1 Introduction
As a new family of 2D materials, nonlayered ultrathin nano-flakes have been successfully synthesized even down to the monolayer limits, resolving isotropic growth problems due to three-dimensional crystal structures [
1−
14], which demonstrate unique physicochemical properties such as monolayer ferroelectricity and piezoelectricity, new types of magnetism, high optoelectronic performance [
3,
8,
14−
16]. Indium sulfide (In
2S
3), a representative of III−VI chalcogenides with diverse polymorphism, is an attractive n-type semiconductor with potential applications in solar cells and flexible optoelectronics [
13,
17−
20]. In
2S
3 compounds could crystallize as tetragonal β-In
2S
3, cubic α-In
2S
3, and trigonal layered γ-In
2S
3, which can be distinguished by different ordered indium vacancies [
21]. Among these polymorphs, the tetragonal β-phase is most thermodynamically stable at room temperature. Meanwhile, 2D β-In
2S
3 have shown tunable defects related band gaps, high absorption coefficient, and excellent photoresponsivity, indicating the great potential for optoelectronic devices application [
22,
23]. Therefore, optoelectronic device applications of 2D β-In
2S
3 nanoflakes request controllable synthesis of high-quality and large domain-sizes samples, which could largely reduce electronic scattering effects to improve optoelectronic devices performance [
24].
Early research on the synthesis of 2D In
2S
3 primarily focused on the solution-phase methods, achieving polycrystalline 2D In
2S
3 with surface defects and contaminations [
24,
25]. Subsequently, a space-confined chemical vapor deposition (CVD) was developed using InI
3 and sulfur powders, which demonstrated the synthesis of 2D In
2S
3 nanoflakes with lateral size of ~10 μm and lowest thickness of 1.5 nm with broadband response for high quantum efficiency [
26]. However, CVD-synthesized In
2S
3 nanoflakes are generally limited in domain size, which largely limits its further application. Recently, physical vapor deposition (PVD) was applied to achieve a rapid growth of single crystal In
2S
3 with largest domain size of ~160 μm and a thickness of 20 nm, showing broadband response from visible to near-infrared region [
22,
27]. However, conventional PVD synthesis of 2D β-In
2S
3 nanostructures with large domain sizes remains a significant challenge, suffering from inherent three-dimensional bonds, and relatively weak In−S bond strength induced high volatility of the In
2S
3 powder, often leading to excessively high nucleation density and resulting in the formation of polycrystalline film with limited domain size and poor thickness control [
28-
30]. Despite the above problems, recent progress still needs to pave a significant gap towards large-scale synthesis of single-crystalline 2D In
2S
3 film.
Here, we aim to address the nucleation and epitaxial growth issues by employing H2O vapor to control the nucleation density and achieve large domain size of 2D β-In2S3 nanoflakes. This water-assisted PVD strategy greatly reduces the nucleation sites of 2D β-In2S3, which also results in ultrathin nanoflakes with lateral size of 270 μm with the thickness of 3.6 nm. The H2O assisted growth mechanism is also revealed as the elemental step controls of suppressed nucleation and slow-kinetic epitaxy. The fabricated large domain 2D β-In2S3 photodetectors exhibit reasonable photo-response characteristics and a fast response speed.
2 Experimental section
2.1 Preparation of β-In2S3 nanoflakes
2D β-In2S3 nanoflakes were synthesized on mica substrate in an atmospheric pressure physical vapor deposition (APPVD) system using In2S3 powder as precursor. Specifically, 20−50 mg of In2S3 powder (99.9%, Macklin) was placed in the central zone of a quartz tube furnace. Two freshly cleaved mica substrates were positioned in the downstream low-temperature region, located 12−15 cm away from the In2S3 precursor. Before growth, the system was purged with high-purity argon (200 sccm) for approximately 10 minutes to remove residual air. The furnace temperature was then heated to 850 °C and the growth time was maintained for 10 min. During the growth process, the argon carrier gas (20−60 sccm) was directed through a glass bottle filled with deionized water to introduce a controlled amount of water vapor into the reaction environment to actively participate in the chemical vapor deposition process. After reaction completion, the system was allowed to cool naturally to room temperature under continuous argon flow of 20−60 sccm without water vapor, preserving the structural integrity of the as-grown samples.
