Optical metalenses: fundamentals, dispersion manipulation, and applications

Abstract

Metasurfaces, also known as 2D artificial metamaterials, are attracting great attention due to their unprecedented performances and functionalities that are hard to achieve by conventional diffractive or refractive elements. With their sub-wave-length optical scatterers, metasurfaces have been utilized to freely modify different characteristics of incident light such as amplitude, polarization, phase, and frequency. Compared to traditional bulky lenses, metasurface lenses possess the advantages of flatness, light weight, and compatibility with semiconductor manufacture technology. They have been widely applied to a range of scenarios including imaging, solar energy harvesting, optoelectronic detection, etc. In this review, we will first introduce the fundamental design principles for metalens, and then report recent theoretical and experimental progress with emphasis on methods to correct chromatic and monochromatic aberrations. Finally, typical applications of metalenses and corresponding design rules will be presented, followed by a brief outlook on the prospects and challenges of this field.

Graphical abstract

Keywords

Metasurfaces / Metalenses / Flat optics / Nanophotonics / Chromatic and monochromatic aberrations

References

[1] Atwater, H.A. , Polman, A. , Shvets, G. : Plasmonics for improved photovoltaic devices. In: Materials for Sustainable Energy. pp. 1- 11 (2010)

[2] Khanikaev, A.B. , Wu, C. , Shvets, G. : Fano-resonant metamaterials and their applications. Nanophotonics 2 (4), 247- 264 (2013)

[3] Jahani, S. , Jacob, Z. : All-dielectric metamaterials. Nat. Nanotechnol. 11 (1), 23- 36 (2016)

[4] Yu, N. , Capasso, F. : Flat optics with designer metasurfaces. Nat. Mater. 13 (2), 139- 150 (2014)

[5] Kuznetsov, A.I. , Miroshnichenko, A.E. , Brongersma, M.L. , Kivshar, Y.S. : Optically resonant dielectric nanostructures. Science 354 (6314), aag2472 (2016)

[6] Genevet, P. , Capasso, F. , Aieta, F. , Khorasaninejad, M. , Devlin, R. : Recent advances in planar optics: from plasmonic to dielectric metasurfaces. Optica 4 (1), 139- 152 (2017)

[7] Rho, J. : Metasurfaces: Subwavelength nanostructure arrays for ultrathin flat optics and photonics. MRS Bull. 45 (3), 180- 187 (2020)

[8] Lalanne, P. , Chavel, P. : Metalenses at visible wavelengths: past, present, perspectives. Laser Photonics Rev. 11 (3), 1600295 (2017)

[9] Li, B. , Piyawattanametha, W. , Qiu, Z. : Metalens-based miniaturized optical systems. Micromachines 10 (5), 310 (2019)

[10] Tseng, M.L. , Hsiao, H.H. , Chu, C.H. , Chen, M.K. , Sun, G. , Liu, A.Q. , Tsai, D.P. : Metalenses: advances and applications. Adv. Optical Mater. 6 (18), 1800554 (2018)

[11] Schuller, J.A. , Barnard, E.S. , Cai, W. , Jun, Y.C. , White, J.S. , Brongersma, M.L. : Plasmonics for extreme light concentration and manipulation. Nat. Mater. 9 (3), 193- 204 (2010)

[12] Aieta, F. , Genevet, P. , Kats, M.A. , Yu, N. , Blanchard, R. , Gaburro, Z. , Capasso, F. : Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces. Nano Lett. 12 (9), 4932- 4936 (2012)

[13] Yu, N. , Genevet, P. , Kats, M.A. , Aieta, F. , Tetienne, J. , Capasso, F. , Gaburro, Z. : Light propagation with phase discontinuities: generalized laws of reflection and refraction. Science 334 (6054), 333- 337 (2011)

[14] Ni, X. , Emani, N.K. , Kildishev, A.V. , Boltasseva, A. , Shalaev, V.M. : Broadband light bending with plasmonic nanoantennas. Science 335 (6067), 427 (2012)

