Piezoelectric film-actuated motion platform with high resolution

Abstract

A piezoelectric film-actuated motion platform with high resolution, which can run in two directions within a horizontal plane, is presented. On the basis of the analysis of the working principle of a stick-slip mechanism, a mathematical model describing its dynamic behavior is set up and simulated. Experiments of the motion performance and carrying ability on the prototype are conducted. Results show that this type of platform has advantages including a simple structure, small volume, light weight, stable step length, and large traveling range. When the driving voltage is less than 30 V, step error is less than 0.5 ?m. The carrying ability of the platform is terrific and about 7–8 times its weight.

Keywords

bimorph / precision motion platform / stick-slip effect / micro manipulation / micro robot