Investigation of the dual-parameter material removal framework for coordinated multi-TIFs planning in magnetorheological jet polishing

Abstract

Magnetorheological jet polishing is a non-contact, deterministic technique for ultra-precision fabrication of hard and brittle optical materials. To address efficiency and scalability, this work develops a dual-parameter material removal model through dimensional analysis, coupling jet pressure and dwell time for flexible tool influence function (TIF) adaptation. A parameter planning algorithm is then established to allocate dwell times among multiple TIFs, enabling fabrication of microlens arrays (MLAs) with varying feature-to-spot ratios. Experiments reveal controllable subunit geometry, stable optical parameters, and edge effects evolving from amplification in small arrays to attenuation or reversal in larger ones, in agreement with model predictions. The proposed model and algorithm provide stable topography control and optical optimization across multiple array scales, demonstrating effectiveness for large-scale MLA fabrication and potential applicability to planar, spherical, and aspherical optical surfaces.

Graphical abstract

Keywords

magnetorheological jet polishing / ultra-precision fabrication / material removal modelling / parameter planning algorithm / micro cutting

References

[1] Cheng Q , Bahadori M , Glick M , Rumley S , Bergman K . Recent advances in optical technologies for data centers: a review. Optica, 2018, 5(11): 1354–1370

[2] Kumar S , Tong Z , Jiang X . Advances in the design and manufacturing of novel freeform optics. International Journal of Extreme Manufacturing, 2022, 4(3): 032004

[3] Khonina S N , Butt M A , Kazanskiy N L . A review on reconfigurable metalenses revolutionizing flat optics. Advanced Optical Materials, 2024, 12(14): 2302794

[4] Yuan S , Ma C , Fetaya E , Mueller T , Naveh D , Zhang F , Xia F . Geometric deep optical sensing. Science, 2023, 379(6637): eade1220

[5] Ma Y , Liu W , Liu X , Wang N , Zhang H . Review of sensing and actuation technologies–from optical MEMS and nanophotonics to photonic nanosystems. International Journal of Optomechatronics, 2024, 18(1): 2342279

[6] Zhan T , Yin K , Xiong J , He Z , Wu S T . Augmented reality and virtual reality displays: perspectives and challenges. iScience, 2020, 23(8): 101397

[7] Kwok H S , Fan Z . Preface to special issue on advanced optoelectronic and electronic devices toward future displays. Journal of Semiconductors, 2023, 44(9): 090101

[8] Khonina S N , Kazanskiy N L , Skidanov R V , Butt M A . Advancements and applications of diffractive optical elements in contemporary optics: A comprehensive overview. Advanced Materials Technologies, 2025, 10(4): 2401028

[9] Liu X . Enabling optical network technologies for 5G and beyond. Journal of Lightwave Technology, 2022, 40(2): 358–367

[10] Kuznetsov A I , Brongersma M L , Yao J , Chen M K , Levy U , Tsai D P , Zheludev N I , Faraon A , Arbabi A , Yu N , Chanda D , Crozier K B , Kildishev A V , Wang H , Yang J K W , Valentine J G , Genevet P , Fan J A , Miller O D , Majumdar A , Fröch J E , Brady D , Heide F , Veeraraghavan A , Engheta N , Alù A , Polman A , Atwater H A , Thureja P , Paniagua-Dominguez R , Ha S T , Barreda A I , Schuller J A , Staude I , Grinblat G , Kivshar Y , Peana S , Yelin S F , Senichev A , Shalaev V M , Saha S , Boltasseva A , Rho J , Oh D K , Kim J , Park J , Devlin R , Pala R A . Roadmap for optical metasurfaces. ACS Photonics, 2024, 11(3): 816–865

[11] Xiang C , Jin W , Huang D , Tran M A , Guo J , Wan Y , Xie W , Kurczveil G , Netherton A M , Liang D , Rong H , Bowers J E . High-performance silicon photonics using heterogeneous integration. IEEE Journal of Selected Topics in Quantum Electronics, 2021, 28(3): 1–15

[12] Ghosh G , Sidpara A , Bandyopadhyay P P . Review of several precision finishing processes for optics manufacturing. Journal of Micromanufacturing, 2018, 1(2): 170–188

[13] Li F , Bai Y , Hu H , Qiao G , Li L , Zhang F , Zhang X . Frequency response mechanism of surface smoothing and material removal on fused silica. Optics Express, 2025, 33(3): 4252–4268

[14] Hu H , Qi E , Luo X , Zhang X , Xue D . Rapid fabrication strategy for Ø1.5 m off-axis parabolic parts using computer-controlled optical surfacing. Applied Optics, 2018, 57(34): F37–F43

[15] Basu P , Verma J , Abhinav V , Ratnesh R K , Singla Y K , Kumar V . Advancements in lithography techniques and emerging molecular strategies for nanostructure fabrication. International Journal of Molecular Sciences, 2025, 26(7): 3027

[16] Cecil T , Peng D , Abrams D , Osher S J , Yablonovitch E . Advances in inverse lithography. ACS Photonics, 2022, 10(4): 910–918

[17] Winter J , Rapp S , Spellauge M , Eulenkamp C , Schmidt M , Huber H P . Ultrafast pump-probe ellipsometry and microscopy reveal the surface dynamics of femtosecond laser ablation of aluminium and stainless steel. Applied Surface Science, 2020, 511: 145514

[18] Dunlap N , Sulas-Kern D B , Weddle P J , Usseglio-Viretta F , Walker P , Todd P , Boone D , Colclasure A M , Smith K , Tremolet de Villers B J , Finegan D P . Laser ablation for structuring Li-ion electrodes for fast charging and its impact on material properties, rate capability, Li plating, and wetting. Journal of Power Sources, 2022, 537: 231464