[15] Sun, S. , He, Q. , Xiao, S. , Xu, Q. , Li, X. , Zhou, L. : Gradient-index meta-surfaces as a bridge linking propagating waves and surface waves. Nat. Mater. 11 (5), 426- 431 (2012)

[16] Bharadwaj, P. , Deutsch, B. , Novotny, L. : Optical antennas. Adv. Optics Photonics 1 (3), 438- 483 (2009)

[17] Novotny, L. , Van Hulst, N. : Antennas for light. Nat. Photonics 5 (2), 83- 90 (2011)

[18] Svirko, Y. , Zheludev, N. , Osipov, M. : Layered chiral metallic microstructures with inductive coupling. Appl. Phys. Lett. 78 (4), 498- 500 (2001)

[19] Zou, L. , Withayachumnankul, W. , Shah, C.M. , Mitchell, A. , Bhaskaran, M. , Sriram, S. , Fumeaux, C. : Dielectric resonator nanoantennas at visible frequencies. Opt. Express 21 (1), 1344- 1352 (2013)

[20] Walther, B. , Helgert, C. , Rockstuhl, C. , Setzpfandt, F. , Eilenberger, F. , Kley, E.B. , Lederer, F. , Tünnermann, A. , Pertsch, T. : Spatial and spectral light shaping with metamaterials. Adv. Mater. 24 (47), 6300- 6304 (2012)

[21] Lin, J. , Mueller, J.P. , Wang, Q. , Yuan, G. , Antoniou, N. , Yuan, X.C. , Capasso, F. : Polarization-controlled tunable directional coupling of surface plasmon polaritons. Science 340 (6130), 331- 334 (2013)

[22] Cheng, H. , Liu, Z. , Chen, S. , Tian, J. : Emergent functionality and controllability in few-layer metasurfaces. Adv. Mater. 27 (36), 5410- 5421 (2015)

[23] Chen, H.T. , Taylor, A.J. , Yu, N. : A review of metasurfaces: physics and applications. Rep. Prog. Phys. 79 (7), 076401 (2016)

[24] Sun, S. , Yang, K.Y. , Wang, C.M. , Juan, T.K. , Chen, W.T. , Liao, C.Y. , He, Q. , Xiao, S. , Kung, W.T. , Guo, G.Y. , Zhou, L. , Tsai, D.P. : High-efficiency broadband anomalous reflection by gradient meta-surfaces. Nano Lett. 12 (12), 6223- 6229 (2012)

[25] Yu, Y.F. , Zhu, A.Y. , Paniagua-Domínguez, R. , Fu, Y.H. , Lukyanchuk, B. , Kuznetsov, A.I. : High-transmission dielectric metasurface with 2π phase control at visible wavelengths. Laser Photonics Rev. 9 (4), 412- 418 (2015)

[26] Chen, F.T. , Craighead, H.G. : Diffractive lens fabricated with mostly zeroth-order gratings. Opt. Lett. 21 (3), 177- 179 (1996)

[27] Chen, F.T. , Craighead, H.G. : Diffractive phase elements based on two-dimensional artificial dielectrics. Opt. Lett. 20 (2), 121- 123 (1995)

[28] Lalanne, P. , Astilean, S. , Chavel, P. , Cambril, E. , Launois, H. : Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings. Opt. Lett. 23 (14), 1081- 1083 (1998)

[29] Lalanne, P. , Astilean, S. , Chavel, P. , Cambril, E. , Launois, H. : Design and fabrication of blazed binary diffractive elements with sampling periods smaller than the structural cutoff. J. Opt. Soc. Am. A: 16 (5), 1143- 1156 (1999)

[30] Yin, L. , Vlasko-Vlasov, V.K. , Pearson, J. , Hiller, J.M. , Hua, J. , Welp, U. , Brown, D.E. , Kimball, C.W. : Subwavelength focusing and guiding of surface plasmons. Nano Lett. 5 (7), 1399- 1402 (2005)

[31] Liu, Z. , Steele, J.M. , Srituravanich, W. , Pikus, Y. , Sun, C. , Zhang, X. : Focusing surface plasmons with a plasmonic lens. Nano Lett. 5 (9), 1726- 1729 (2005)

