Chung S, Kim M, Seo M, Lee Y, Lee K, Kim J. The catalytic decomposition of CF₄ over Ce/Al₂O₃ modified by a cerium sulfate precursor. Journal of Molecular Catalysis A Chemical, 2013, 370: 50–55

[7] Han W, Chen Y, Kin B, Liu H, Yu H. Catalytic hydrolysis of trifluoromethane over alumina. Greenhouse Gases. Science and Technology, 2014, 4(1): 121–130

[8] Park N, Park H, Lee T, Chang W, Kwon W. Hydrolysis and oxidation on supported phosphate catalyst for decomposition of SF₆. Catalysis Today, 2012, 185(1): 247–252

[9] Lee Y C, Jeon J K. A study on catalytic process in pilot plant for abatement of PFC emission. Cleanroom Technology, 2012, 18(2): 216–220

[10] Elkanzi E M. Simulation of the process of biological removal of hydrogen sulfide from gas. In: Proceedings of the 1st Annual Gas Processing Symposium, 2009, 1: 266–275

[11] Sunny A, Solomon P A, Aparna K. Syngas production from regasified liquefied natural gas and its simulation using Aspen HYSYS. Journal of Natural Gas Science and Engineering, 2016, 30: 176–181

[12] Kazemi A, Malayeri M, Gharibi kharaji A, Shariati A. Gharibi kharaji A, Shariati A. Feasibility study, simulation, and economical evaluation of natural gas sweetening processes – Part 1: A case study on a low capacity plant in iran. Journal of Natural Gas Science and Engineering, 2014, 20: 16–22

[13] Peters L, Hussain A, Follmann M, Melin T, Hagg M B. CO₂ removal from natural gas by employing amine absorption and membrane technology – A technical and economical analysis. Chemical Engineering Journal, 2011, 172(2-3): 952–960

[14] Ahmad F, Lau K K, Shariff A M, Murshid G. Process simulation and optimal design of membrane separation system for CO₂ capture from natural gas. Computers & Chemical Engineering, 2012, 36(10): 119–128

[15] Ploegmakers J, Jelsma A R T, van der Ham A G J, Nijmeijer K. Economic evaluation of membrane potential for ethylene/ethane separation in a retrofitted hybrid membrane-distillation plant using Unisim Design. Industrial & Engineering Chemistry Research, 2013, 52(19): 6524–6539

[16] Choi J, Park M, Kim J, Ko Y, Lee S, Baek I. Modelling and analysis of pre-combustion CO₂ capture with membranes. Korean Journal of Chemical Engineering, 2013, 30(6): 1187–1194

[17] Marchioro Y P A, Lakew A A, Bolland O. Integration of low-temperature transcritical CO₂ Rankine cycle in natural gas-fired combined cycle (NGCC) with post-combustion CO₂ capture. International Journal of Greenhouse Gas Control, 2013, 12: 213–219

[18] Park M, Kim E. Thermodynamic evaluation on the integrated system of VHTR and forward osmosis desalination process. Desalination, 2014, 337(17): 117–126

[19] Nahar G A, Madhani S S. Thermodynamics of hydrogen production by the steam reforming of butanol: Analysis of inorganic gases and light hydrocarbons. International Journal of Hydrogen Energy, 2010, 35(1): 98–109

[20] Leonzio G. Process analysis of biological Sabatier reaction for bio-methane production. Chemical Engineering Journal, 2016, 290(15): 490–498

[21] Denz N, Ausberg L, Bruns M, Viere T. Supporting resource efficiency in chemical industries IT-based integration of flow sheet simulation and material flow analysis. 21st CIRP Conference on Life Cycle Engineering, 2014, 15: 537–542

[22] Ou L, Thilakaratne R, Brown R C, Wright M M. Techno-economic analysis of transportation fuels from defatted microalgae via hydrothermal liquefaction and hydroprocessing. Biomass and Bioenergy, 2015, 72: 45–54

[23] Apostolakou A A, Kookos I K, Marazioti C, Angelopoulos K C. Techno-economic analysis of a biodiesel production process from vegetable oils. Fuel Processing Technology, 2009, 90(7-8): 1023–1031

[24] Sanchez M J G, Tsotsis T T. Catalytic membranes and membrane reactors. Weinheim: Wiley-VCH, 2002, 5–6

[25] Lim H. Hydrogen selectivity and permeance effect on the water gas shift reaction (WGSR) in a membrane reactor. Korean Journal of Chemical Engineering, 2015, 32(8): 1522–1527

[26] Turton R. Analysis, synthesis, and design of chemical processes. New Jersey: Pearson, 2013, 157–226

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