Special issue: Micro-electromechanical systems (MEMS)
Zhuangde JIANG
Front. Mech. Eng. ›› 2017, Vol. 12 ›› Issue (4) : 457 -458.
Special issue: Micro-electromechanical systems (MEMS)
Higher Education Press and Springer-Verlag GmbH Germany 2017
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