[32] Huang, F.M. , Zheludev, N. , Chen, Y. , Abajo, F. : Focusing of light by a nanohole array. Appl. Phys. Lett. 90 (9), 091119 (2007)

[33] Aieta, F. , Genevet, P. , Yu, N. , Kats, M.A. , Gaburro, Z. , Capasso, F. : Out-of-plane reflection and refraction of light by anisotropic optical antenna metasurfaces with phase discontinuities. Nano Lett. 12 (3), 1702- 1706 (2012)

[34] Chen, X. , Huang, L. , Mühlenbernd, H. , Li, G. , Bai, B. , Tan, Q. , Jin, G. , Qiu, C.W. , Zhang, S. , Zentgraf, T. : Dual-polarity plasmonic metalens for visible light. Nat. Commun. 3 (1), 1198 (2012)

[35] Pors, A. , Nielsen, M.G. , Eriksen, R.L. , Bozhevolnyi, S.I. : Broadband focusing flat mirrors based on plasmonic gradient metasurfaces. Nano Lett. 13 (2), 829- 834 (2013)

[36] Fattal, D. , Li, J. , Peng, Z. , Fiorentino, M. , Beausoleil, R.G. : Flat dielectric grating reflectors with focusing abilities. Nat. Photonics 4 (7), 466- 470 (2010)

[37] Lin, D. , Fan, P. , Hasman, E. , Brongersma, M.L. : Dielectric gradient metasurface optical elements. Science 345 (6194), 298- 302 (2014)

[38] Khorasaninejad, M. , Zhu, A.Y. , Roques-Carmes, C. , Chen, W.T. , Oh, J. , Mishra, I. , Devlin, R.C. , Capasso, F. : Polarizationinsensitive metalenses at visible wavelengths. Nano Lett. 16 (11), 7229- 7234 (2016)

[39] Memarzadeh, B. , Mosallaei, H. : Array of planar plasmonic scatterers functioning as light concentrator. Opt. Lett. 36 (13), 2569- 2571 (2011)

[40] Pancharatnam, S. : Generalized theory of interference and its applications. Proc. Indian Acad. Sci. 44 (6), 398- 417 (1956)

[41] Berry, M.V. : The adiabatic phase and Pancharatnam’s phase for polarized light. J. Mod. Opt. 34 (11), 1401- 1407 (1987)

[42] Lu, F. , Sedgwick, F.G. , Karagodsky, V. , Chase, C. , Chang-Hasnain, C.J. : Planar high-numerical-aperture low-loss focusing reflectors and lenses using subwavelength high contrast gratings. Opt. Express 18 (12), 12606- 12614 (2010)

[43] Arbabi, A. , Horie, Y. , Ball, A.J. , Bagheri, M. , Faraon, A. : Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays. Nat. Commun. 6 (1), 7069 (2015)

[44] West, P.R. , Stewart, J.L. , Kildishev, A.V. , Shalaev, V.M. , Shkunov, V.V. , Strohkendl, F. , Zakharenkov, Y.A. , Dodds, R.K. , Byren, R. : All-dielectric subwavelength metasurface focusing lens. Opt. Express 22 (21), 26212- 26221 (2014)

[45] Khorasaninejad, M. , Crozier, K.B. : Silicon nanofin grating as a miniature chirality-distinguishing beam-splitter. Nat. Commun. 5 (1), 5386 (2014)

[46] Zhan, A. , Colburn, S. , Trivedi, R. , Fryett, T.K. , Dodson, C.M. , Majumdar, A. : Low-contrast dielectric metasurface optics. ACS Photonics 3 (2), 209- 214 (2016)

[47] Avayu, O. , Almeida, E. , Prior, Y. , Ellenbogen, T. : Composite functional metasurfaces for multispectral achromatic optics. Nat. Commun. 8 (1), 14992 (2017)

[48] Yuan, J. , Yin, G. , Jiang, W. , Wu, W. , Ma, Y. : Design of mechanically robust metasurface lenses for RGB colors. J. Opt. 19 (10), 105002 (2017)