2.2 Transfer of 2D β-In2S3 nanoflakes
The 2D β-In2S3 nanoflakes were transferred onto copper grid or SiO2 using polymethyl methacrylate (PMMA)-assisted wet transfer process for TEM and Raman characterization. The In2S3/mica substrate was spin-coated with a 1 wt% PMMA solution: 10 s at 500 rpm for uniformity, followed by 50 s at 4500 rpm to achieve a thin and consistent film. The sample was then baked at 140 °C for 20 minutes to solidify the PMMA for its adhesion to In2S3 nanoflakes. And then the sample was immersed in a 1 wt% HF solution, enabling the PMMA/β-In2S3 film to detach from the mica substrate. The released film was immersed in deionized water to remove residual HF, then carefully transferred to the target substrate and baked at 90 °C for 5 minutes. Finally, the remaining PMMA was removed by immersing in hot acetone and isopropanol alcohol (about 70 °C), resulting in achieving clean β-In2S3 nanoflakes on the target substrates.
2.3 Characterization of 2D β-In2S3 nanoflakes
The optical microscope (OM, Olympus, BX53M) was used to obtain the surface morphology of our samples. The atomic force microscope (AFM, Oxford instruments, MPF-3D) equipped with scanning Kelvin Probe Force Microscopy (KPFM) was used to characterize micromorphology, thickness, and the surface potential of In2S3 nanowires or nanoflakes. The Raman spectrometer (Raman, Thermo Fisher Scientific, DXR3) with 532 nm laser as the excitation wavelength was used to characterize the phase of In2S3 samples. The transmission electron microscopy (TEM, FEI Tecnai F20) equipped with an energy dispersive X-ray (EDX) spectrometer was used to analyze the crystal structure and elemental composition of β-In2S3 nanoflakes, while selected-area electron diffraction data were also collected by the SAED module.
2.4 Fabrication and measurements of 2D β-In2S3 photodetectors
The device is fabricated via an Ultraviolet Maskless Lithography machine (TuoTuo Technology (Suzhou) Co., Ltd.). The electrodes were patterned on the β-In2S3 nanoflakes on mica substrates, and then metal films of In/Au (10/50 nm) were deposited by thermally evaporated deposition device (VNANO, VZZ-300S). The electrical and optoelectrical properties of β-In2S3 were characterized at room temperature using semiconductor analyzer system (PDA, FS-Pro) equipped with a probe station. The photodetector was illuminated with laser diodes at wavelengths of 520 nm and 650 nm and the incident optical power was measured using an optical power meter (Newport 843-R) to ensure reliable illumination conditions.
3 Results and discussion
Figure 1(a) shows the schematic of water-assisted growth strategy on mica substrate, in which high-purity In
2S
3 (~99.9%) powder was placed in the central zone of tube furnace. Two cleaved mica substrates were positioned at ~13−15 cm downstream from the In
2S
3 powder. High-purity argon (Ar) flow was introduced through a glass bottle containing deionized water, where the evaporated In and S clusters can mix with Ar-H
2O vapor, thereby participating in the nucleation and epitaxy processes (Fig. S1 of the Electronic Supplementary Materials). The Ar flow rate is directly proportional to the number of H
2O molecules, achieving the appropriate amount for tuning reaction kinetics. At room temperature, β-In
2S
3 has the covalent bonded nonlayered tetragonal structure, which belongs to the I4
1/amd space group with lattice constants of
a =
b = 7.68 Å,
c = 32.62 Å, and
α =
β =
γ = 90° [Figs. 1(b) and S2] [
21]. The atomic structure of (10
) plane shows tetragonal symmetry with ordered vacancies, while the (103) plane belongs quasi-triple symmetric structure. Optical image (OM) of 2D In
2S
3 nanoflakes obtained under Ar-H
2O flow rate of 20 sccm is shown in Fig. 1(c), exhibiting nucleation density is two orders of magnitude lower than that of the samples grown without H
2O (detailed in Fig. S3). The pyramid domain morphology of In
2S
3 nanoflakes [Fig. 1(c)] indicates water molecules actively influence the reaction kinetics, promoting a quasi-layer-by-layer growth mechanism. Large domain size of ~270 μm 2D In
2S
3 nanoflakes [Fig. 1(d)] were obtained by optimizing growth parameters, which strongly confirms that the participation of H
2O facilitates larger In
2S
3 domains. Atomic force microscopy (AFM) characterization reveals the thickness can be controlled from 3.5 nm to 14.4 nm [Figs. 1(e) and S4], exhibiting uniform surface and high crystalline quality. Therefore, water molecules play an important role in suppressing nucleation and promoting lateral expansion of domains.
