
A nano-scale alignment method for imprint lithography
WANG Li, LU Bing-heng, DING Yu-cheng, QIU Zhi-hui, LIU Hong-zhong
Front. Mech. Eng. ›› 2006, Vol. 1 ›› Issue (2) : 157-161.
A nano-scale alignment method for imprint lithography
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