[49] Khorasaninejad, M. , Aieta, F. , Kanhaiya, P. , Kats, M.A. , Genevet, P. , Rousso, D. , Capasso, F. : Achromatic metasurface lens at telecommunication wavelengths. Nano Lett. 15 (8), 5358- 5362 (2015)

[50] Lin, D. , Holsteen, A.L. , Maguid, E. , Wetzstein, G. , Kik, P.G. , Hasman, E. , Brongersma, M.L. : Photonic multitasking interleaved Si nanoantenna phased array. Nano Lett. 16 (12), 7671- 7676 (2016)

[51] Li, K. , Guo, Y. , Pu, M. , Li, X. , Ma, X. , Zhao, Z. , Luo, X. : Dispersion controlling meta-lens at visible frequency. Opt. Express 25 (18), 21419- 21427 (2017)

[52] Arbabi, E. , Arbabi, A. , Kamali, S.M. , Horie, Y. , Faraon, A. : Multiwavelength polarization-insensitive lenses based on dielectric metasurfaces with meta-molecules. Optica 3 (6), 628- 633 (2016)

[53] Aieta, F. , Kats, M.A. , Genevet, P. , Capasso, F. : Multiwavelength achromatic metasurfaces by dispersive phase compensation. Science 347 (6228), 1342- 1345 (2015)

[54] Arbabi, E. , Arbabi, A. , Kamali, S.M. , Horie, Y. , Faraon, A. : High efficiency double-wavelength dielectric metasurface lenses with dichroic birefringent meta-atoms. Opt. Express 24 (16), 18468- 18477 (2016)

[55] Arbabi, E. , Li, J. , Hutchins, R.J. , Kamali, S.M. , Arbabi, A. , Horie, Y. , Van Dorpe, P. , Gradinaru, V. , Wagenaar, D.A. , Faraon, A. : Two-photon microscopy with a double-wavelength metasurface objective lens. Nano Lett. 18 (8), 4943- 4948 (2018)

[56] Eisenbach, O. , Avayu, O. , Ditcovski, R. , Ellenbogen, T. : Metasurfaces based dual wavelength diffractive lenses. Opt. Express 23 (4), 3928- 3936 (2015)

[57] Fan, J.A. : Freeform metasurface design based on topology optimization. MRS Bull. 45 (3), 196- 201 (2020)

[58] Lin, Z. , Liu, V. , Pestourie, R. , Johnson, S.G. : Topology optimization of freeform large-area metasurfaces. Opt. Express 27 (11), 15765- 15775 (2019)

[59] Liu, Z. , Zhu, D. , Rodrigues, S.P. , Lee, K.T. , Cai, W. : Generative model for the inverse design of metasurfaces. Nano Lett. 18 (10), 6570- 6576 (2018)

[60] Pestourie, R. , Pérez-Arancibia, C. , Lin, Z. , Shin, W. , Capasso, F. , Johnson, S.G. : Inverse design of large-area metasurfaces. Opt. Express 26 (26), 33732- 33747 (2018)

[61] Lin, Z. , Roques-Carmes, C. , Christiansen, R.E. , Soljačić, M. , Johnson, S.G. : Computational inverse design for ultra-compact single-piece metalenses free of chromatic and angular aberration. Appl. Phys. Lett. 118 (4), 041104 (2021)

[62] Molesky, S. , Lin, Z. , Piggott, A.Y. , Jin, W. , Vucković, J. , Rodriguez, A.W. : Inverse design in nanophotonics. Nat. Photonics 12 (11), 659- 670 (2018)

[63] Wang, P. , Mohammad, N. , Menon, R. : Chromatic-aberrationcorrected diffractive lenses for ultra-broadband focusing. Sci. Rep. 6 (1), 21545 (2016)

[64] Hu, J. , Liu, C.H. , Ren, X. , Lauhon, L.J. , Odom, T.W. : Plasmonic lattice lenses for multiwavelength achromatic focusing. ACS Nano 10 (11), 10275- 10282 (2016)