Raman spectrum of the water-assisted In
2S
3 exhibits four distinct peaks at 247, 309, 323, and 367 cm
−1 [Fig. 1(f)]. The peaks at 247 cm
−1 and 367 cm
−1 can be assigned to A
1g vibrational modes of β-In
2S
3, while the Raman peaks at 309 cm
−1 and 323 cm
−1 correspond to E
g modes of β-In
2S
3 [
22,
31,
32]. Meanwhile, thickness dependent Raman measurements were also conducted to characterize 2D β-In
2S
3 [Fig. 1(g)]. For ultrathin samples below 10 nm, only two characteristic peaks of A
1g (247 cm
−1) and A
1g (367 cm
−1) were observed, whereas the E
g vibrational mode at 309 and 323 cm
−1 were suppressed. As the thickness increased, the peak around 315 cm
−1 split into two distinct peaks, identified as the E
g (309 cm
−1) and E
g (321 cm
−1). To evaluate the structural stability of β-In
2S
3, we compared the Raman spectra of sample exposed to ambient and stored under vacuum for six months (Fig. S5). The spectrum of β-In
2S
3 exposed to ambient air shows an additional prominent peak emerges at around 130 cm
−1, which matches the characteristic Raman mode of In
2O
3 [
33]. In contrast, the Raman spectrum of vacuum-stored sample does not exhibit noticeable peak shift. These results indicate that β‑In
2S
3 maintains its structural stability when kept in a vacuum environment. Figure 1(h) presents X-ray photoelectron spectroscopy (XPS) analysis of the as-grown sample before and after six months of exposure to ambient air. For the freshly synthesized sample, the In 3d core-level spectrum exhibits two obvious peaks of 444.7 eV and 452.2 eV, corresponding to the In 3d
5/2 and In 3d
3/2, respectively, which shows the energy splitting (Δ
E) of 7.5 eV in agreement with previously reported β-In
2S
3 [
32,
34]. In addition, after air exposure for six months, the XPS spectrum exhibits two distinct peaks at 446.2 and 453.7 eV, indicating surface oxidation after long time air exposure leads to the weak formation of In−O bonds and its reasonable stability [
34,
35]. Therefore, the water-assisted grown In
2S
3 samples are clearly identified as the β-phase and exhibit high purity and excellent crystalline quality. Moreover, XPS spectra for In 3d reveal a higher binding energy for the water assisted grown In
2S
3 nanoflakes compared to the sample stored for 6 months, indicating a potential modified surface environment with trace In−O bonding. This shift aligns with the higher electronegativity of oxygen relative to sulfur.
Transmission electron microscopy (TEM) and selected-area electron diffraction (SAED) were employed to characterize crystalline microstructure and chemical composition of β-In
2S
3 samples, which were transferred onto copper grids using wet chemical etching method [
8]. High-resolution TEM (HRTEM) image revealed the clear lattice fringe of 3.9 Å, which was indexed as the distance of (020) plane for β-In
2S
3 [Fig. 2(a)]. The corresponding SAED pattern [Fig. 2(b)] displays a hexagonal symmetric diffraction spot, matching well with the simulated diffraction along the [601] zone axis [Fig. 2(c)] and confirming single crystalline structure with quasi-triple symmetry. The elemental energy-dispersive X-ray spectroscopy (EDS) maps of In and S elements showed uniform distribution of In and S elements across the In
2S
3 nanoflake [Figs. 2(e) and (f)], respectively, which correspond to the area outlined in low-magnification TEM image [Fig. 2(d)]. The analysis of the EDS spectrum yields an atomic ratio of In to S approximately 39.7:60.3 (Fig. S6), which further confirms the high chemical purity and correct stoichiometry of our samples. The SAED pattern is indexed to the [601] zone axis, which is perpendicular to the (020) plane. By understanding theoretical atomic structure of β-In
2S
3 [Fig. 2(g)], the crystallographic orientation relative to the substrate can be unambiguously determined, finally revealing the horizontal growth plane corresponds to the (103) crystal plane.
