Nanopositioning and Nonlinearity Compensation for Step Imprint Lithography Tool

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Front. Mech. Eng. ›› 2006, Vol. 1 ›› Issue (1) : 6-13. DOI: 10.1007/s11465-005-0003-x

Nanopositioning and Nonlinearity Compensation for Step Imprint Lithography Tool

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front. Mech. Eng., 2006, 1(1): 6‒13 https://doi.org/10.1007/s11465-005-0003-x

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