[65] Phan, T. , Sell, D. , Wang, E.W. , Doshay, S. , Edee, K. , Yang, J. , Fan, J.A. : High-efficiency, large-area, topology-optimized metasurfaces. Light, Science & Applications 8 (1), 48 (2019)

[66] Chung, H. , Miller, O.D. : High-NA achromatic metalenses by inverse design. Opt. Express 28 (5), 6945- 6965 (2020)

[67] Khorasaninejad, M. , Shi, Z. , Zhu, A.Y. , Chen, W.T. , Sanjeev, V. , Zaidi, A. , Capasso, F. : Achromatic metalens over 60 nm bandwidth in the visible and metalens with reverse chromatic dispersion. Nano Lett. 17 (3), 1819- 1824 (2017)

[68] Arbabi, E. , Arbabi, A. , Kamali, S.M. , Horie, Y. , Faraon, A. : Controlling the sign of chromatic dispersion in diffractive optics with dielectric metasurfaces. Optica 4 (6), 625- 632 (2017)

[69] Wang, S. , Wu, P.C. , Su, V.C. , Lai, Y.C. , Hung Chu, C. , Chen, J.W. , Lu, S.H. , Chen, J. , Xu, B. , Kuan, C.H. , Li, T. , Zhu, S. , Tsai, D.P. : Broadband achromatic optical metasurface devices. Nat. Commun. 8 (1), 187 (2017)

[70] Wang, S. , Wu, P.C. , Su, V.C. , Lai, Y.C. , Chen, M.K. , Kuo, H.Y. , Chen, B.H. , Chen, Y.H. , Huang, T.T. , Wang, J.H. , Lin, R.M. , Kuan, C.H. , Li, T. , Wang, Z. , Zhu, S. , Tsai, D.P. : A broadband achromatic metalens in the visible. Nat. Nanotechnol. 13 (3), 227- 232 (2018)

[71] Lin, R.J. , Su, V.C. , Wang, S. , Chen, M.K. , Chung, T.L. , Chen, Y.H. , Kuo, H.Y. , Chen, J.W. , Chen, J. , Huang, Y.T. , Wang, J.H. , Chu, C.H. , Wu, P.C. , Li, T. , Wang, Z. , Zhu, S. , Tsai, D.P. : Achromatic metalens array for full-colour light-field imaging. Nat. Nanotechnol. 14 (3), 227- 231 (2019)

[72] Chen, W.T. , Zhu, A.Y. , Sanjeev, V. , Khorasaninejad, M. , Shi, Z. , Lee, E. , Capasso, F. : A broadband achromatic metalens for focusing and imaging in the visible. Nat. Nanotechnol. 13 (3), 220- 226 (2018)

[73] Hsiao, H.H. , Chen, Y.H. , Lin, R.J. , Wu, P.C. , Wang, S. , Chen, B.H. , Tsai, D.P. : Integrated resonant unit of metasurfaces for broadband efficiency and phase manipulation. Advanced Optical Materials 6 (12), 1800031 (2018)

[74] Shrestha, S. , Overvig, A.C. , Lu, M. , Stein, A. , Yu, N. : Broadband achromatic dielectric metalenses. Light Sci. Appl. 7 (1), 85 (2018)

[75] Fan, Z.B. , Qiu, H.Y. , Zhang, H.L. , Pang, X.N. , Zhou, L.D. , Liu, L. , Ren, H. , Wang, Q.H. , Dong, J.W. : A broadband achromatic metalens array for integral imaging in the visible. Light Sci. Appl. 8 (1), 67 (2019)

[76] Chen, W.T. , Zhu, A.Y. , Sisler, J. , Bharwani, Z. , Capasso, F. : A broadband achromatic polarization-insensitive metalens consisting of anisotropic nanostructures. Nat. Commun. 10 (1), 355 (2019)

[77] Chen, W.T. , Zhu, A.Y. , Sisler, J. , Huang, Y.W. , Yousef, K.M.A. , Lee, E. , Qiu, C.W. , Capasso, F. : Broadband achromatic metasurface-refractive optics. Nano Lett. 18 (12), 7801- 7808 (2018)

