1.Research Center of Ultrasonic Motor, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China; Applied Electronics Technology, Beijing University of Technology, Beijing 100022, China; 2.College of Mechanical Engineering & Applied Electronics Technology, Beijing University of Technology, Beijing 100022, China; 3.College of Mechanical & Electronic Engineering, Beijing Union University, Beijing 100020, China;
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