Progress in two-dimensional nanomaterials for micro-/nano-electromechanical system sensors: fabrication and applications

Abstract

The performance of micro-/nano-electromechanical systems (M/NEMSs) has been significantly improved through the integration of two-dimensional (2D) nanomaterials such as graphene, transition metal chalcogenides and hexagonal boron nitride, mainly due to their excellent mechanical strength, high electrical conductivity and superior thermal and chemical stability. Moreover, the fabrication, integration and functional properties of 2D nanomaterial-based M/NEMSs have been the subject of extensive research, especially regarding device reliability, packaging and pathways to large-scale commercialization. Furthermore, in the fields of biosensing and medical diagnostics, the inherent biocompatibility, photoactivity, and mechanical flexibility of 2D nanomaterials enable rapid response and high-sensitivity detection. Finally, future industrial applications will rely on scalable and cost-effective packaging solutions. The MEMS market is expected to grow at a compound annual growth rate (CAGR) of 7.9%, from $16.5 billion in 2024 to $24.2 billion in 2029.

Graphical abstract

Keywords

2D nanomaterial / M/NEMS sensor / micro-/nano-electromechanical system / sensor fabrication

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