[78] Zhang, X. , Li, Q. , Liu, F. , Qiu, M. , Sun, S. , He, Q. , Zhou, L. : Controlling angular dispersions in optical metasurfaces. Light Sci. Appl 9 (1), 76 (2020)

[79] Qiu, M. , Jia, M. , Ma, S. , Sun, S. , He, Q. , Zhou, L. : Angular dispersions in terahertz metasurfaces: physics and applications. Phys. Rev. Appl. 9 (5), 054050 (2018)

[80] Aieta, F. , Genevet, P. , Kats, M. , Capasso, F. : Aberrations of flat lenses and aplanatic metasurfaces. Opt. Express 21 (25), 31530- 31539 (2013)

[81] Arbabi, A. , Arbabi, E. , Kamali, S.M. , Horie, Y. , Han, S. , Faraon, A. : Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations. Nat. Commun. 7 (1), 13682 (2016)

[82] Groever, B. , Chen, W.T. , Capasso, F. : Meta-lens doublet in the visible region. Nano Lett. 17 (8), 4902- 4907 (2017)

[83] Kim, C. , Kim, S.J. , Lee, B. : Doublet metalens design for high numerical aperture and simultaneous correction of chromatic and monochromatic aberrations. Opt. Express 28 (12), 18059- 18076 (2020)

[84] He, D. , Guo, Y. , Luo, X. , Zhang, F. , Wang, Y. , Li, X. , Wang, C. , Li, Z. , Ma, X. , Zhao, Z. , Pu, M. : Polarization-insensitive meta-lens doublet with large view field in the ultraviolet region. In: 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics. SPIE,, 108411A (2019)

[85] Tang, D. , Chen, L. , Liu, J. , Zhang, X. : Achromatic metasurface doublet with a wide incident angle for light focusing. Opt. Express 28 (8), 12209- 12218 (2020)

[86] Fan, C.Y. , Lin, C.P. , Su, G.J. : Ultrawide-angle and high-efficiency metalens in hexagonal arrangement. Sci. Rep. 10 (1), 15677 (2020)

[87] Shalaginov, M.Y. , An, S. , Yang, F. , Su, P. , Lyzwa, D. , Agarwal, A.M. , Zhang, H. , Hu, J. , Gu, T. : Single-element diffractionlimited fisheye metalens. Nano Lett. 20 (10), 7429- 7437 (2020)

[88] Kalvach, A. , Szabó, Z. : Aberration-free flat lens design for a wide range of incident angles. J. Optical Soc. Am. 33 (2), A66- A71 (2016)

[89] Engelberg, J. , Zhou, C. , Mazurski, N. , Bar-David, J. , Kristensen, A. , Levy, U. : Near-IR wide-field-of-view Huygens metalens for outdoor imaging applications. Nanophotonics 9 (2), 361- 370 (2020)

[90] Zhang, F. , Pu, M. , Li, X. , Ma, X. , Guo, Y. , Gao, P. , Yu, H. , Gu, M. , Luo, X. : Extreme-angle silicon infrared optics enabled by streamlined surfaces. Adv. Mater. 33 (11), e2008157 (2021)

[91] Chen, C. , Chen, P. , Xi, J. , Huang, W. , Li, K. , Liang, L. , Shi, F. , Shi, J. : On-chip monolithic wide-angle field-of-view metalens based on quadratic phase profile. AIP Adv. 10 (11), 115213 (2020)

[92] Martins, A. , Li, K. , Li, J. , Liang, H. , Conteduca, D. , Borges, B.H.V. , Krauss, T.F. , Martins, E.R. : On metalenses with arbitrarily wide field of view. ACS Photonics 7 (8), 2073- 2079 (2020)

[93] Pu, M. , Li, X. , Guo, Y. , Ma, X. , Luo, X. : Nanoapertures with ordered rotations: symmetry transformation and wide-angle flat lensing. Opt. Express 25 (25), 31471- 31477 (2017)

[94] Guo, Y. , Ma, X. , Pu, M. , Li, X. , Zhao, Z. , Luo, X. : High-efficiency and wide-angle beam steering based on catenary optical fields in ultrathin metalens. Advanced Optical Materials 6 (19), 1800592 (2018)

