A nano-scale alignment method for imprint lithography

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Front. Mech. Eng. ›› 2006, Vol. 1 ›› Issue (2) : 157-161. DOI: 10.1007/s11465-006-0014-2

A nano-scale alignment method for imprint lithography

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front. Mech. Eng., 2006, 1(2): 157‒161 https://doi.org/10.1007/s11465-006-0014-2

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