Figure 3(a) shows the proposed schematic of water-assisted growth mechanism. As supported by prior studies, H
2O molecules can act as a mildly partial oxidizing agent at high temperature [
36]. Herein, we propose that the introduction of H
2O molecules can oxidize partial In−S clusters, inhibiting their function as active epitaxial growth centers and thereby dramatically reducing the overall nucleation density. The precursor flux is concentrated on the limited number of nucleus active sites, promoting lateral expansion via a slow kinetic process and enabling the formation of large-domain 2D β-In
2S
3 nanoflakes. The XPS results confirm that the mild oxidizing property of H
2O molecules does not completely oxidize In−S bonds into In−O bonds during the epitaxy process [
37]. Therefore, H
2O molecules act as the passivators that prevent large number of In−S clusters becoming epitaxial centers during the nucleation stage, which largely reduces nucleation densities and expands the domain size.
To elucidate the water-assisted growth mechanism, a series experiments were conducted to investigate the influence of critical parameters. The morphological evolution of 2D β-In2S3 was achieved by controlling Ar flow rate to modulate the growth kinetics in different atmospheres with and without H2O (Figs. 3 and S7). The optical images of β-In2S3 grown with H2O at Ar flow rates from 20 to 60 sccm at 600 °C are shown in Figs. 3(b)−(d). As the effective supply of H2O molecules enhanced, the average lateral domain size expanded from approximately 5 μm to 80 μm. Meanwhile, the estimated nucleation densities decreased from 7.1 × 108 m−2 to 3.3 × 107 m−2 [Fig. 3(e)]. In contrast, we evaluated the results of 2D β-In2S3 grown in pure Ar gas under identical growth conditions. Although the nucleation density experienced a slight decrease from 7.7 × 1011 m−2 to 2.2 × 1010 m−2 with increased flow rate, it remains at a relatively higher order of magnitude [Figs. 3(f)−(h)], also showing the restricted domain size of ~20 μm. Further epitaxial growth results in the formation of polycrystalline films with diverse grain boundaries and defects. To further check the general influence of H2O molecules, we conducted similar experiments on C-sapphire substrates. AFM image of β-In2S3 (Fig. S8) grown without H2O showed high nucleation density with domain sizes of ~500 nm. When H2O molecules were introduced into the atmosphere, the average domain size increased to 4−6 μm. These findings confirm that the general applicability of water-assisted strategy of synthesizing large-domain 2D β-In2S3 on diverse substrates.
The optical images of In
2S
3 samples grown at the temperature of 500 °C, 550 °C, and 600 °C for 10 minutes were shown in Figs. 4(a)−(c), respectively. At 600 °C, the β-In
2S
3 exhibits regular triangular crystalline domain [Fig. 4(a)]. When the temperature decreased to 550 °C, one-dimensional nanowire structures coexisted with the nanoflake morphology [Fig. 4(b)]. As the growth temperature further reduced to 500 °C, the dominant morphology of samples shifted to nanowires [Fig. 4(c)]. The grown results within the temperature range of 550−600 °C are presented in Fig. S9, exhibiting a more clearly transition process. This morphological evolution may be attributed to modified kinetic control at lower temperatures, which promotes the rapid deposition of In
2S
3 on specific crystal planes. At the high temperature, In−S atoms or clusters on the substrate possess higher mobility. Therefore, the growth process is thermodynamically driven towards the formation of 2D nanoflakes, which represent the structure with lowest surface energy for the crystal orientation [
3]. Conversely, at the low temperature, the diffusion ability of atoms or clusters is significantly limited, thus hindering the formation of 2D structure. Instead, atoms preferentially migrate to dangling bonds or defect sites on nanowires, leading to the deposition of specific crystal direction [
38−
41]. Figure 4(d) shows Raman spectrum of In
2S
3 nanowires on the SiO
2 substrate. Three distinct characteristic peaks are observed at A
1g (247 cm
−1), E
g (309 cm
−1), and A
1g (367 cm
−1), which are identical to β-In
2S
3 nanoflakes [Fig. 1(f)]. With the growth temperature fixed at 500 °C, the influence of Ar flow rate (with H
2O) on the nanowire growth was examined. As the flow rate increased from 20 to 60 sccm, the nucleation densities of β-In
2S
3 nanowires dramatically decreased by 1−2 orders of magnitude, while the maximum length of nanowires increased to ~100 μm [Figs. 4(e)−(g)]. This finding further confirms the nucleation suppression by H
2O molecules, which is consistent with our observations in the In
2S
3 nanoflake (Fig. 3). As depicted in Fig. 4(h), the AFM image and corresponding height profile of the In
2S
3 nanowire reveal a uniform nanowire morphology with a thickness of ~60 nm (Fig. S10), demonstrating well-defined structural integrity.