[95] Liu, W. , Li, Z. , Cheng, H. , Tang, C. , Li, J. , Zhang, S. , Chen, S. , Tian, J. : Metasurface enabled wide-angle fourier lens. Adv. Mater. 30 (23), e1706368 (2018)

[96] Kingslake, R. : A History of the Photographic Lens. Academic Press, Boston (1989)

[97] Xu, B. , Li, H. , Gao, S. , Hua, X. , Yang, C. , Chen, C. , Yan, F. , Zhu, S. , Li, T. : Metalens-integrated compact imaging devices for wide-field microscopy. Advanced Photonics 2 (6), 1- 8 (2020)

[98] Zou, X. , Zheng, G. , Yuan, Q. , Zang, W. , Chen, R. , Li, T. , Li, L. , Wang, S. , Wang, Z. , Zhu, S. : Imaging based on metalenses. PhotoniX 1 (1), 2 (2020)

[99] Chen, C. , Song, W. , Chen, J.W. , Wang, J.H. , Chen, Y.H. , Xu, B. , Chen, M.K. , Li, H. , Fang, B. , Chen, J. , Kuo, H.Y. , Wang, S. , Tsai, D.P. , Zhu, S. , Li, T. : Spectral tomographic imaging with aplanatic metalens. Light Sci. Appl. 8 (1), 99 (2019)

[100] Zhao, F. , Lu, R. , Chen, X. , Jin, C. , Chen, S. , Shen, Z. , Zhang, C. , Yang, Y. : Metalens-assisted system for underwater imaging. Laser Photonics Rev. 15 (8), 2100097 (2021)

[101] Khorasaninejad, M. , Chen, W.T. , Oh, J. , Capasso, F. : Super-dispersive off-axis meta-lenses for compact high resolution spectroscopy. Nano Lett. 16 (6), 3732- 3737 (2016)

[102] Zhu, A.Y. , Chen, W.T. , Sisler, J. , Yousef, K.M.A. , Lee, E. , Huang, Y.W. , Qiu, C.W. , Capasso, F. : Compact aberration-corrected spectrometers in the visible using dispersion-tailored metasurfaces. Advanced Optical Materials 7 (14), 1801144 (2019)

[103] Faraji-Dana, M. , Arbabi, E. , Arbabi, A. , Kamali, S.M. , Kwon, H. , Faraon, A. : Compact folded metasurface spectrometer. Nature. Communications 9 (1), 4196 (2018)

[104] Yesilkoy, F. , Arvelo, E.R. , Jahani, Y. , Liu, M. , Tittl, A. , Cevher, V. , Kivshar, Y. , Altug, H. : Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces. Nat. Photonics 13 (6), 390- 396 (2019)

[105] Shaltout, A. , Liu, J. , Kildishev, A. , Shalaev, V. : Photonic spin Hall effect in gap-plasmon metasurfaces for on-chip chiroptical spectroscopy. Optica 2 (10), 860- 863 (2015)

[106] Li, Z. , Palacios, E. , Butun, S. , Aydin, K. : Visible-frequency metasurfaces for broadband anomalous reflection and high-efficiency spectrum splitting. Nano Lett. 15 (3), 1615- 1621 (2015)

[107] Tan, X. , Zhang, H. , Li, J. , Wan, H. , Guo, Q. , Zhu, H. , Liu, H. , Yi, F. : Non-dispersive infrared multi-gas sensing via nanoantenna integrated narrowband detectors. Nat. Commun. 11 (1), 5245 (2020)

[108] Yan, C. , Yang, K.Y. , Martin, O.J.F. : Fano-resonance-assisted metasurface for color routing. Light Sci. Appl. 6 (7), e17017 (2017)

[109] Chen, B.H. , Wu, P.C. , Su, V.C. , Lai, Y.C. , Chu, C.H. , Lee, I.C. , Chen, J.W. , Chen, Y.H. , Lan, Y.C. , Kuan, C.H. , Tsai, D.P. : GaN metalens for pixel-level full-color routing at visible light. Nano Lett. 17 (10), 6345- 6352 (2017)