[19] Kumar M , Alok A , Kumar V , Das M . Advanced abrasive-based nano-finishing processes: challenges, principles and recent applications. Materials and Manufacturing Processes, 2022, 37(4): 372–392

[20] Lin Z , Hu H , Dai Y , Yaoyu Z , Xue S . Prediction of surface roughness and the material removal rate in magnetorheological finishing. Optics Express, 2022, 30(26): 46157–46169

[21] Lu M M , Yang Y K , Lin J Q , Du Y S , Zhou X Q . Research progress of magnetorheological polishing technology: a review. Advances in Manufacturing, 2024, 12(4): 642–678

[22] Song D , Du H , Lin J , Zhou X , Wang R . A review on magnetorheological jet polishing technique for microstructured functional surfaces. Lubricants, 2022, 10(10): 237

[23] Tien D H , Trinh N D . Novel hybrid chemical magnetorheological fluid for polishing Ti–6Al–4V alloy. Materials and Manufacturing Processes, 2024, 39(12): 1798–1815

[24] Shen Z , Pan J , Zhang J , Yan Q . Preparation and processing performance of high steady-state magnetorheological finishing fluid. Smart Materials and Structures, 2023, 32(3): 035032

[25] Chen C , Guan C , Liu M , Dai Y , Hu H . Research on the magnetorheological finishing technology of a high-steepness optical element based on the virtual-axis and spiral scanning path. Micromachines, 2024, 15(9): 1154

[26] Wang B , Tie G , Shi F , Song C , Guo S . Research on the influence of the non-stationary effect of the magnetorheological finishing removal function on mid-frequency errors of optical component surfaces. Optics Express, 2023, 31(21): 35016–35031

[27] Kordonski W , Shorey A . Magnetorheological (MR) jet finishing technology. Journal of Intelligent Material Systems and Structures, 2007, 18(12): 1127–1130

[28] Peng W , Li S , Guan C , Shen X , Dai Y , Wang Z . Improvement of magnetorheological finishing surface quality by nanoparticle jet polishing. Optical Engineering, 2013, 52(4): 043401

[29] Wang T , Cheng H , Chen Y , Tam H . Multiplex path for magnetorheological jet polishing with vertical impinging. Applied Optics, 2014, 53(10): 2012–2019

[30] Kim W B , Nam E , Min B K , Choi D S , Je T J , Jeon E C . Material removal of glass by magnetorheological fluid jet. International Journal of Precision Engineering and Manufacturing, 2015, 16(4): 629–637

[31] Yang H , Cheng H , Feng Y , Jing X . Removal of millimeter-scale rolled edges using bevel-cut-like tool influence function in magnetorheological jet polishing. Applied Optics, 2018, 57(13): 3377–3384

[32] Hai K , Li L , Hu H , Zhang Z , Bai Y , Luo X , Yi L , Yang X , Xue D , Zhang X . Distribution model of the surface roughness in magnetorheological jet polishing. Applied Optics, 2020, 59(28): 8740–8750

[33] Lv Z Q , Yu W X , Yang X . Research on the magnetic-induced mechanical performances of magnetorheological elastomers. Applied Mechanics and Materials, 2012, 184–185: 1433–1437

[34] Lv Z , Hou R , Lu P , Wang X . Numerical and experimental study on the flow characteristics and the erosive ability of magnetorheological jet. International Journal of Advanced Manufacturing Technology, 2021, 116: 2909–2916

[35] Su Y , Song Y , Yue J . Analysis and experiment of controllability of magnetorheological fluids based on micro-pipeline. Frontiers of Mechanical Engineering in China, 2009, 4(3): 339–344

[36] Liu Q , Dong Z , Chen Z , Shen Y , Li Q , An P . Experimental investigation of flow-focusing-assisted magnetorheological jet polishing. Applied Optics, 2022, 61(21): 6366–6373

[37] Shao Y , Cheng K . Integrated modelling and analysis of micro-cutting mechanics with the precision surface generation in abrasive flow machining. International Journal of Advanced Manufacturing Technology, 2019, 105(11): 4571–4583

[38] Cheng K, Huo D(eds). Micro-cutting: Fundamentals and Applications. New York: John Wiley & Sons, 2013

[39] Uhlmann E , Roßkamp S . Modelling of material removal in abrasive flow machining. International Journal of Automotive Technology, 2018, 12(6): 883–891

[40] Cheng K , Shao Y , Jadva M , Bodenhorst R . Development of the improved Preston equation for abrasive flow machining of aerofoil structures and components. Proceedings of the Institution of Mechanical Engineers Part J: Journal of Engineering Tribology, 2019, 233(9): 1397–1404

[41] Buckingham E . On physically similar systems; illustrations of the use of dimensional equations. Physical Review, 1914, 4: 345

[42] Martins R D A . The origin of dimensional analysis. Journal of the Franklin Institute, 1981, 311(5): 331–337

[43] Pan S , Yan K , Lan H , Badal J , Qin Z . Adaptive step-size fast iterative shrinkage-thresholding algorithm and sparse-spike deconvolution. Computers & Geosciences, 2020, 134: 104343

[44] Beck A , Teboulle M . A fast iterative shrinkage-thresholding algorithm for linear inverse problems. SIAM Journal on Imaging Sciences, 2009, 2(1): 183–202

[45] Xu Q , Yang D , Tan J , Sawatzky A , Anastasio M A . Accelerated fast iterative shrinkage thresholding algorithms for sparsity‐regularized cone‐beam CT image reconstruction. Medical Physics, 2016, 43(4): 1849–1872

RIGHTS & PERMISSIONS

Higher Education Press