To investigate the optoelectronic properties of large domain 2D β-In
2S
3 nanoflakes grown with H
2O, roomtemperature electrical transport measurements were carried out. We constructed two-terminal β-In
2S
3 photodetectors on mica substrate, the schematic device configuration of which is shown in Fig. 5(a). The electrodes were patterned via direct-writing ultraviolet lithography equipment, followed by the deposition of 10 nm In and 50 nm Au layers as contact electrodes. The channel length was controlled to be ~6 μm. Figure 5(b) shows the differences of surface potential between In
2S
3 grown with H
2O and without H
2O, as measured by Au-referenced scanning Kelvin Probe Force Microscopy (KPFM). The results indicate that the work function of β-In
2S
3 nanoflakes grown with H
2O is 0.08 eV lower than that of β-In
2S
3 nanoflakes grown without H
2O, confirming a shift of the Fermi level toward a more intrinsic position [Figs. S11 and S12]. The surface potential mappings [Fig. 5(b)] suggest the different surface environments between two sample types. The current voltage (
I−
V) characteristics of β-In
2S
3 photodetector were measured under 650 nm laser illumination with different optical powers. The
I−
V curves demonstrate obvious rectification behavior within the voltage range of −2.5 V to 2.5 V [Fig. 5(c)], suggesting the Schottky contact at the semiconductor-electrode interface [
42]. When the incident power increased from dark states to 0.67 nW, the photocurrent (
Vds = 2.5 V) increased from 1.5 nA to 25.7 nA. The
increases nearly linearly with the increasing optical power [Fig. 5(d)], reaching a maximum
of 44 A·W
−1 at an incident power of 0.07 nW and a bias voltage of 2 V [
43].
The temporal photocurrent of the device was evaluated under 520 nm illumination at a bias of 1 V. Figure 5(e) shows the time-resolved photocurrent curve of the β-In
2S
3 photodetector measured at different power densities. As the light power density increased from 59 mW·cm
−2 to 147 mW·cm
−2, the photocurrent rose from about 0.1 nA to 0.25 nA, demonstrating a clear positive correlation with high photosensitivity. However, when the power density further increased to 232 mW·cm
−2, a reduction in the photocurrent is observed. This reduction can be attributed to the rapid saturation of trap states under strong illumination, which may limit efficient carrier generation and result in a lower photocurrent. All measured photocurrent curves exhibit stable, uniform, and highly reproducible switching characteristics over multiple cycles, demonstrating the robust and reliable photo-response stability of the β-In
2S
3 device. Figure 5(f) shows the response speed of the β-In
2S
3 device under 520 nm illumination, where the rise time (
) and decay time (
) are estimated to be ~ 6 ms and 7 ms, respectively. Compared to previous reports, our β-In
2S
3 sample exhibits a faster response time and excellent performance (Table S1). The energy band diagram under different states were schematically presented in Figs. 5(g)−(i). Figure 5(g) shows the band structure of the metal electrode prior to contact with the semiconductor. The Fermi level of β-In
2S
3 is approximately 4.75 eV, which is slightly higher than the work function of the In electrode (4.1 eV), inducing downward band bending at the interface and leading to the Schottky barrier [Fig. 5(h)]. The unequal contact areas of source and drain electrodes result in the formation of unbalanced charge injection effects [Fig. 5(b)], which contributes to final rectification characteristics. Under external bias and light illumination, photogenerated electron−hole pairs are driven in opposite directions across the Schottky barrier, thereby generating photocurrent under the bias [Fig. 5(i)]. In addition, the abundant trap states allow the capture of the photogenerated excitons by defect-related energy levels, resulting in prolonged carrier lifetimes and enhanced photo-response performance. Therefore, this work provides the mechanism understanding of 2D β-In
2S
3 photodetectors and the potential for large-scale integration in optoelectronic applications [
44,
45].
4 Conclusion
In this study, high-quality 2D single-crystal β-In2S3 nanoflakes were synthesized via water-assisted PVD strategy. The mild oxidation of H2O vapor effectively passivates In−S clusters, thereby inhibiting the nucleation density of In2S3 by three orders of magnitude and enabling the formation of large-area single crystals with a maximum size approaching 270 μm. Photodetectors based on water-assisted grown β-In2S3 exhibited excellent performance, including a high photoresponsivity of 44 A·W−1 and a fast response speed with rise and decay times of 6 and 7 ms, respectively. In conclusion, this work provides a new strategy for synthesizing large domain 2D non-layered materials for advanced optoelectronic devices applications.