[110] Barelli, M. , Mazzanti, A. , Giordano, M.C. , Della Valle, G. , Buatier de Mongeot, F. : Color routing via cross-polarized detuned plasmonic nanoantennas in large-area metasurfaces. Nano Lett. 20 (6), 4121- 4128 (2020)

[111] Solomon, M.L. , Hu, J. , Lawrence, M. , García-Etxarri, A. , Dionne, J.A. : Enantiospecific optical enhancement of chiral sensing and separation with dielectric metasurfaces. ACS Photonics 6 (1), 43- 49 (2019)

[112] Khorasaninejad, M. , Chen, W.T. , Zhu, A.Y. , Oh, J. , Devlin, R.C. , Rousso, D. , Capasso, F. : Multispectral chiral imaging with a metalens. Nano Lett. 16 (7), 4595- 4600 (2016)

[113] Droulias, S. , Bougas, L. : Absolute chiral sensing in dielectric metasurfaces using signal reversals. Nano Lett. 20 (8), 5960- 5966 (2020)

[114] Chang, C.C. , Kort-Kamp, W.J.M. , Nogan, J. , Luk, T.S. , Azad, A.K. , Taylor, A.J. , Dalvit, D.A.R. , Sykora, M. , Chen, H.T. : Hightemperature refractory metasurfaces for solar thermophotovoltaic energy harvesting. Nano Lett. 18 (12), 7665- 7673 (2018)

[115] Yao, Y. , Liu, H. , Wu, W. : Spectrum splitting using multi-layer dielectric meta-surfaces for efficient solar energy harvesting. Appl. Phys. A Mater. Sci. Process. 115 (3), 713- 719 (2014)

[116] Shameli, M.A. , Yousefi, L. : Absorption enhancement in thin-film solar cells using an integrated metasurface lens. J. Opt. Soc. Am. B: Opt. Phys. 35 (2), 223- 230 (2018)

[117] Kamali, S.M. , Arbabi, E. , Arbabi, A. , Horie, Y. , Faraon, A. : Highly tunable elastic dielectric metasurface lenses. Laser Photonics Rev. 10 (6), 1002- 1008 (2016)

[118] Ee, H.S. , Agarwal, R. : Tunable metasurface and flat optical zoom lens on a stretchable substrate. Nano Lett. 16 (4), 2818- 2823 (2016)

[119] Shirmanesh, G.K. , Sokhoyan, R. , Wu, P.C. , Atwater, H.A. : Electro-optically tunable multifunctional metasurfaces. ACS Nano 14 (6), 6912- 6920 (2020)

[120] She, A. , Zhang, S. , Shian, S. , Clarke, D.R. , Capasso, F. : Adaptive metalenses with simultaneous electrical control of focal length, astigmatism, and shift. Sci. Adv. 4 (2), 9957 (2018)

[121] Arbabi, E. , Arbabi, A. , Kamali, S.M. , Horie, Y. , Faraji-Dana, M. , Faraon, A. : MEMS-tunable dielectric metasurface lens. Nature. Communications 9 (1), 812 (2018)

[122] Yin, X. , Steinle, T. , Huang, L. , Taubner, T. , Wuttig, M. , Zentgraf, TT. , Giessen, H. : Beam switching and bifocal zoom lensing using active plasmonic metasurfaces. Light Sci. Appl. 6 (7), e17016 (2017)

[123] Shalaginov, M.Y. , An, S. , Zhang, Y. , Yang, F. , Su, P. , Liberman, V. , Chou, J.B. , Roberts, C.M. , Kang, M. , Rios, C. , Du, Q. , Fowler, C. , Agarwal, A. , Richardson, K.A. , Rivero-Baleine, C. , Zhang, H. , Hu, J. , Gu, T. : Reconfigurable all-dielectric metalens with diffraction-limited performance. Nat. Commun. 12 (1), 1225 (2021)

RIGHTS & PERMISSIONS

2022 The Author(s)