Ultrasonic linear motor using the L-B mode Langevin
transducer with an exponential horn
SHI Shengjun, CHEN Weishan, LIU Junkao, ZHAO Xuetao
Author information+
School of Mechatronics Engineering, Harbin Institute of Technology;
Show less
History+
Published
05 Jun 2008
Issue Date
05 Jun 2008
Abstract
An ultrasonic linear motor is proposed and fabricated by using the longitudinal and bending vibration double mode bolt-clamped Langevin type transducer to meet high power and speed requirements in the aerospace and semiconductor ind
SHI Shengjun, CHEN Weishan, LIU Junkao, ZHAO Xuetao.
Ultrasonic linear motor using the L-B mode Langevin
transducer with an exponential horn. Front. Mech. Eng., 2008, 3(2): 212‒217 https://doi.org/10.1007/s11465-008-0026-1
{{custom_sec.title}}
{{custom_sec.title}}
{{custom_sec.content}}
This is a preview of subscription content, contact us for subscripton.
References
1. Ueha S Tomikawa Y Ultrasonic Motors Theory andApplicationsOxfordClarendon Press 1993 2. Zhao Chunsheng Recent progress in ultrasonic motor techniquesJournal of Vibration, Measurement & Diagnosis 2004 24(1)15(in Chinese) 3. Hemsel T Wallaschek J Survey of the present stateof the art of piezoelectric linear motorsUltrasonics 2000 38(1–8)3740. doi:10.1016/S0041‐624X(99)00143‐2 4. Roh Y Kwon J Development of a new standingwave type ultrasonic linear motorSensorsand Actuators 2004 112(2–3)196202 5. He Siyuan Chen Weishan Xie Tao et al.Standing wave bi-directional linearly moving ultrasonicmotorIEEE Transactions on Ultrasonics Ferroelectricsand Frequency Control 1998 45(5)11331139. doi:10.1109/58.726435 6. Park J S Kim S T Kim J W et al.Ultrasonic linear motor using L1-B4 mode and itsanalysisJapanese Journal of Applied Physics 2005 44(1A)412416. doi:10.1143/JJAP.44.412 7. Zhang Fan Chen Weishan Liu Junkao et al.Bidirectional linear ultrasonic motor using longitudinalvibrating transducersIEEE Transactionson Ultrasonics Ferroelectrics and Frequency Control 2005 52(1)134138. doi:10.1109/TUFFC.2005.1397358 8. Yun C H Ishii T Nakamura K et al.A high power ultrasonic linear motor using a longitudinaland bending hybrid bolt-clamped langevin type transducerJapanese Journal of Applied Physics 2001 40(5B)37733776. doi:10.1143/JJAP.40.3773 9. Liu Jianfang Yang Zhigang Cheng Guangming et al.A Study of precision PZT line step motorProceedings of the CSEE 2004 24(4)102107(in Chinese) 10. Gu Chenglin Dong Gan Double π type linear piezoelectricultrasonic motorProceedings of the CSEE 1998 18(2)9699(in Chinese) 11. Li Huafeng Gu Chenglin Research on large torque travelingwave ultrasonic motorProceedings of theCSEE 2002 22(8)6770(in Chinese) 12. Kunioka T Takeda Y Matsuda T et al.XY stage driven by ultrasonic linear motors forthe electron-beam X-ray mask writer EB-X3Journal of Vacuum Science & Technology 1999 17(6)29172920. doi:10.1116/1.591096 13. Guo Jifeng Wu Jianguo Research on the high torqueand high precision ultrasonic motor for aerospace applicationJournal of Astronautics 2004 25(1)7076(in Chinese) 14. Lin Zhongmao Ultrasonic Horn Theory and DesignBeijingScience Press 1987 15. Xu Zhike Hu Minqiang Jin Long et al.Analysis of traveling wave type ultrasonic motorinput impedance characteristic using FEA methodProceedings of the CSEE 2005 25(18)131134(in Chinese)
AI Summary 中Eng×
Note: Please note that the content below is AI-generated. Frontiers Journals website shall not be held liable for any consequences associated with the use of this content.