Micro-spectrophotometer based on micro electro-mechanical
systems technology

doi:10.1007/s11465-008-0001-x

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Front. Mech. Eng. ›› 2008, Vol. 3 ›› Issue (1) : 37-43. DOI: 10.1007/s11465-008-0001-x

Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun¹, LI Zhenggang¹, WU Yihui², ZHANG Ping², XUAN Ming², JIA Hongguang²

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Abstract

A new mini-spectrophotometer is developed by adopting micro-silicon-slit and micro-silicon-fixer, which are based on micro electro-mechanical systems (MEMS) technology. Both the micro-silicon-slit and the micro-silicon-fixer have their own features, such as small volume and high precision, which are laid out and analyzed later. Meantime, through the analysis of the sample cell’s optical characteristics that have some impacts on the linearity of the spectrophotometer, a relationship equation, which is about the impact of the refractive index of the sample cell and the tested medium on the variety of the transmitted light intensity and the absorbency, is put forward. When the water and the air are taken as the referenced medium, the experiments demonstrate that the difference of the refractive index of the references does not influence the correlation coefficient r and the slope of the absorbency-concentration curve. The final results show that the new mini-spectrophotometer with micro-silicon-slit and micro-silicon-fixer is worked out, its correlation coefficient r > 0.999, and its refractive index resolving power is better than 0.01.

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ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang. Micro-spectrophotometer based on micro electro-mechanical systems technology. Front. Mech. Eng., 2008, 3(1): 37‒43 https://doi.org/10.1007/s11465-008-0001-x

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